The present invention is directed to a method for manufacturing an ultrasonic fingerprint sensor by using a nanorod structure, the method including: a conductive mold generating step of generating a plurality of rod generation holes; a nanorod generating step of generating nanorods by filling the plurality of rod generation holes with a nano-piezoelectric material; a side electrode generation portion marking step of marking side electrode generation portions; a conductive mold etching step of generating nanorods and side electrodes by performing primary etching on the conductive mold; an insulating material filling step of filling portions with an insulating material; a lower electrode forming step of performing secondary etching and forming lower electrodes; a dummy substrate bonding step of bonding a dummy substrate to a surface on which the lower electrodes are formed; and an upper electrode forming step of removing the conductive substrate base and forming upper electrodes.

An electric current based on electric charge produced on the piezoelectric body changes by going through a first path, a second path, a third path, and a fourth path in this order. On the first path, the electric current becomes larger as the voltage becomes higher. On the second path, the electric current becomes smaller as the voltage becomes higher. On the third path, the electric current becomes larger as the voltage becomes higher. On the fourth path, the electric current becomes smaller as the voltage becomes higher.

A piezoelectric element includes a piezoelectric body containing a piezoelectric ceramic material, and a first electrode and a second electrode disposed on the piezoelectric body to oppose each other. A stress received by the piezoelectric body from the first electrode is larger than a stress received by the piezoelectric body from the second electrode. A polarization direction of the piezoelectric body is a direction directed from the first electrode toward the second electrode.

A piezoelectric element including a piezoelectric layer having a perovskite structure including lead, zirconium, and titanium, and an electrode provided on the piezoelectric layer is provided. In the piezoelectric layer, in a range of 50 nm or smaller from an interface between the piezoelectric layer and the electrode in a thickness direction, a ratio c/a of a lattice spacing a in a direction perpendicular to the thickness direction and a lattice spacing c in the thickness direction satisfies 0.986≤c/a≤1.014.

Some embodiments relate to an energy transduction device or apparatus. An example device or apparatus includes: a piezoelectric transducer; electrical conductors electrically coupled to the piezoelectric transducer; and an axially aligned magnet assembly arranged to apply static compressive force to the piezoelectric transducer, the magnet assembly being coupled to a base at one end and having a free opposite end. The magnet assembly is coaxial with the piezoelectric transducer and at least part of the magnet assembly is concentric with the piezoelectric transducer. The magnet assembly defines a gap between axially adjacent parts of the magnet assembly, wherein the gap is dimensioned to be sufficiently small that the magnet assembly applies a static compressive force to the piezoelectric transducer while being sufficiently large to allow for axial movement of the piezoelectric transducer without closing the gap.

A film structure body has: a substrate that is a silicon substrate including an upper surface composed of a (100) plane; an orientation film including a zirconium oxide film that is cubic crystal (100)-oriented on the upper surface; and a conductive film including a platinum film that is cubic crystal (100)-oriented on the orientation film.

An actuator includes a substrate, a diaphragm on the substrate, a lower electrode on the diaphragm, a piezoelectric body on the lower electrode, and an upper electrode on the piezoelectric body. A ratio of lead (Pb) and zirconium (Zr) in atomic percent (atm %) present at a grain boundary in the piezoelectric body satisfies a relation of Pb/Zr>1.7.

The embodiments described herein include scanners that can provide improved scanning laser devices. Specifically, the embodiments described herein provide scanners with a modular construction that includes one or more separately formed piezoelectric actuators coupled to a microelectromechanical system (MEMS) scan plate, flexure structures, and scanner frame. Such modular scanners can provide improved scanning laser devices, including scanning laser projectors and laser depth scanners, LIDAR systems, 3D motion sensing devices, gesture recognition devices, etc.

An optical element includes a primary electrode, a secondary electrode overlapping at least a portion of the primary electrode, and an electrostrictive ceramic layer disposed between and abutting the primary electrode and the secondary electrode, where the electrostrictive ceramic may be characterized by a relative density of at least approximately 99%, an average grain size of at least approximately 300 nm, a transmissivity within the visible spectrum of at least approximately 70%, and bulk haze of less than approximately 10%. Optical properties of the electrostrictive ceramic may be substantially unchanged during the application of a voltage to the electrostrictive ceramic layer and the attendant actuation of the optical element.

Disclosed embodiments include illustrative piezoelectric element array assemblies, methods of fabricating a piezoelectric element array assembly, and systems and methods for shearing cellular material. Given by way of non-limiting example, an illustrative piezoelectric element array assembly includes at least one piezoelectric element configured to produce ultrasound energy responsive to amplified driving pulses. A lens layer is bonded to the at least one piezoelectric element. The lens layer has a plurality of lenses formed therein that are configured to focus ultrasound energy created by single ones of the at least one piezoelectric element into a plurality of wells of a microplate disposable in ultrasonic communication with the lens layer, wherein more than one of the plurality of lenses overlie single ones of the at least one piezoelectric element.