A method for fabricating a semiconductor device includes forming a first line pattern within sacrificial mandrel material disposed on at least one hard mask layer disposed on a substrate. The first line pattern has a pitch defined by a target line width and a minimum width of space between lines. The method further includes forming, within the first line pattern, a first spacer having a width corresponding to the minimum width of space between lines to minimize pinch points and a first gap having the target line width, and forming a first plug within the first gap corresponding to a first location above the at least one hard mask layer to block pattern transfer into the at least one hard mask layer.

Apparatus, systems, or methods for a memory array having a plurality of word lines. A word line includes at least one word line plate, and the word line plate comprises a first material with a first resistivity. An edge of the word line plate is recessed and filled with a second material having a second resistivity that is lower than the first resistivity. As a result, the total resistance of the word line may be reduced compared to a word line using only the first material with the first resistivity. Other embodiments may also be described and claimed.

Various embodiments of the present disclosure are directed towards a method for opening a source line in a memory device. An erase gate line (EGL) and the source line are formed elongated in parallel. The source line underlies the EGL and is separated from the EGL by a dielectric layer. A first etch is performed to form a first opening through the EGL and stops on the dielectric layer. A second etch is performed to thin the dielectric layer at the first opening, wherein the first and second etches are performed with a common mask in place. A silicide process is performed to form a silicide layer on the source line at the first opening, wherein the silicide process comprises a third etch with a second mask in place and extends the first opening through the dielectric layer. A via is formed extending through the EGL to the silicide layer.

A connecting structure includes a substrate, a first conductive feature, a second conductive feature, a third conductive feature over the first conductive feature and a fourth conductive feature over the second conductive feature. The substrate includes a first region and a second region. The first conductive feature is disposed in the first region and has a first width. The second conductive feature is disposed in the second region and has a second width greater than the first width of the first conductive feature. The third conductive feature includes a first anchor portion surrounded by the first conductive feature. The fourth conductive feature includes a second anchor portion surrounded by the second conductive feature. A depth difference ratio between a depth of the first anchor portion and a depth of the second anchor portion is less than approximately 10%.

A method for repairing a substrate and an electronic device are disclosed, wherein the electronic device includes: a substrate; a patterned metal layer disposed on the substrate, and the patterned metal layer including a first metal section and a second metal section which is disconnected to the first metal section, wherein at least one of the first metal section and the second metal section has a through hole; and a first conductive layer electrically connected to one of the first metal section and the second section by the through hole; wherein the first conductive layer has a protrusion, the protrusion locating outside the through hole.

A manufacturing method of a multilayered board, includes: a dot pattern forming process that forms a dot pattern comprising at least one hemispherical micro-lens shape by repeating a process of forming one hemispherical micro-lens shape by jetting one droplet for forming the dot pattern in an inkjet manner; and a stack pattern forming process that forms a stack pattern having a thickness less than that of the micro-lens by jetting a droplet for forming the stack pattern on a predetermined area around the dot pattern in the inkjet manner.

An electronic device and method of fabricating the same are provided herein. The electronic device includes a first main pad; a second main pad; a first repair line electrically connected to the first main pad; a second repair line electrically connected to the second main pad, wherein the first repair line and the second repair line forms a first weldable region; a first spare pad; a second spare pad; a connection line electrically connected to the second repair line, the first spare pad and the second spare pad; and a first electronic unit disposed on the first main pad and the second main pad.

The present disclosure provides a semiconductor chip including a functional area, a first end, a second end, a third end, and a connecting portion. The functional area has first and second sides opposite to each other. The first end is disposed on the first side and the third end is disposed on the first side, wherein the semiconductor chip is switched on or off according to the drive signal received between the third end and the first end, and the connecting portion is disposed on the first side of the functional area and connected to the first end and the third end, wherein when the temperature rises above the a first temperature, the connecting portion is in a conductive state, and when the temperature drops to be not higher than a third temperature, the connecting portion is in an insulated state.

Interconnect structures having top vias self-aligned to metal line ends and techniques for formation thereof are provided. In one aspect, an interconnect structure includes: at least one metal line disposed on a substrate; at least one top via over the at least one metal line, wherein the at least one top via is aligned with an end of the at least one metal line, and wherein a sidewall of the at least one top via is curved. A dielectric fill material can be disposed adjacent to the at least one top via having sidewalls that are also curved. A method of fabricating an interconnect structure is also provided.

Examples of an integrated circuit a having an advanced two-dimensional (2D) metal connection with metal cut and methods of fabricating the same are provided. An example method for fabricating a conductive interconnection layer of an integrated circuit may include: patterning a conductive connector portion on the conductive interconnection layer of the integrated circuit using extreme ultraviolet (EUV) lithography, wherein the conductive connector portion is patterned to extend across multiple semiconductor structures in a different layer of the integrated circuit; and cutting the conductive connector portion into a plurality of conductive connector sections, wherein the conductive connector portion is cut by removing conductive material from the metal connector portion at one or more locations between the semiconductor structures.