Methods and systems for realizing a high speed, rotating anode based x-ray illumination source suitable for high throughput x-ray metrology are presented herein. A high speed rotating anode includes a water cooled rotating platen supported by radial and thrust air bearings employing cascaded differential pumping. A very high bending stiffness of the rotating assembly is achieved by spacing radial air bearings far apart and locating a rotary motor and thrust bearings between the radial air bearings. The high bending stiffness increases the mechanical stability of the rotating assembly during high speed operation, and thus decreases vibration at the location of impingement of the electron beam on the rotating anode material. In some embodiments, magnetic thrust bearings are employed and the air gap is controlled to maintain a desired gap over an operational range of up to three millimeters.

A liquid metal or spiral groove bearing structure for an x-ray tube and associated process for manufacturing the bearing structure is provided that includes a bearing shaft rotatably disposed in a bearing housing or shell. The shell includes a thrust seal engaged with a sleeve to maintain co-axiality for the rotating liquid metal seal formed in the shell about the shaft. The shaft has a bore for the introduction of a cooling fluid into the bearing assembly in which is disposed a cooling tube. The cooling tube includes turbulence-inducing features to increase the turbulence of the cooling fluid flowing through the cooling tube, consequently enhancing the heat exchange between the cooling fluid and the shaft. This maximizes the heat transfer from the shaft to the oil, allowing materials with lower thermal conductivities, such as non-refractory materials, to be used to form the bearing shaft and shell.

A bearing structure for an X-ray tube is provided that includes a journal bearing shaft with a radially protruding thrust bearing flange encased within a bearing housing or sleeve. The sleeve includes a thrust seal that is engaged with the sleeve in a manner to maintain coaxiality for the rotating liquid metal seal formed in the sleeve about the shaft. The shaft includes a central bore containing a cooling tube that directs coolant within the bore to maximize the heat transfer from the shaft to the coolant, allowing materials with lower thermal conductivities, such as steel, to be used to form the bearing shaft. The thrust flange on the shaft is formed with channel(s) therein that enable the coolant and/or the liquid metal to effect greater heat transfer on the components of the sleeve through the thrust flange, thereby reducing thermal deformation of the bearing components.

A bearing structure for an X-ray tube is provided that includes a journal bearing shaft with a radially protruding thrust bearing flange encased within a bearing housing or sleeve. The sleeve includes a thrust seal that is engaged with the sleeve in a manner to maintain coaxiality for the rotating liquid metal seal formed in the sleeve about the shaft. The shaft includes a central bore containing a cooling tube that directs coolant within the bore to maximize the heat transfer from the shaft to the coolant, allowing materials with lower thermal conductivities, such as steel, to be used to form the bearing shaft. The thrust flange on the shaft is formed with channel(s) therein that enable the coolant and/or the liquid metal to effect greater heat transfer on the components of the sleeve through the thrust flange, thereby reducing thermal deformation of the bearing components.

An X-ray generating apparatus and an imaging device. The X-ray generating apparatus includes: a casing; a heat-conduction member, the heat-conduction member being arranged to run through the casing, and a through-channel being provided in the interior of the heat-conduction member, the through-channel being configured to circulate a cooling medium; an anode target, the anode target being configured to receive electron bombardment in order to generate X-rays, and the anode target is arranged in the casing and surrounding the heat-conduction member in a rotatable fashion. The imaging device includes a cooling system and an X-ray generating apparatus. The cooling system is in communication with two ends of the heat-conduction member, and the cooling system is configured to convey a cooling medium into the heat-conduction member.

A liquid metal or spiral groove bearing structure for an x-ray tube and associated process for manufacturing the bearing structure is provided that includes a bearing shaft rotatably disposed in a bearing housing or shell. The shell includes a thrust seal engaged with a sleeve to maintain co-axiality for the rotating liquid metal seal formed in the shell about the shaft. The shaft has a bore for the introduction of a cooling fluid into the bearing assembly in which is disposed a cooling tube. The cooling tube includes turbulence-inducing features to increase the turbulence of the cooling fluid flowing through the cooling tube, consequently enhancing the heat exchange between the cooling fluid and the shaft. This maximizes the heat transfer from the shaft to the oil, allowing materials with lower thermal conductivities, such as non-refractory materials, to be used to form the bearing shaft and shell.

An X-ray CT apparatus according to an embodiment includes: a rotatable gantry base; a housing that is fixed to the gantry base and that has an opening; an insert that is removably located in the housing and that includes a cathode that generates a thermal electron and an anode that receives collision of the thermal electron to generate an X-ray; and a blower that is removably attached to the side of the opening to flow air into the housing.

An X-ray generator comprising a target for receiving electrons and generating X-rays, a separator for dividing an internal space of the target into a coolant inflow path and a coolant outflow path, a motor for rotating the target, and a coolant inflow path and a coolant outflow path for supplying a coolant to the coolant inflow path and recovering the coolant through the coolant outflow path, wherein the separator rotates in the same rotation direction as the target when the target rotates. In the X-ray generator in which a coolant inflow path and a coolant outflow path are provided by a separator inside a rotating target, reduced torque load and reduced vibration can be realized.

A radiation emission device is provided. The radiation emission device may include a cathode configured to emit an electron beam and an anode configured to rotate on a shaft. The anode may be situated to receive the electron beam from the cathode. The radiation emission device may further include a rotor configured to drive the anode to rotate. The rotor may be mechanically connected to the shaft. The radiation emission device may further include a sleeve configured to support the shaft via at least one bearing. The cathode, the anode, and the rotor may be enclosed in an enclosure that is connected to the sleeve. At least a portion of the sleeve may reside outside the enclosure.

The present specification discloses a high power continuous X-ray source having a rotating target assembly that is cooled by circulation of a liquid material in contact with the target assembly, whereby the target assembly has a front surface being impinged by electrons and a mechanism for rotating the target assembly. The cooling liquid is always in contact with at least one surface of the target for dissipating the heat generated by the energy deposited by the stream of electrons, thereby lowering the temperature of the target to allow for continuous operation.