Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
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H01L21/02107
Forming insulating materials on a substrate
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H01L21/02109
characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
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H01L21/02205
the layer being characterised by the precursor material for deposition
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H01L21/02208
the precursor containing a compound comprising Si
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H01L21/02211
the compound being a silane, e.g. disilane, methylsilane or chlorosilane
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