Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/70
Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
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H01L21/71
Manufacture of specific parts of devices defined in group H01L21/70
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H01L21/768
Applying interconnections to be used for carrying current between separate components within a device; comprising conductors and dielectrics
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H01L21/76801
characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
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H01L21/76822
Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
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H01L21/76826
by contacting the layer with gases, liquids or plasmas
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