H01L21/2251

DEVICE WITH EMBEDDED HIGH-BANDWIDTH, HIGH-CAPACITY MEMORY USING WAFER BONDING

A memory circuit includes: (i) a semiconductor substrate having a planar surface, the semiconductor substrate having formed therein circuitry for memory operations; (ii) a memory array formed above the planar surface, the memory array having one or more electrodes to memory circuits in the memory array, the conductors each extending along a direction substantially parallel to the planar surface; and (iii) one or more transistors each formed above, alongside or below a corresponding one of the electrodes but above the planar surface of the semiconductor substrate, each transistor (a) having first and second drain/source region and a gate region each formed out of a semiconductor material, wherein the first drain/source region, the second drain/source region or the gate region has formed thereon a metal silicide layer, and (b) selectively connecting the corresponding electrode to the circuitry for memory operations.

Asymmetric semiconductor device

A semiconductor device includes a first type region including a first conductivity type and a second type region including a second conductivity type. The semiconductor device includes a channel region extending between the first type region and the second type region. The semiconductor device includes a gate electrode surrounding at least some of the channel region. A first gate edge of the gate electrode is separated a first distance from a first type region edge of the first type region and a second gate edge of the gate electrode is separated a second distance from a second type region edge of the second type region. The first distance is less than the second distance.

Silicon carbide semiconductor device with trench gate structure and horizontally arranged channel and current spread regions

A semiconductor device includes trench gate structures that extend from a first surface into a silicon carbide portion. A shielding region between a drift zone and the trench gate structures along a vertical direction orthogonal to the first surface forms an auxiliary pn junction with the drift zone. Channel regions and the trench gate structures are successively arranged along a first horizontal direction. The channel regions are arranged between a source region and a current spread region along a second horizontal direction orthogonal to the first horizontal direction. Portions of mesa sections between neighboring trench gate structures fully deplete at a gate voltage within an absolute maximum rating of the semiconductor device.

Electronic device, manufacturing method for electronic device, and electronic apparatus
10734495 · 2020-08-04 · ·

An electronic device includes, a semiconductor layer, a source region and a drain region provided with the semiconductor layer to be interposed therebetween, a gate insulation film on the semiconductor layer between the source region and the drain region, and a gate of a graphene on the gate insulation film. The gate insulation film induces doping of charges in the graphene.

METHODS OF DOPING A SILICON-CONTAINING MATERIAL, METHODS OF FORMING A SEMICONDUCTOR DEVICE, AND RELATED SEMICONDUCTOR DEVICES
20200243339 · 2020-07-30 ·

A method of doping a silicon-containing material. The method comprises forming at least one opening in a silicon-containing material and conformally forming a doped germanium material in the at least one opening and adjacent to the silicon-containing material. A dopant of the doped germanium material is transferred into the silicon-containing material. Methods of forming a semiconductor device are also disclosed, as are semiconductor devices comprising a doped silicon-containing material.

EPITAXIAL WAFER AND METHOD OF FABRICATING THE SAME
20200243338 · 2020-07-30 ·

An epitaxial wafer and a method of fabricating an epitaxial wafer, the method including providing a semiconductor substrate doped with both boron and germanium such that a sum of boron concentration and germanium concentration is at least 8.5E+18 atoms/cm.sup.3 and the germanium concentration is 6 times or less the boron concentration; forming an epitaxial layer on the semiconductor substrate such that the semiconductor substrate and the epitaxial layer constitute the epitaxial wafer; and annealing the epitaxial wafer for 1 hour or longer at a temperature of 1,000 C. or less.

Forming vertical transistor devices with greater layout flexibility and packing density

A method of forming a fin field effect transistor circuit is provided. The method includes forming a plurality of vertical fins on a substrate, and forming a protective liner having a varying thickness on the substrate and plurality of vertical fins. The method further includes removing thinner portions of the protective liner from the substrate to form protective liner segments on the plurality of vertical fins. The method further includes removing portions of the substrate exposed by removing the thinner portions of the protective liner to form trenches adjacent to at least one pair of vertical fins and two substrate mesas. The method further includes laterally etching the substrate mesa to widen the trench, reduce the width of the substrate mesa to form a supporting pillar, and undercut the at least one pair of vertical fins, and forming a first bottom source/drain layer in the widened trench.

Semiconductor device structure and method of manufacture

This disclosure relates to a semiconductor device structure and method of manufacturing a semiconductor device. The semiconductor device structure comprises a semiconductor substrate having an edge region laterally separated from a device region; an edge termination structure arranged on the semiconductor substrate; wherein the edge termination structure comprises: a first oxide layer arranged on the substrate to extend from the active region to the edge region; an isolation layer arranged on top of the first oxide layer; and a metal layer arranged to at least partially cover the isolation layer and wherein the metal layer is further arranged to extend from the isolation layer to contact the edge region.

Fabrication of strained vertical p-type field effect transistors by bottom condensation

A method of forming a strained vertical p-type field effect transistor, including forming a counter-doped layer at a surface of a substrate, forming a source/drain layer on the counter-doped layer, forming one or more vertical fins on the source/drain layer, removing a portion of the source/drain layer to form one or more bottom source/drains below each of the one or more vertical fins, reacting an exposed portion of each of the one or more bottom source/drains with a reactant to form a disposable layer on opposite sides of each bottom source/drain and a condensation layer between the two adjacent disposable layers, and removing the disposable layers.

METHOD OF FABRICATION OF A SEMICONDUCTOR DEVICE INCLUDING ONE OR MORE NANOSTRUCTURES

A method of fabrication of a semiconductor device including implementation of fabrication of at least one stack made on a substrate, including at least one first portion of a first semiconductor and at least one second portion of a second semiconductor which is different from the first semiconductor, so the thickness of at least the first portion is substantially equal to the thickness of at least one nanostructure, and wherein the first or second semiconductor is capable of being selectively etched relative to the second or first semiconductor, respectively, fabrication, on a part of the stack, of external spacers and at least one dummy gate, etching of the stack such that the remaining parts of the first and second portions are arranged beneath the dummy gate and beneath the external spacers and form a stack of nanowires, after the etching of the stack, thermal treatment of the stack of nanowires.