H01L29/516

SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR STORAGE DEVICE
20230225133 · 2023-07-13 ·

A semiconductor storage device includes a field-effect transistor, an interlayer insulation film, a source contact, an opening, and a capacitor. The field-effect transistor is provided on a semiconductor substrate. The interlayer insulation film is provided on the semiconductor substrate. The source contact runs through the interlayer insulation film and is electrically coupled to a source of the field-effect transistor. The opening is provided in a region of the interlayer insulation film including the source contact and allows the source contact to project therein. The capacitor includes a lower electrode, a ferroelectric film, and an upper electrode. The lower electrode is provided along an inside shape of the opening. The ferroelectric film is provided on the lower electrode. The upper electrode is provided on the ferroelectric film to fill the opening.

MEMORY CELLS WITH NON-PLANAR FERROELECTRIC OR ANTIFERROELECTRIC MATERIALS

Memory cells with non-planar memory materials that include FE or AFE materials are described. An example memory cell includes a transistor provided over a support structure, where a memory material is integrated with a transistor gate. The channel material and the memory material are non-planar in that each includes a horizontal portion substantially parallel to the support structure, and a first and a second sidewall portions, each of which is substantially perpendicular to the support structure, where the horizontal portion of the memory material is between the horizontal portion of the channel material and a gate electrode material of the transistor gate, the first sidewall of the memory material is between the first sidewall of the channel material and the gate electrode material, and the second sidewall of the memory material is between the second sidewall of the channel material and the gate electrode material.

Transistor and fabrication method thereof

A transistor includes a gate, a channel layer, a gate insulation layer, a passivation layer, a liner, a first signal line, and a second signal line. The first signal line is embedded in the passivation layer to form a first via in the passivation layer and overlapping the channel layer. The second signal line is embedded in the passivation layer to form a second via in the passivation layer overlapping the channel layer. The second signal line is in contact with the channel layer. The liner includes an insulation region and a conductive region connected with the insulation region. The insulation region is disposed over the passivation layer and on sidewalls of the first via. The conductive region is disposed under a bottom of the first via and connected with the channel layer. The first signal line is electrically connected with the channel layer through the conductive region.

LAYER STRUCTURE INCLUDING DIELECTRIC LAYER, METHODS OF MANUFACTURING THE LAYER STRUCTURE, AND ELECTRONIC DEVICE INCLUDING THE LAYER STRUCTURE

A layer structure including a dielectric layer, a method of manufacturing the layer structure, and an electronic device including the layer structure are disclosed. The layer structure including a lower layer, a dielectric layer, and an upper layer sequentially stacked. The dielectric layer includes sequentially stacked first, second, and third layers, wherein one of the first layer or the third layer is a ferroelectric, the other one is an antiferroelectric, and the second layer is an oxide layer. In one example, the dielectric layer may further include a fourth layer on the third layer.

Ferroelectric capacitor, ferroelectric field effect transistor, and method used in forming an electronic component comprising conductive material and ferroelectric material

A method used in forming an electronic component comprising conductive material and ferroelectric material comprises forming a non-ferroelectric metal oxide-comprising insulator material over a substrate. A composite stack comprising at least two different composition non-ferroelectric metal oxides is formed over the substrate. The composite stack has an overall conductivity of at least 1×10.sup.2 Siemens/cm. The composite stack is used to render the non-ferroelectric metal oxide-comprising insulator material to be ferroelectric. Conductive material is formed over the composite stack and the insulator material. Ferroelectric capacitors and ferroelectric field effect transistors independent of method of manufacture are also disclosed.

Neuromimetic network and related production method

The present invention relates to a neuromimetic network comprising a set of neurons and a set of synapses, at least one neuron comprising a first stack of superimposed layers, the first stack successively comprising: a first electrode, a first barrier layer made of an electrically insulating material, and a second electrode, the first electrode, the first barrier layer and the second electrode forming a first ferroelectric tunnel junction, at least one synapse comprising a second stack of superimposed layers, the second stack successively comprising: a third electrode, a second barrier layer made of an electrically insulating material, and a fourth electrode, the third electrode, the second barrier layer and the fourth electrode forming a second ferroelectric tunnel junction.

Antiferroelectric perovskite gate oxide for transistor applications

An integrated circuit structure comprises a substrate. An antiferroelectric gate oxide is above the substrate, the antiferroelectric gate oxide comprising a perovskite material. A gate electrode is over at least a portion of the gate oxide.

Integrated assemblies and methods of forming integrated assemblies

Some embodiments include an integrated assembly having first and second pillars of semiconductor material laterally offset from one another. The pillars have source/drain regions and channel regions vertically offset from the source/drain regions. Gating structures pass across the channel regions, and extend along a first direction. An insulative structure is over regions of the first and second pillars, and extends along a second direction which is crosses the first direction. Bottom electrodes are coupled with the source/drain regions. Leaker-device-structures extend upwardly from the bottom electrodes. Ferroelectric-insulative-material is laterally adjacent to the leaker-device-structures and over the regions of the bottom electrodes. Top-electrode-material is over the ferroelectric-insulative-material and is directly against the leaker-device-structures. Some embodiments include methods of forming integrated assemblies.

Memory Array Gate Structures

A memory cell includes a thin film transistor over a semiconductor substrate. The thin film transistor comprising: a ferroelectric (FE) material contacting a word line, the FE material being a hafnium-comprising compound, and the hafnium-comprising compound comprising a rare earth metal; and an oxide semiconductor (OS) layer contacting a source line and a bit line, wherein the FE material is disposed between the OS layer and the word line.

METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE INCLUDING A MOS TRANSISTOR HAVING A SILICIDE LAYER
20220415658 · 2022-12-29 ·

A method for fabricating a MOS transistor includes: forming a gate dielectric material layer over a substrate; forming a lower gate electrode material layer over the gate dielectric material layer; performing a first ion bombardment process of bombarding the lower gate electrode material layer with first ions; forming an intermediate gate electrode material layer including an amorphous silicon layer over the lower gate electrode material layer; forming an upper gate electrode material layer over the intermediate gate electrode material layer; performing a second ion bombardment process for bombarding the upper gate electrode material layer with second ions; and forming silicide layers in the lower gate electrode material layer and the upper gate electrode material layer to form a lower gate electrode layer and an upper gate electrode layer.