IPIQ

ELECTRICITY

H01

ELECTRIC ELEMENTS

H01L

SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

21/00

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L21/02

Manufacture or treatment of semiconductor devices or of parts thereof

H01L21/02104

Forming layers

H01L21/02365

Forming inorganic semiconducting materials on a substrate

H01L21/02612

Formation types

H01L21/02617

Deposition types

H01L21/02636

Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials

H01L21/02653

Vapour-liquid-solid growth