Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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2221/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
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H01L2221/10
Applying interconnections to be used for carrying current between separate components within a device
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H01L2221/1005
Formation and after-treatment of dielectrics
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H01L2221/1052
Formation of thin functional dielectric layers
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H01L2221/1057
in via holes or trenches
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H01L2221/1063
Sacrificial or temporary thin dielectric films in openings in a dielectric
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