An acoustic wave device includes: a piezoelectric substrate; and a pair of comb-shaped electrodes located on the piezoelectric substrate, each of the comb-shaped electrodes including a plurality of electrode fingers, side surfaces facing each other of the electrode fingers having a plurality of protrusion portions and a plurality of recessed portions arranged in an extension direction of the electrode fingers, ends of the protrusion portions and the recessed portions narrowing.

The present disclosure relates to acoustic wave devices, and particularly to high quality factor (Q) transducers for surface acoustic wave (SAW) devices. An exemplary SAW device includes an interdigital transducer (IDT) between two reflective gratings to form a resonator. The resonator operates through shear horizontal mode acoustic waves, and therefore suppression of transverse modes (parallel to electrode fingers of the IDT) is desired. A piston mode can be formed in the resonator to suppress transverse modes, which may also increase energy leakage and result in a lower Q. A higher Q is achieved by adding a fast region at an end of one or more of the electrode fingers of the IDT.

An acoustic wave device includes a piezoelectric substrate including a crystal axis and an IDT electrode. When an acoustic wave propagation direction is a first direction and a direction perpendicular to the first direction is a second direction, the crystal axis of the piezoelectric substrate is inclined toward the second direction with respect to the thickness direction. The IDT electrode includes first and second electrode fingers interdigitated with each other. The portion where the first and second electrode fingers overlap in the first direction is a crossing region. The crossing region includes a center region that is centrally located in the second direction and first and second low-acoustic-velocity regions that are located on both sides of the center region in the second direction and in which the acoustic velocity is lower than the acoustic velocity in the center region. The first and second low-acoustic-velocity regions are asymmetrical.

A ladder filter includes series-arm resonators each including an IDT electrode and a reflector, and a parallel-arm resonator. In at least one of the series-arm resonators, where a wavelength that is determined by an electrode finger pitch of the IDT electrode is λ, an electrode finger center-to-center distance between an electrode finger located closest to the reflector among electrode fingers of the IDT electrode and an electrode finger located closest to the IDT electrode among electrode fingers of the reflector is less than about 0.5λ, and an anti-resonant frequency of the at least one of the series-arm resonators is higher than an anti-resonant frequency of at least another one of the series-arm resonators.

Aspects of the disclosure relate to an electroacoustic device that includes a piezoelectric material and an electrode structure. The electrode structure includes a first busbar and a second busbar. The electrode structure further includes electrode fingers arranged in an interdigitated manner and including a first plurality of fingers connected to the first busbar and a second plurality of fingers connected to the second busbar. A first distance between the first busbar and the second plurality of fingers and a second distance between the second busbar and the first plurality of fingers both being less than a pitch of the electrode fingers. The electrode fingers have a central region with a first trap region and a second trap region respectively located on boundaries of the central region. A structural characteristic of the electroacoustic device is different in the first trap region and the second trap region relative to the central region.

Aspects of the disclosure relate to an electroacoustic device that includes a piezoelectric material and an electrode structure. The electrode structure includes a first busbar and a second busbar. The electrode structure further includes a first conductive structure connected to the first busbar and a second conductive structure connected to the second busbar. The first conductive structure and the second conductive structure is disposed between the first busbar and the second busbar. The first conductive structure and the second conductive structure each include a plurality of conductive segments separated from each other and extending towards one of the first busbar or the second busbar. The electrode structure further includes electrode fingers arranged in an interdigitated manner and each connected to either the first conductive structure or the second conductive structure. The electrode fingers have a pitch that is different than a pitch of the plurality of conductive segments.

An acoustic wave device with a bent section is disclosed. The acoustic wave device includes a piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer. The bent section is arranged to create a curvature in a waveguide of the acoustic wave device to suppress a transverse spurious mode of the acoustic wave device.

An acoustic wave device is disclosed. the acoustic wave device is configured to generate a wave having a wavelength of L. The acoustic wave device includes a piezoelectric layer a first layer of an interdigital transducer electrode over the piezoelectric layer, and a second layer of the interdigital transducer electrode over the first layer. The first layer has a material with a first mass density of ρ. The first mass density of ρ is greater than 5000 kg/m.sup.3. The first layer has a thickness of t1 less than 0.04 L. The first layer can have the thickness of t1 in a range between 0.0025 L(10220/ρ) and 0.04 L(10220/ρ). The second layer has a material with a second mass density that is smaller than the first mass density.

An acoustic wave device is disclosed. The acoustic wave device can be configured to generate a wave having a wavelength of L. The acoustic wave device can include a piezoelectric layer, a first layer of an interdigital transducer electrode over the piezoelectric layer, and a second layer of the interdigital transducer over the first layer. The first layer has a first material with a first mass density. The first material has a normalized mechanical loading exchange rate that is normalized by a mechanical loading exchange rate of molybdenum. The first layer has a thickness less than 0.04L multiplied by the normalized mechanical loading exchange rate of the first material. The second layer has a second material with a second mass density smaller than the first mass density.

An acoustic wave device includes a piezoelectric substrate and an IDT electrode provided on the piezoelectric substrate and includes a main electrode layer. In the IDT electrode, a central region, first and second low acoustic velocity regions and first and second high acoustic velocity regions are disposed in this order. A duty ratio in the first low acoustic velocity region of first electrode fingers and the second low acoustic velocity region of second electrode fingers is larger than a duty ratio in the central region. The main electrode layer includes any one of Au, Pt, Ta, Cu, Ni, and Mo as a main component.