Described is dynamic control of the temperature of the envelope of an HID lamp in order to stabilize the output color temperature of the lamp. As the lamp power is changed, or environmental factors alter the lamp envelope temperature, the system senses these changes and adjusts the lamp cooling systems so as to move the lamp envelope temperature back to the desired point.

A discharge lamp drive device includes a discharge lamp driver adapted to supply a drive current to a discharge lamp, a control section adapted to control the discharge lamp driver, and a storage section adapted to store a plurality of drive patterns of the drive current. Each of the drive patterns has a plurality of drive parameters. The plurality of drive patterns includes a first drive pattern and a second drive pattern different from each other in a value of at least one of the plurality of drive parameters. The control section is configured to execute the first drive pattern and the second drive pattern in accordance with at least one of accumulated lighting time of the discharge lamp and an individual of the discharge lamp in a case in which an inter-electrode voltage of the discharge lamp is at a predetermined voltage value.

In a discharge lamp driver, a control section is configured to alternately repeat a first period in which an AC current is supplied and a second period in which a DC current is supplied, and when a first drive power lower than a rated power of the discharge lamp is supplied and an accumulated lighting time of the discharge lamp is shorter than a predetermined time, the control section is configured to set the length of the first period to be greater than that in a case where the first drive power is supplied and the accumulated lighting time is equal to or longer than the predetermined time, and set the frequency of the AC current during the first period to be higher than that in the case where the first drive power is supplied and the accumulated lighting time is equal to or longer than the predetermined time.

A discharge lamp drive device includes a discharge lamp driver adapted to supply a drive current to a discharge lamp having a first electrode and a second electrode, a control section adapted to control the discharge lamp driver, and a storage section adapted to store a plurality of drive patterns of the drive current. The control section is configured to select one drive pattern of the plurality of drive patterns based on machine learning, and execute the selected drive pattern. In a case in which a predetermined condition is fulfilled, the control section executes a predetermined drive pattern of the plurality of drive patterns without selecting and executing the drive pattern based on the machine learning.

A discharge lamp drive device includes a discharge lamp driver adapted to supply a drive current to a discharge lamp, a control section adapted to control the discharge lamp driver, and a storage section adapted to store a plurality of drive patterns of the drive current. Each of the drive patterns has a plurality of drive parameters. The plurality of drive patterns includes a first drive pattern and a second drive pattern different from each other in a value of at least one of the plurality of drive parameters. The control section is configured to execute the first drive pattern and the second drive pattern in accordance with at least one of accumulated lighting time of the discharge lamp and an individual of the discharge lamp in a case in which an inter-electrode voltage of the discharge lamp is at a predetermined voltage value.

A discharge lamp drive device includes a discharge lamp driver adapted to supply a drive current to a discharge lamp having a first electrode and a second electrode, a control section adapted to control the discharge lamp driver, and a storage section adapted to store a plurality of drive patterns of the drive current. Each of the plurality of drive patterns has a plurality of drive parameters. The control section executes at least three of the drive patterns in a case in which drive power to be supplied to the discharge lamp is in a predetermined power band, and in a case in which an inter-electrode voltage of the discharge lamp is a predetermined voltage value. Any two of the at least three drive patterns are different from each other in a value of at least one of the plurality of drive parameters.

A discharge lamp drive device includes a discharge lamp driver adapted to supply a drive current to a discharge lamp having a first electrode and a second electrode, a control section adapted to control the discharge lamp driver, and a storage section adapted to store a plurality of drive patterns of the drive current. The control section is adapted to select one drive pattern of the plurality of drive patterns based on machine learning, and execute the selected drive pattern.

A projector according to the invention includes a discharge lamp, a cooling section, and a control section. The control section is configured to execute a first cooling control in which a number of revolutions of the cooling section does not depend on an inter-electrode voltage of the discharge lamp and a second cooling control for controlling the cooling section based on first control information indicating a relation between the inter-electrode voltage and the number of revolutions. The number of revolutions in the first cooling control is equal to or smaller than the number of revolutions in the second cooling control. When the inter-electrode voltage is larger than a first voltage value or when a cumulative lighting time of the discharge lamp is larger than a first time, the control section configured to switch the control of the cooling section from the first cooling control to the second cooling control.

Methods, systems, and computer programs are presented for reducing chamber instability while processing a semiconductor substrate. One method includes an operation for identifying a first recipe with steps having an operating frequency equal to the nominal frequency of a radiofrequency (RF) power supply. Each step is analyzed with the nominal frequency, and the analysis determines if any step produces instability at the nominal frequency. The operating frequency is adjusted, for one or more of the steps, when the instability in the one or more steps exceeds a threshold. The adjustment acts to find an approximate minimum level of instability. A second recipe is constructed after the adjustment, such that at least one of the steps includes a respective operating frequency different from the nominal frequency. The second recipe is used to etch the one or more layers disposed over the substrate in the semiconductor processing chamber.

A projection device for projecting at least one image onto a projection surface is provided. According to the present disclosure, a control device of the projection device is designed, on the basis of an evaluation of at least one measured value of a measuring device of the projection device determined during a drive of a discharge lamp of the projection device with a current waveform to be checked, to check the current waveform in respect of its suitability for minimizing an electrode burn-back of a first electrode and a second electrode, and in the case of a positive check result, to retain the checked current waveform, and in the case of a negative check result, depending on a checked commutation vector characterizing the checked current waveform, to create, by means of a specifiable algorithm, a modified commutation vector that characterizes a modified current waveform.