An integrated circuit includes a first semiconductor wafer, a second semiconductor wafer, a first interconnect structure, an inductor, and a through substrate via. The first semiconductor wafer has a first device in a first side of the first semiconductor wafer. The second semiconductor wafer is over the first semiconductor wafer. The first interconnect structure is on a second side of the first semiconductor wafer opposite from the first side of the first semiconductor wafer. The inductor is below the first semiconductor wafer, and at least a portion of the inductor is within the first interconnect structure. The through substrate via extends through the first semiconductor wafer. The inductor is coupled to at least the first device by at least the through substrate via.

A system for interconnecting at least two die each die having a plurality of conducting layers and dielectric layers disposed upon a substrate which may include active and passive elements. In one embodiment there is at least one interconnect coupling at least one conducting layer on a side of one die to at least one conducting layer on a side of the other die. Another interconnect embodiment is a slug having conducting and dielectric layers disposed between two or more die to interconnect between the die. Other interconnect techniques include direct coupling such as rod, ball, dual balls, bar, cylinder, bump, slug, and carbon nanotube, as well as indirect coupling such as inductive coupling, capacitive coupling, and wireless communications. The die may have features to facilitate placement of the interconnects such as dogleg cuts, grooves, notches, enlarged contact pads, tapered side edges and stepped vias.

A device includes a first die and a second die. The first die includes: a first substrate that contains first electrical circuitry, a first interconnection structure disposed over the first substrate, a first dielectric layer disposed over the first interconnection structure, and a plurality of first bonding pads disposed over the first dielectric layer. The second die includes: a second substrate that contains second electrical circuitry, a second interconnection structure disposed over the second substrate, a second dielectric layer disposed over the second interconnection structure, and a plurality of second bonding pads disposed over the second dielectric layer. The first bonding pads of the first die are bonded to the second bonding pads of the second die. At least one of the first die or the second die includes a metal-insulator-metal (MIM) capacitor. The MIM capacitor includes more than two metal layers that are stacked over one another.

An integrated circuit includes a first and second semiconductor wafer, a bonding layer, a first and second interconnect structure, an inductor, and a through substrate via. The first semiconductor wafer has a first device in a first side of the first semiconductor wafer. The second semiconductor wafer is over the first semiconductor wafer. The bonding layer is between the first and the second semiconductor wafer. The first interconnect structure is on a second side of the first semiconductor wafer. The inductor is below the first semiconductor wafer. At least a portion of the inductor is within the first interconnect structure. The second interconnect structure is on the first side of the first semiconductor wafer. The through substrate via extends through the first semiconductor wafer. The inductor is coupled to at least the first device by the second interconnect structure and the through substrate via.

A wafer structure, a method for manufacturing the same and a chip structure are provided. A first capacitor plate is arranged in a first chip, a second capacitor plate is arranged in a second chip, and the first chip is stacked together via bonding layers with the second chip with a front surface of the first chip facing toward a front surface of the second chip. In this way, a capacitor structure formed by the first capacitor plate, the second capacitor plate and dielectric materials provided therebetween is formed while bonding the first chip and second chip together, and the capacitor plate and the dielectric materials may be formed while forming a device interconnection structure in the chip, such that no additional process is required, thereby improving device integration and process integration.

Three-dimensional and multilayered integrated circuits have emerged as desirable structures to increase computational power and density of modern computers, including those tasked with performing artificial intelligence workloads. Various functional compute systems can be vertically-integrated to provide higher bandwidth and locality of data. For example, a processor layer on top of a memory layer can perform memory reads and writes faster than two-dimensional systems. Additionally, the vertically-integrated systems can provide higher density computing resources per unit of volume, compared to two-dimensional systems. However, vertical integration impedes access to intermediate layers for thermal management. Disclosed are systems and methods which can provide thermal safety for three-dimensional and multilayered integrated circuits, including intermediate layers by using vertical cooling channels.

A system for interconnecting at least two die each die having a plurality of conducting layers and dielectric layers disposed upon a substrate which may include active and passive elements. In one embodiment there is at least one interconnect coupling at least one conducting layer on a side of one die to at least one conducting layer on a side of the other die. Another interconnect embodiment is a slug having conducting and dielectric layers disposed between two or more die to interconnect between the die. Other interconnect techniques include direct coupling such as rod, ball, dual balls, bar, cylinder, bump, slug, and carbon nanotube, as well as indirect coupling such as inductive coupling, capacitive coupling, and wireless communications. The die may have features to facilitate placement of the interconnects such as dogleg cuts, grooves, notches, enlarged contact pads, tapered side edges and stepped vias.

A system for interconnecting at least two die each die having a plurality of conducting layers and dielectric layers disposed upon a substrate which may include active and passive elements. In one embodiment there is at least one interconnect coupling at least one conducting layer on a side of one die to at least one conducting layer on a side of the other die. Another interconnect embodiment is a slug having conducting and dielectric layers disposed between two or more die to interconnect between the die. Other interconnect techniques include direct coupling such as rod, ball, dual balls, bar, cylinder, bump, slug, and carbon nanotube, as well as indirect coupling such as inductive coupling, capacitive coupling, and wireless communications. The die may have features to facilitate placement of the interconnects such as dogleg cuts, grooves, notches, enlarged contact pads, tapered side edges and stepped vias.

A semiconductor device includes a plurality of memory chips laminated to each other, each of the memory chips include a first transmission/reception coil for communication by means of inductive coupling; first lead-out lines led out from both ends of the first transmission/reception coil; and a first transmission/reception circuit, which is connected to the first lead-out lines, and which inputs/outputs signals to/from the first transmission/reception coil. The semiconductor device is also provided with an interposer, which is disposed on one end in the laminating direction of the memory chips, and which has, for each of the memory chips: a second transmission/reception coil coupled to the first transmission/reception coil by means of inductive coupling; second lead-out lines led out from both ends of the second transmission/reception coil; and a second transmission/reception circuit, which is connected to the second lead-out lines, and which inputs/outputs signals to/from the second transmission/reception coil.

Techniques are provided for an inductor at a second level interface between a first substrate and a second substrate. In an example, the inductor can include a winding and a core disposed inside the winding. The winding can include first conductive traces of a first substrate, second conductive traces of a second non-semiconductor substrate, and a plurality of connectors configured to connect the first substrate with the second substrate. Each connector of the plurality of connectors can be located between a trace of the first conductive traces and a corresponding trace of the second conductive traces.