An avalanche photodiode includes a stack of layers. The stack of layers includes an avalanche diode (of PN or PIN type) and a layer having quantum dots located therein. The stack of layers further includes: a charge extraction layer over the layer which includes quantum dots; a transparent conducting layer over the charge extraction layer; and an insulating layer over the transparent conducting layer. The quantum dots includes ligands formed by molecules of dopants.

An avalanche photodiode includes a stack of layers. The stack of layers includes an avalanche diode (of PN or PIN type) and a layer having quantum dots located therein. The stack of layers further includes: a charge extraction layer over the layer which includes quantum dots; a transparent conducting layer over the charge extraction layer; and an insulating layer over the transparent conducting layer. The quantum dots includes ligands formed by molecules of dopants.

A photosensitive device substrate including a substrate, an active device, and a photosensitive device is provided. The active device and the photosensitive device are disposed on the substrate. The active device has a semiconductor pattern and a gate electrode. The semiconductor pattern is disposed between the substrate and the gate electrode. The photosensitive device is electrically connected to the active device. The photosensitive device has a photoelectric conversion layer and a first electrode and second electrode disposed on two opposite sides of the photoelectric conversion layer. The first electrode is located between the photoelectric conversion layer and the semiconductor pattern, and the material of the first electrode includes a metal oxide.

A photosensitive device substrate including a substrate, an active device, and a photosensitive device is provided. The active device and the photosensitive device are disposed on the substrate. The active device has a semiconductor pattern and a gate electrode. The semiconductor pattern is disposed between the substrate and the gate electrode. The photosensitive device is electrically connected to the active device. The photosensitive device has a photoelectric conversion layer and a first electrode and second electrode disposed on two opposite sides of the photoelectric conversion layer. The first electrode is located between the photoelectric conversion layer and the semiconductor pattern, and the material of the first electrode includes a metal oxide.

The present invention relates to a focal plane array having a substrate wafer; an n-type indium arsenide layer disposed atop the substrate wafer; a barrier layer disposed atop the substrate wafer; and a doped n-type layer disposed atop the barrier layer. The present invention further relates to a focal plane array, having a substrate wafer; an n-type indium arsenide layer disposed atop the substrate wafer; and a p-type indium arsenide layer positioned at a first surface of the n-type indium arsenide layer opposite an interface surface of the n-type indium arsenide and the substrate wafer.

The present invention relates to a focal plane array having a substrate wafer; an n-type indium arsenide layer disposed atop the substrate wafer; a barrier layer disposed atop the substrate wafer; and a doped n-type layer disposed atop the barrier layer. The present invention further relates to a focal plane array, having a substrate wafer; an n-type indium arsenide layer disposed atop the substrate wafer; and a p-type indium arsenide layer positioned at a first surface of the n-type indium arsenide layer opposite an interface surface of the n-type indium arsenide and the substrate wafer.

The present disclosure relates to semiconductor structures and, more particularly, to a photodiode with an integrated, light focusing elements and methods of manufacture. The structure includes: a trench photodiode comprising a domed structure; and a doped material on the domed structure, the doped material having a concave underside surface.

The performances of a semiconductor device are improved. A method for manufacturing a semiconductor device includes the steps of: providing a semiconductor substrate having a gettering layer formed by ion implanting a cluster, and an epitaxial layer; subjecting the semiconductor substrate to a heat treatment at 800° C. or more, and thereby forming a hydrogen adsorption site; forming an element isolation film at the semiconductor substrate, to be performed thereafter; implanting an impurity for forming a first semiconductor region in the semiconductor substrate; implanting an impurity for forming a second semiconductor region; and performing a heat treatment for a photodiode, to be performed thereafter.

The performances of a semiconductor device are improved. A method for manufacturing a semiconductor device includes the steps of: providing a semiconductor substrate having a gettering layer formed by ion implanting a cluster, and an epitaxial layer; subjecting the semiconductor substrate to a heat treatment at 800° C. or more, and thereby forming a hydrogen adsorption site; forming an element isolation film at the semiconductor substrate, to be performed thereafter; implanting an impurity for forming a first semiconductor region in the semiconductor substrate; implanting an impurity for forming a second semiconductor region; and performing a heat treatment for a photodiode, to be performed thereafter.

There is to provide a semiconductor device including a light receiving element capable of reducing the manufacturing cost and improving the optical performance of the light receiving element. For example, a p type germanium layer, an intrinsic germanium layer, and an n type germanium layer forming the structure body of a Ge photodiode are formed according to a continuous selective epitaxial growth. An insulating film having an opening portion is formed on the silicon layer of a SOI substrate, and an intrinsic germanium layer is formed bulging from the opening portion to above the insulating film. In short, by using the insulating film having the opening portion, the cross section of the intrinsic germanium layer is formed into a mushroom shape.