Patent classifications
H03H9/14541
Acoustic wave device
An acoustic wave device includes a piezoelectric substrate and an IDT electrode directly or indirectly disposed on the piezoelectric substrate. The IDT electrode includes first metal layers, a second metal layer disposed on one of the first metal layers, and a third metal layer disposed on the second metal layer. The first, second, and third metal layers include side surfaces, respectively. The side surface includes a first end portion adjacent to the second metal layer. The side surface includes a second end portion adjacent to the second metal layer. In at least a portion of the IDT electrode, a creepage distance stretching from the first end portion to the second end portion via the side surface of the second metal layer is longer than a distance between the first end portion and the second end portion.
ACOUSTIC WAVE RESONATOR, FILTER, MULTIPLEXER, AND METHOD OF FABRICATING ACOUSTIC WAVE RESONATOR
An acoustic wave resonator includes: a piezoelectric substrate; an IDT located on the piezoelectric substrate and including comb-shaped electrodes facing each other, each of the comb-shaped electrodes including: electrode fingers exciting an acoustic wave; and a bus bar to which the electrode fingers are connected; a dielectric film located on the piezoelectric substrate in an overlap region, where the electrode fingers of one of the comb-shaped electrodes and the electrode fingers of the other overlap, so as to cover the electrode fingers; and an additional film located on the dielectric film in the overlap region and having a density greater than that of the dielectric film, and of which a film thickness in edge regions corresponding to both edges of the overlap region in an extension direction of the electrode fingers is greater than a film thickness in a central region sandwiched between the edge regions in the overlap region.
Acoustic wave filter device and multiplexer
An acoustic wave filter device includes a piezoelectric layer, a high-acoustic-velocity member, a low-acoustic-velocity film between the high-acoustic-velocity member and the piezoelectric layer, and first and second IDT electrodes on the piezoelectric layer to define acoustic wave resonators. An acoustic wave resonator of a series-arm resonator portion closest to an antenna end and/or an acoustic wave resonator of a parallel-arm resonator portion closest to the antenna end includes the first IDT electrode including first and second electrode fingers, and the remaining acoustic wave resonators include the second IDT electrode including third and fourth electrode fingers. In the first IDT electrode, a central area, first and second low-acoustic-velocity areas, and first and second high-acoustic-velocity areas extend along a direction perpendicular or substantially perpendicular to an acoustic wave propagating direction. First and second envelopes connecting the tips of the third and fourth electrode fingers of the second IDT electrode are inclined.
ELECTROACOUSTIC FILTER INCLUDING SPLIT RESONATOR WITH DETUNING
Aspects of the disclosure relate to wireless communication, and high-frequency filters with resonators. One example is a frequency band filter circuit having a split resonator. The split resonator comprises a resonator including a first section of a shared input busbar, a first section of a shared output busbar, and an electrode structure between the first section of the shared input busbar and the first section of the shared output busbar, the electrode structure configured for a resonance. The split resonator also comprises a detuned resonator. The detuned resonator includes a second section of the shared input busbar, a second section of the shared output busbar, and a detuned electrode structure between the second section of the shared input busbar and the second section of the shared output busbar, the detuned electrode structure configured for a detuned resonance different from the resonance.
ELASTIC WAVE DEVICE, SPLITTER, AND COMMUNICATION APPARATUS
An elastic wave device includes a substrate, a multilayer film located on the substrate, a piezoelectric layer located on the multilayer film, resonators located on the piezoelectric layer and including an IDT electrode, and a protective film located on the resonators. The resonators include a first resonator and a second resonator having a higher resonant frequency than the first resonator. A thickness of the protective film on the first resonator is larger than the thickness of the protective film on the second resonator.
SURFACE ACOUSTIC WAVE DEVICE
A surface acoustic wave device includes a piezoelectric substrate and a pair of IDT electrodes. The pair of IDT electrodes includes a pair of busbars and multiple electrode fingers. The pair of busbars are formed on the piezoelectric substrate. The electrode fingers extend in a comb shape from each of the busbars toward the opposing busbar. The pair of IDT electrodes has an intersection region as a region where the electrode fingers connected to one busbar and the electrode fingers connected to another busbar are intersected when viewed along an arrangement direction of the electrode fingers. The electrode finger in a non-intersection region outside the intersection region has a thickness thinner than a thickness of the electrode finger in the intersection region.
Acoustic wave filter, multiplexer, radio frequency front-end circuit, and communication device
An acoustic wave filter includes: a series-arm resonator disposed on a path that connects input/output terminals; and a parallel-arm circuit connected to a node on the path and a ground. The parallel-arm circuit includes a parallel-arm resonator and a capacitor connected in parallel to each other. The capacitor includes a comb-shaped electrode that includes electrode fingers. A frequency at which impedance of the capacitor has a local maximum value is located outside a passband of the acoustic wave filter. The comb-shaped electrode has at least two different electrode finger pitches or at least two different electrode finger duty ratios.
ACOUSTIC WAVE DEVICE WITH MASS LOADING STRIP HAVING TAPERED SIDEWALL
Aspects of this disclosure relate to an acoustic wave device with transverse mode suppression. The acoustic wave device can include a piezoelectric layer, an interdigital transducer electrode, a temperature compensation layer, and a mass loading strip. The mass loading strip can overlap edge portions of fingers of the interdigital transducer electrode. The mass loading strip can have a sidewall that is tapered inwardly from a bottom side of the mass loading strip to a top side of the mass loading strip. The top side can be shorter than the bottom side.
Elastic wave device
An elastic wave device includes first mass adding films provided on a first dielectric film to overlap with first and second electrodes fingers of an IDT electrode when seen from above, extend in a direction in which the first and second electrode fingers extend, and are provided in a center region, and second and third mass adding films that are provided on the first dielectric film and are provided in first and second edge regions, respectively, and a portion of which overlap with at least one of the first and second electrode fingers when seen from above. Dimensions of the second and third mass adding films along an elastic wave propagation direction are larger than a dimension of the first mass adding films along the elastic wave propagation direction.
Multiplexer, radio-frequency front-end circuit, and communication device
A multiplexer includes a filter located between a common terminal and an individual terminal, and a filter that is located between the common terminal and an individual terminal and that has a pass band whose frequency is lower than the pass band of the filter. The filter includes serial arm resonators provided on the first path connecting the common terminal to the individual terminal. Each of the serial arm resonators includes a piezoelectric substrate and an IDT electrode which use leaky waves as principal acoustic waves. The occurrence frequency of the Rayleigh wave response of the serial arm resonator is different from that of the serial arm resonator.