Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
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H01L21/04
the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
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H01L21/34
the devices having semiconductor bodies not provided for in groups H01L21/18, H10D48/04 and H10D48/07, with or without impurities, e.g. doping materials
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H01L21/46
Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
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H01L21/461
to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
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H01L21/469
to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After-treatment of these layers
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