A vibrator device includes a vibrator having a first and second electrode, and a circuit device having a drive circuit adapted to drive the vibrator, and an output circuit adapted to output a monitor signal corresponding to a vibration characteristic of the vibrator while driven by the drive circuit. The circuit device includes a first terminal electrically connected to the first electrode, and from which an output signal from the drive circuit to the vibrator is output, a second terminal electrically connected to the second electrode, and to which an input signal from the vibrator to the drive circuit is input, a third terminal electrically separated from the first electrode and the second electrode, and a monitor terminal from which the monitor signal is output. The vibrator is supported on an active surface side of the circuit device using conductive bumps respectively to the first, second, and third terminal.

A piezoelectric vibration element that includes a piezoelectric piece having a first principal surface and a second principal surface; a via electrode penetrating the piezoelectric piece from the first principal surface to the second principal surface thereof; a conductive etch stop film covering the via electrode on the second principal surface; and a wiring electrode covering at least part of an outer edge of the conductive etch stop film on the second principal surface.

A vibrator includes: a vibration element that includes a pair of first excitation electrodes formed at the first vibration portion, a pair of second excitation electrodes formed at the second vibration portion, and a pair of third excitation electrodes formed at the third vibration portion, in which one second excitation electrode of the pair of second excitation electrodes is formed at a first inclined surface that is inclined with respect to two main surfaces, and one third excitation electrode of the pair of third excitation electrodes is formed at a second inclined surface that is inclined with respect to the two main surfaces and the first inclined surface; and a package that houses the vibration element. The vibration element includes a fixing portion to be fixed to the package. The fixing portion is provided between the first vibration portion and the second and third vibration portions.

A crystal oscillation element includes a crystal piece having principal planes defined by a first base axis and a second base axis that intersects the first base axis, and an excitation electrode unit at the principal planes of the crystal piece. The excitation electrode unit has flat plate portions and thick film portions located at electrode ends on the principal planes and that have a thickness larger than that of the flat plate portions. The thick film portion has first protruding portions at the ends in the axis direction of the first base axis, extend in the axis direction of the second base axis and protrude from the flat plate portion, and second protruding portions at the ends in the axis direction of the second base axis, extend in the axis direction of the first base axis and protrude from the flat plate portion.

A quartz crystal resonator unit that includes: a piezoelectric blank; a first excitation electrode on a first principal surface and within at least a part of a vibration portion of the piezoelectric blank; a second excitation electrode on a second principal surface and within at least a part of the vibration portion of the piezoelectric blank; a first extended electrode on the first principal surface and electrically connected to the first excitation electrode; and a second extended electrode on the second principal surface and electrically connected to the second excitation electrode; and an insulation layer including a hollow portion which defines a space with the second excitation electrode. A thickness of the first extended electrode is larger than a thickness of the second extended electrode. An end portion of the first extended electrode extends over the hollow portion in a plan view of the piezoelectric vibrator.

A single-chamber-type temperature-sensor-provided crystal unit includes: a single chamber; and a quartz-crystal vibrating piece and a temperature sensor, provided in the single chamber. The quartz-crystal vibrating piece has a square planar shape. The quartz-crystal vibrating piece is secured in the single chamber at two securing portions via conductive members. The two securing portions are in proximities of both ends of a first side of the quartz-crystal vibrating piece. The temperature sensor has a rectangular parallelepiped shape. The temperature sensor is disposed such that a longitudinal surface of the temperature sensor is parallel to a line segment Y and the temperature sensor is close to a side of the two securing portions within the single chamber, when a line segment connecting the two securing portions is defined as the line segment Y.

A vibrator device includes a semiconductor substrate, a vibrator unit, a cover, and an insulating film. The vibrator unit is disposed at a first surface of the semiconductor substrate, and includes a vibrator element, and an excitation electrode disposed at the vibrator element and having a portion facing the semiconductor substrate. The cover is bonded to the first surface in a joint portion surrounding the vibrator unit. The insulating film is disposed at the first surface. The insulating film overlaps the portion of the excitation electrode in plan view, and is absent at the joint portion of the semiconductor substrate and the cover.

A resonator device includes a base substrate including a principal surface, a side surface, and an inclined surface that couples the principal surface to the side surface and that is inclined with respect to the principal surface and the side surface, a resonator element arranged on the principal surface of the base substrate, and a lid that is bonded to the principal surface of the base substrate and accommodates the resonator element between the lid and the base substrate. A bonding area in which the base substrate and the lid are bonded is positioned inside an outer edge of the principal surface.

A vibrator device includes: an element substrate including a frame portion having a first surface and a second surface, and a vibrator element disposed inside the frame portion; a first substrate having a third surface and a fourth surface, the first substrate being bonded to the first surface of the frame portion at the third surface; a second substrate having a fifth surface and a sixth surface, the second substrate being bonded to the second surface of the frame portion at the fifth surface; and a cavity surrounded by the frame portion, the first substrate, and the second substrate. The second substrate includes a through electrode at a position overlapping the frame portion in the plan view. An outer shape of the through electrode in the sixth surface in the plan view includes a first portion and a second portion. The first portion is located at a position closer to the cavity than is the second portion. A curvature of the first portion is smaller than a curvature of the second portion.

A method for manufacturing a vibration element that includes a base portion, a first vibration arm and a second vibration arm that extend from the base portion along a first direction and are arranged along a second direction intersecting the first direction, and bottomed grooves on both main surfaces of the first vibration arm and both main surfaces of the second vibration arm includes: a preparing step of preparing a crystal substrate; a protective film forming step of forming a protective film on the crystal substrate except for groove regions that are regions in which the grooves are formed; and a dry etching step of dry etching the crystal substrate through the protective film to form the grooves. The grooves provided in at least one of the first vibration arm and the second vibration arm include a first groove and a second groove arranged along the second direction.