Patent classifications
H
ELECTRICITY
Load children
H01
ELECTRIC ELEMENTS
Load children
H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
Load children
21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Load children Filter patents View analytics View as hierarchy
H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
Load children Filter patents View analytics View as hierarchy
H01L21/04
the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
Load children Filter patents View analytics View as hierarchy
H01L21/34
the devices having semiconductor bodies not provided for in groups H01L21/18, H10D48/04 and H10D48/07, with or without impurities, e.g. doping materials
Load children Filter patents View analytics View as hierarchy
H01L21/46
Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
Load children Filter patents View analytics View as hierarchy
H01L21/461
to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
Load children Filter patents View analytics View as hierarchy
H01L21/4763
Deposition of non-insulating, e.g. conductive -, resistive -, layers on insulating layers; After-treatment of these layers
Load children Filter patents View analytics View as hierarchy