The present disclosure provides a semiconductor device structure with a conductive contact and a method for preparing the semiconductor device structure. The semiconductor device structure includes a dielectric layer disposed over a semiconductor substrate; a conductive contact penetrating through the dielectric layer; and a metal oxide layer separating the conductive contact from the dielectric layer, wherein the conductive contact and the metal oxide layer comprise a same metal.

Low capacitance and high reliability interconnect structures and methods of manufacture are disclosed. The method includes forming a copper based interconnect structure in an opening of a dielectric material. The method further includes forming a capping layer on the copper based interconnect structure. The method further includes oxidizing the capping layer and any residual material formed on a surface of the dielectric material. The method further includes forming a barrier layer on the capping layer by outdiffusing a material from the copper based interconnect structure to a surface of the capping layer. The method further includes removing the residual material, while the barrier layer on the surface of the capping layer protects the capping layer.

The present disclosure provides an integrated circuit structure with dielectric isolation structure for reducing capacitive coupling and crosstalk between conductive features and a method for preparing the same. The integrated circuit structure includes a plurality of conductive structures disposed over a substrate; a plurality of dielectric structures disposed over the conductive structures; an inter-layer dielectric (ILD) layer disposed over sidewalls of the dielectric structures and sidewalls of the conductive structures, wherein the ILD layer, the dielectric structure and the conductive structure form an air spacer therebetween; and a dielectric isolation structure including a liner layer enclosing an air gap in the ILD layer.

Some embodiment structures and methods are described. A structure includes an integrated circuit die at least laterally encapsulated by an encapsulant, and a redistribution structure on the integrated circuit die and encapsulant. The redistribution structure is electrically coupled to the integrated circuit die. The redistribution structure includes a first dielectric layer on at least the encapsulant, a metallization pattern on the first dielectric layer, a metal oxide layered structure on the metallization pattern, and a second dielectric layer on the first dielectric layer and the metallization pattern. The metal oxide layered structure includes a metal oxide layer having a ratio of metal atoms to oxygen atoms that is substantially 1:1, and a thickness of the metal oxide layered structure is at least 50 Å. The second dielectric layer is a photo-sensitive material. The metal oxide layered structure is disposed between the metallization pattern and the second dielectric layer.

The present disclosure provides a semiconductor structure having an air gap dielectric and a method for preparing the semiconductor structure. The semiconductor structure includes a substrate; a plurality of conductive pillars disposed over the substrate; a plurality of dielectric pillars, disposed over the substrate, separated from the conductive pillars; a plurality of dielectric caps disposed over the conductive pillars, separated from the dielectric pillars; and a sealing layer disposed over the dielectric pillars and the dielectric caps.

Low capacitance and high reliability interconnect structures and methods of manufacture are disclosed. The method includes forming a copper based interconnect structure in an opening of a dielectric material. The method further includes forming a capping layer on the copper based interconnect structure. The method further includes oxidizing the capping layer and any residual material formed on a surface of the dielectric material. The method further includes forming a barrier layer on the capping layer by outdiffusing a material from the copper based interconnect structure to a surface of the capping layer. The method further includes removing the residual material, while the barrier layer on the surface of the capping layer protects the capping layer.

A method of manufacturing a semiconductor device includes: providing a substrate, forming a first opening, forming a first insulating layer, forming a second opening, embedding a conductive layer, forming a protective layer, and performing CMP. The substrate includes a semiconductor substrate and a semiconducting layer. The conductive layer is embedded in the second opening so that a gap along a thickness direction of the semiconducting layer is formed. The protective layer is formed in the second opening on at least a portion of a surfaces of the conductive layer. In the CMP step, a portion of the conductive layers formed outside the second opening is removed.

A method includes depositing a dielectric cap over a gate structure. A source/drain contact is formed over a source/drain region after forming the dielectric cap. A top of the dielectric cap is doped to form a doped region in the dielectric cap. After doping the top of the dielectric cap, a etch stop layer and an interlayer dielectric (ILD) layer are deposited over the dielectric cap. A via opening is formed to extend though the ILD layer and the etch stop layer to expose the source/drain contact. A source/drain via is filled in the via opening.

A structure, such as a semiconductor device, includes metal line structures located over a substrate and laterally spaced apart from each other. Each of the metal line structures includes planar metallic liner including a first metal element and a metal line body portion includes a second metal element that is different from the first metal element. Metal-organic framework (MOF) material portions are located between neighboring pairs of the metal line structures and contain metal ions or clusters of the first metal element and organic ligands connected to the metal ions or clusters of the first metal element. Air gaps may be formed in the MOF material portions to further reduce the effective dielectric constant.

The present disclosure provides an integrated circuit structure with dielectric isolation structure for reducing capacitive coupling and crosstalk between conductive features and a method for preparing the same. The integrated circuit structure includes a plurality of conductive structures disposed over a substrate; a plurality of dielectric structures disposed over the conductive structures; an inter-layer dielectric (ILD) layer disposed over sidewalls of the dielectric structures and sidewalls of the conductive structures, wherein the ILD layer, the dielectric structure and the conductive structure form an air spacer therebetween; and a dielectric isolation structure including a liner layer enclosing an air gap in the ILD layer.