A thin film actuator having transversely oriented structural stiffeners that serve to increase actuation stroke that results from longitudinal curvature. The thin film actuator may be deployed within electromechanical devices such that an actuatable deflection of a tip of the actuator plate produces the actuation stroke. The thin film actuator may include an actuator plate affixed to a substantially rigid frame structure. The actuator plate protrudes along a longitudinal axis away from the frame structure such that the actuator plate is cantilevered from the frame structure by some distance along this longitudinal axis. The thin film actuator includes a piezoelectric film on a surface of the actuator plate. Activation of the piezoelectric film generates tensile stress or compressive stress at the surface, thereby inducing a bending moment that causes the actuator plate to undergo longitudinal curvature and some lesser degree of transverse curvature.

A mirror including a substrate (110), a reflection layer system (120), and at least one continuous piezoelectric layer (130, . . . ) arranged between the substrate and the layer system. An electric field producing a locally variable deformation is applied to the piezoelectric layer via a first, layer-system-side electrode arrangement and a second, substrate-side electrode arrangement. At least one of the electrode arrangements is assigned a mediator layer (170) setting an at least regionally continuous profile of the electrical potential along the respective electrode arrangement. The electrode arrangement to which the mediator layer is assigned has a plurality of electrodes (160, . . . ), each of which is configured to receive an electrical voltage relative to the respective other electrode arrangement. In the region that couples two respectively adjacent electrodes, the mediator layer is subdivided into a plurality of regions (171, . . . ) that are electrically insulated from one another.

A hard lead zirconate titanate (PZT) ceramic has an ABO.sub.3 structure with A sites and B sites. The PZT ceramic is doped with Mn and with Nb on the B sites and the ratio Nb/Mn is <2. A piezoelectric multilayer component having such a PZT ceramic and also a method for producing a piezoelectric multilayer component are also disclosed.

Disclosed herein is a microelectromechanical (MEMS) device, including a rotor and a first piezoelectric actuator mechanically coupled to the rotor. The first piezoelectric actuator is electrically coupled between a first signal node and a common voltage node. A second piezoelectric actuator is mechanically coupled to the rotor, and is electrically coupled between a second signal node and the common voltage node. Control circuitry includes a drive circuit configured to drive the first and second piezoelectric actuators, a sense circuit configured to process sense signals generated by the first and second pizeoelectric actuators, and a multiplexing circuit. The multiplexing circuit is configured to alternate between connecting the drive circuit to the first piezoelectric actuator while connecting the sense circuit to the second piezoelectric actuator, and connecting the drive circuit to the second piezoelectric actuator while connecting the sense circuit to the first piezoelectric actuator.

There is provided a piezoelectric element including: a substrate; a first electrode formed at a first substrate surface of the substrate in a first direction; a first piezoelectric layer that is formed at the first electrode and that includes a flat surface portion along the first substrate surface and an inclined surface portion inclined with respect to the flat surface portion; a second piezoelectric layer that is formed at the inclined surface portion 170a and whose thickness is smaller than a thickness of the flat surface portion of the first piezoelectric layer; and a second electrode formed at at least the flat surface portion.

There is provided liquid discharging head having unit heads. Each of the unit heads includes: first piezoelectric layer, driving electrodes arranged on surface of the first piezoelectric layer and to each of which one of first and second potentials is to be applied, and common electrode. The common electrode includes: potential receiving part configured to receive one of the first and second potentials; and extending part extending in extending direction orthogonal to the first direction, so as to overlap with the driving electrodes in the first direction. The unit heads are arranged so that the common electrodes of the plurality of unit heads are adjacent to each other in second direction orthogonal to the first direction. The extending directions of two of the common electrodes adjacent to each other in the second direction are opposite to each other.

A piezoelectric device includes a piezoelectric body, a vibration plate that vibrates when the piezoelectric body is driven, a first electrode positioned between the piezoelectric body and the vibration plate, and a second electrode positioned to be separated from the first electrode by the piezoelectric body. The piezoelectric body has an active portion that is a part sandwiched between the first electrode and the second electrode in a first direction along a thickness direction of the piezoelectric body, and a change width of a dC/dV value, which represents a change in capacitance with respect to a change in a voltage applied along a second direction orthogonal to the first direction, from one end of the active portion on a side of the first electrode to the other end of the active portion on a side of the second electrode in the first direction is 10% or less.

The piezoelectric laminate and the piezoelectric element have, on a substrate in the following order, a lower electrode layer and a piezoelectric film containing a perovskite-type oxide, in which the lower electrode layer contains a Ta element, contains a Ta nitride on a side closest to the piezoelectric film in a thickness direction of the lower electrode layer, and includes a region where a content of the Ta element changes in the thickness direction, and the change in the content of the Ta element in the thickness direction is continuous.

The piezoelectric laminate and the piezoelectric element have, on a substrate in the following order, a lower electrode layer and a piezoelectric film containing a perovskite-type oxide, in which the lower electrode layer includes the metal layer containing Ni and a surface layer containing a Ni oxide or a Ni oxynitride, and in the lower electrode layer, the surface layer is arranged on the side closest to the piezoelectric film.

Some embodiments of the invention relate to an applicator for applying ultrasound energy to a tissue volume, comprising: an array comprising a plurality of ultrasound transducers, the transducers arranged side by side, the transducers configured to emit unfocused ultrasound energy suitable to thermally damage at least a portion of the tissue volume, each of the transducers comprising a coating thin enough so as not to substantially affect heat transfer via the coating to the tissue; and a cooling module configured to apply cooling via the transducers to prevent overheating of a surface of the tissue volume being contacted by the transducers.