Patent classifications
H01J35/106
COOLED ROTATING ANODE X-RAY SOURCE
A rotating anode x-ray generator, comprising: a rotating anode x-ray source; an x-ray generator housing having an interior volume that houses the x-ray source and is configured to contain electrically insulating cooling oil for cooling the x-ray source immersed therein; a radiator exterior to the housing and configured to cool the cooling oil, and having an oil intake and an oil outlet in fluid communication with the interior volume; one or more oil pumps configured to pump the cooling oil from the interior volume of the housing into the radiator via the oil intake, such that the cooling oil passes through the radiator and returns back into the interior volume of the housing via from the oil outlet; and a fan configured to blow air over vanes of the radiator to cool the radiator and thereby increase an oil cooling capacity of the radiator.
Anode having a linear main extension direction
An anode with a linear main direction of extent for an x-ray device, has an anode body and a focal track layer, which is connected to the anode body in a material-bonding manner on a focal track layer volume portion of the anode body. At least one cooling channel for the cooling of the anode body and the focal track layer is arranged in the interior of the anode body and at least the focal track layer volume portion is formed of a material with at least a basic matrix of refractory metal. The focal track layer volume portion extends as far as to the cooling channel.
X-ray sources using linear accumulation
A compact source for high brightness x-ray generation is disclosed. The higher brightness is achieved through electron beam bombardment of multiple regions aligned with each other to achieve a linear accumulation of x-rays. This may be achieved by aligning discrete x-ray sub-sources, or through the use of x-ray targets that comprise microstructures of x-ray generating materials fabricated in close thermal contact with a substrate with high thermal conductivity. This allows heat to be more efficiently drawn out of the x-ray generating material, and in turn allows bombardment of the x-ray generating material with higher electron density and/or higher energy electrons, leading to greater x-ray brightness. The orientation of the microstructures allows the use of an on-axis collection angle, allowing the accumulation of x-rays from several microstructures to be aligned to appear to have a single origin, also known as zero-angle x-ray radiation.
Shielded x-ray source with radiation shielding and cooling system
An X-ray source includes an X-ray tube; a radiation shielding shell enclosing the X-ray tube, the radiation shielding shell including a collimator formed integrally with it, wherein the radiation shielding shell comprises finely dispersed powder, polyester or epoxy resin and hardener; a cooler system providing oil to the X-ray tube; and an oil filled tank supplying the oil to the cooler system. There is a central shielding element shaped as a cylinder inside the radiation shielding shell and one or more end shielding elements around the X-ray tube. The central and end shielding elements are made of lead.
High Brightness X-Ray Source For Semiconductor Metrology
PROBLEM TO BE SOLVED: To provide a rotary anode X-ray tube capable of achieving a long product life, or capable of increasing thermal input to an anode target. SOLUTION: A rotary anode X-ray tube 1 includes a cathode 60, an anode target 50, a fixed shaft 10, a rotating body 20, and a liquid metal LM. The fixed shaft 10 has a first radial bearing surface S10a and a second radial bearing surface S10b. The rotating body 20 has a third radial bearing surface S21a, a fourth radial bearing surface S21b, and a heat transmission region 21a to which the anode target 50 is fixed and the heat of which is transmitted. In a direction along the central axis A, the center of the heat transmission region 21a is located between a first dynamic bearing B1 and a second dynamic bearing B2.
ROTATING ANODE X-RAY TUBE
According to one embodiment, a rotating anode X-ray tube includes a cathode, an anode target, a sliding bearing including a rotor, a stationary shaft and a lubricant, and a vacuum tube. The rotor includes a bearing member formed to extend along a rotating axis and positioned to surround the stationary shaft. At least one of the stationary shaft and the bearing member are formed of tungsten carbide, silicon carbide, or titanium carbide.
X-ray generating apparatus and imaging device
An X-ray generating apparatus and an imaging device. The X-ray generating apparatus includes: a casing; a heat-conduction member, the heat-conduction member being arranged to run through the casing, and a through-channel being provided in the interior of the heat-conduction member, the through-channel being configured to circulate a cooling medium; an anode target, the anode target being configured to receive electron bombardment in order to generate X-rays, and the anode target is arranged in the casing and surrounding the heat-conduction member in a rotatable fashion. The imaging device includes a cooling system and an X-ray generating apparatus. The cooling system is in communication with two ends of the heat-conduction member, and the cooling system is configured to convey a cooling medium into the heat-conduction member.
ROTATING ANODE DISK ASSEMBLIES
In some embodiments, a system may include an X-ray tube assembly having an anode disk assembly. The system may include a motor configured to rotate the anode disk assembly. The system may include one or more pumps configured to draw a vacuum in the X-ray tube assembly. The system may include a cooling system configured to cool the anode disk assembly. In some embodiments, a method may include drawing a vacuum in an X-ray tube assembly with one or more pumps. The method may include rotating an anode disk assembly of the X-ray tube assembly. The method may include cooling the anode disk assembly with a cooling system. The method may include activating a power supply to produce an electron beam. The electron beam may interact with an X-ray generating layer of the anode disk assembly to produce an X-ray beam oriented to impinge on a sample.