A semiconductor device includes a plurality of fins over a substrate. Each fin of the plurality of fins extends in a first direction substantially perpendicular to a bottom surface of the substrate, and each fin of the plurality of fins comprises a first doped region having a first dopant type. The semiconductor device further includes an isolation region over the substrate between a first fin of the plurality of fins and a second fin of the plurality of fins adjacent to the first fin. The semiconductor device further includes a second doped region extends continuously across the isolation region, the second doped region extends into each fin of the plurality of fins, and a dimension of the second doped region in the isolation region in a second direction perpendicular to the first direction is less than a dimension of the at least one isolation region in the second direction.

Embodiments of mechanisms for forming dislocations in source and drain regions of finFET devices are provided. The mechanisms involve recessing fins and removing the dielectric material in the isolation structures neighboring fins to increase epitaxial regions for dislocation formation. The mechanisms also involve performing a pre-amorphous implantation (PAI) process either before or after the epitaxial growth in the recessed source and drain regions. An anneal process after the PAI process enables consistent growth of the dislocations in the source and drain regions. The dislocations in the source and drain regions (or stressor regions) can form consistently to produce targeted strain in the source and drain regions to improve carrier mobility and device performance for NMOS devices.

A tunneling field effect transistor device disclosed herein includes a substrate, a body comprised of a first semiconductor material being doped with a first type of dopant material positioned above the substrate, and a second semiconductor material positioned above at least a portion of the gate region and above the source region. The first semiconductor material is part of the drain region, and the second semiconductor material defines the channel region. The device also includes a third semiconductor material positioned above the second semiconductor material and above at least a portion of the gate region and above the source region. The third semiconductor material is part of the source region, and is doped with a second type of dopant material that is opposite to the first type of dopant material. A gate structure is positioned above the first, second and third semiconductor materials in the gate region.

The disclosed subject matter provides a semiconductor structure and fabrication method thereof. In a semiconductor structure, a dielectric layer, a plurality of discrete gate structures, and a plurality of sidewall spacers are formed on a semiconductor substrate. The plurality of discrete gate structures and sidewall spacers are formed in the dielectric layer, and a sidewall spacer is formed on each side of each gate structure. A top portion of each gate structure and a top portion of the dielectric layer between neighboring sidewall spacers of neighboring gate structures are removed. A protective layer is formed on each of the remaining dielectric layer and the remaining gate structures. Contact holes are formed on the semiconductor substrate, between neighboring sidewall spacers, and on opposite sides of the protective layer on the remaining dielectric layer. A metal plug is formed in each contact hole.

The present disclosure provides semiconductor devices, fin field-effect transistors and fabrication methods thereof. An exemplary fin field-effect transistor includes a semiconductor substrate; an insulation layer configured for inhibiting a short channel effect and increasing a heat dissipation efficiency of the fin field-effect transistor formed over the semiconductor substrate; at least one fin formed over the insulation layer; a gate structure crossing over at least one fin and covering top and side surfaces of the fin formed over the semiconductor substrate; and a source formed in the fin at one side of the gate structure and a drain formed in the fin at the other side of the gate structure.

The disclosed subject matter provides a method for fabricating a three-dimensional transistor. The method includes forming an active region and two isolation structures on a semiconductor substrate. The active region is formed between the two isolation structures. The method further includes forming a photoresist layer on the active region and the isolation structures, forming an opening in the photoresist layer to expose a top surface of the active region and a portion of a top surface of each isolation structure, and then forming a trench on each side of the active region by removing a portion of the corresponding isolation structure exposed in the opening through an etching process using the photoresist layer as an etch mask. After the etching process, the portion of the active region between the two trenches becomes a three-dimensional fin structure. The disclosed method simplifies fabrication process for three-dimensional transistors and reduces product cost.

A semiconductor device with reinforced gate spacers and a method of fabricating the same. The semiconductor device includes low-k dielectric gate spacers adjacent to a gate structure. A high-k dielectric material is disposed over an upper surface of the low-k dielectric gate spacers to prevent unnecessary contact between the gate structure and a self-aligned contact structure. The high-k dielectric material may be disposed, if desired, over an upper surface of the gate structure to provide additional isolation of the gate structure from the self-aligned contact structure.

The present disclosure is directed to a semiconductor device and a manufacturing method thereof, which relate to the field of semiconductor technologies. The semiconductor device includes a fin ESD element. The method includes: providing a substrate structure, where the substrate structure includes a semiconductor substrate, and a semiconductor fin for the fin ESD element and an electrode structure surrounding a part of the semiconductor fin that are on the semiconductor substrate; forming a second dielectric layer on the substrate structure to cover the electrode structure; forming, in the second dielectric layer, a trench extending to a top of the electrode, where the trench is on the electrode and extends along a longitudinal direction of the electrode, and a transverse width of the trench is less than or equal to a transverse width of the top of the electrode; and filling the trench with a metal material, so as to form a metal heat sink that is on the top of the electrode and is coupled to the electrode. With the present disclosure, an existing structure of an ESD element is improved, so that a metal heat sink can effectively improve a head dissipation effect of a device, thereby improving a performance of the device.

A method for forming a semiconductor device includes providing a substrate structure, which has a semiconductor substrate and a semiconductor fin on the substrate. The method also includes forming a catalytic material layer overlying the semiconductor fins, and forming an isolation region covering the catalytic material layer in a lower portion of the semiconductor fins. Next, a graphene nanoribbon is formed on the catalytic material layer on an upper portion of the semiconductor fin, and a gate structure is formed on the graphene nanoribbon.

Semiconductor devices, FinFET devices and methods of forming the same are provided. In accordance with some embodiments, a semiconductor device includes a substrate, a first gate stack, a spacer, a first dielectric layer, a shielding layer and a connector. The first gate stack is over the substrate. The spacer is disposed on and contacted to at least one sidewall of the first gate stack. The first dielectric layer is aside the spacer. The shielding layer covers a top surface of the spacer and a top surface of the first dielectric layer. The connector contacts a portion of a top surface of the first gate stack.