Proton irradiation is performed a plurality of times from rear surface of an n-type semiconductor substrate, which is an n.sup. drift layer, forming an n-type FS layer having lower resistance than the n-type semiconductor substrate in the rear surface of the n.sup. drift layer. When the proton irradiation is performed a plurality of times, the next proton irradiation is performed to as to compensate for a reduction in mobility due to disorder which remains after the previous proton irradiation. In this case, the second or subsequent proton irradiation is performed at the position of the disorder which is formed by the previous proton irradiation. In this way, even after proton irradiation and a heat treatment, the disorder is reduced and it is possible to prevent deterioration of characteristics, such as increase in leakage current. It is possible to form an n-type FS layer including a high-concentration hydrogen-related donor layer.

A semiconductor device comprises: an n-type semiconductor substrate; a p-type anode region formed in the semiconductor substrate on its front surface side; an n-type field stop region formed in the semiconductor substrate on its rear surface side with protons as a donor; and an n-type cathode region formed in the semiconductor substrate to be closer to its rear surface than the field stop region is, wherein a concentration distribution of the donor in the field stop region in its depth direction has a first peak, and a second peak that is closer to the rear surface of the semiconductor substrate than the first peak is, and has a concentration lower than that of the first peak, and a carrier lifetime in at least a partial region between the anode region and the cathode region is longer than carrier lifetimes in the anode region.

A method of manufacturing a device in a semiconductor body includes forming a first field stop zone portion of a first conductivity type and a drift zone of the first conductivity type on the first field stop zone portion. An average doping concentration of the drift zone is smaller than 80% of that of the first field stop zone portion. The semiconductor body is processed at a first surface and thinned by removing material from a second surface. A second field stop zone portion of the first conductivity type is formed by implanting protons at one or more energies through the second surface. A deepest end-of-range peak of the protons is set in the first field stop zone portion at a vertical distance to a transition between the drift zone and first field stop zone portion in a range from 3 m to 60 m. The semiconductor body is annealed.

A process for producing at least two adjacent regions, each comprising an array of light-emitting wires connected together in a given region by a transparent conductive layer, comprises: producing, on a substrate, a plurality of individual zones for growing wires extending over an area greater than the cumulative area of the two chips; growing wires in the individual growth zones; removing wires from at least one zone forming an initial free area to define the arrays of wires, the initial free area comprising individual growth zones level with the removed wires; and depositing a transparent conductive layer on each array of wires to electrically connect the wires of a given array of wires, each conductive layer being separated from the conductive layer of the neighbouring region by a free area. A device obtained using the process of the invention is also provided.

A method of forming a semiconductor device includes forming a first vertical protection device comprising a thyristor in a substrate, forming a first lateral trigger element for triggering the first vertical protection device in the substrate, and forming an electrical path in the substrate to electrically couple the first lateral trigger element with the first vertical protection device.

A method of producing a four-layer silicon diode, including selecting a first silicon wafer, wherein said first silicon wafer is CZ-grown B-doped with <100> orientation, a resistivity of less than 0.01 Ohm-cm, and an oxygen content of greater than 10 ppma, and then selecting a second silicon wafer, wherein said second silicon wafer is CZ-grown P-doped with <100> orientation, a resistivity of less than 0.005 Ohm-cm, and an oxygen content of greater than 10 ppma, followed by cleaning the respective first and second silicon wafers. The wafers are then HF treated to yield respective first and second cleaned wafers, the first cleaned wafer is positioned into a first furnace and the second cleaned wafer is positioned into a second furnace, wherein the first and second furnaces are not unitary. Next is annealing the respective first and second cleaned wafers in a reducing atmosphere to yield respective first and second respective out-diffused gradient wafers, followed by bonding together respective first and second heat-treated wafers to yield a mated and/or bonded four-layer substrate having a first heavy doped n-type layer, a second gradient doped n-type layer, a third gradient doped p-type layer, and a fourth heavy doped p-type layer.

A manufacturing method for an AlAsGeAlAs structure based plasma p-i-n diode in a multilayered holographic antenna is provided. The manufacturing method includes: selecting a GeOI substrate and disposing an isolation region in the GeOI substrate; etching the GeOI substrate to form a P-type trench and an N-type trench; depositing AlAs materials in the P-type trench and the N-type trench and performing ion implantation into the AlAs materials in the P-type trench and N-type trench to form a P-type active region and an N-type active region; and forming leads on surfaces of the P-type active region and the N-type active region to obtain the AlAsGeAlAs structure based plasma p-i-n diode. Therefore, a high-performance Ge based plasma p-i-n diode suitable for forming a solid plasma antenna can be provided by using a deep trench isolation technology and an ion implantation process.

A method of manufacturing a semiconductor device includes forming a profile of net doping in a drift zone of a semiconductor body by multiple irradiations with protons and generating hydrogen-related donors by annealing the semiconductor body. At least 50% of a vertical extension of the drift zone between first and second sides of the semiconductor body is undulated and includes multiple doping peak values between 110.sup.13 cm.sup.3 and 510.sup.14 cm.sup.3.

A method of manufacturing a power semiconductor device includes: creating a doped contact region on top of a surface of a carrier; creating, on top of the contact region, a doped transition region having a maximum dopant concentration of at least 0.5*10.sup.15 cm.sup.3 for at least 70% of a total extension of the doped transition region in an extension direction and a maximal dopant concentration gradient of at most 3*10.sup.22 cm.sup.4, wherein a lower subregion of the doped transition region is in contact with the contact region and has a maximum dopant concentration at least 100 times higher than a maximum dopant concentration of an upper subregion of the doped transition region; and creating a doped drift region on top of the upper subregion of the doped transition region, the doped drift region having a lower dopant concentration than the upper subregion of the doped transition region.

A semiconductor device includes a plurality of compensation regions of a first conductivity type arranged in a semiconductor substrate. The semiconductor device further includes a plurality of drift region portions of a drift region of a vertical electrical element arrangement. The drift region has a second conductivity type. The drift region portions and the compensation regions are arranged alternatingly. At least portions of a border of a depletion region occurring in a static blocking state of the vertical electrical element arrangement are located within the drift region portions at a depth of less than a depth of at least a subset of the compensation regions.