Patent classifications
H01L21/76894
PROCESSING METHOD OF WAFER
A processing method of a wafer includes a modified layer forming step of positioning the focal point of a laser beam with a wavelength having transmissibility with respect to the wafer to the inside of a planned dividing line and executing irradiation along the planned dividing line to form modified layers inside and a water-soluble resin coating step of coating the front surface of the wafer with a water-soluble resin before or after the modified layer forming step. The processing method also includes a dividing step of expanding a dicing tape to divide the wafer into individual device chips together with the water-soluble resin with which the front surface of the wafer is coated and a modified layer removal step of executing plasma etching and removing the modified layers that remain at the side surfaces of the device chips in a state in which the dicing tape is expanded and the front surfaces of the individual device chips are coated with the water-soluble resin.
METHOD FOR INCREASING THE ELECTRICAL FUNCTIONALITY, AND/OR SERVICE LIFE, OF POWER ELECTRONIC MODULES
In a method for increasing the electrical functionality, and/or service life, of power electronic modules, the power electronic circuit carrier, and/or the metallisation applied onto the power electronic circuit carrier, and/or a base plate connected, or to be connected, to a rear face of the power electronic circuit carrier, is finely structured by means of local material removal with at least one laser beam, so as to reduce thermomechanical stresses occurring during the production or operation of the module. In an alternative form of embodiment, the metallisation applied onto the front face of the power electronic circuit carrier is structured, or an already created structure is refined or supplemented, by means of local material removal with laser radiation, so as to achieve a prescribed electrical functionality of the metallisation.
Method of manufacturing semiconductor devices with a paddle and electrically conductive clip connected to a leadframe and corresponding semiconductor device
A semiconductor chip is mounted on a leadframe. A first portion of an insulating package for the semiconductor chip is formed from laser direct structuring (LDS) material molded onto the semiconductor chip. A conductive formation (provided by laser-drilling the LDS material and plating) extends between the outer surface of the first portion of insulating package and the semiconductor chip. An electrically conductive clip is applied onto the outer surface of the first portion of the insulating package, with the electrically conductive clip electrically coupled to the conductive formation and the leadframe. A second portion of the insulating package is made from package molding material (epoxy compound) molded onto the electrically conductive clip and applied onto the outer surface of the first portion of the insulating package.
SEMICONDUCTOR DEVICE STRUCTURE WITH BARRIER LAYER
A semiconductor device structure is provided. The semiconductor device structure includes a dielectric structure over the substrate. The semiconductor device structure includes a contact structure passing through the dielectric structure. The contact structure includes a contact layer, a first barrier layer, and a second barrier layer. The first barrier layer surrounds the contact layer, the second barrier layer surrounds a first upper portion of the first barrier layer, the contact layer passes through the first barrier layer and extends into the dielectric structure, and the first barrier layer passes through the second barrier layer and extends into the dielectric structure.
SUBSTRATE DIVIDING METHOD
A substrate dividing method which can thin and divide a substrate while preventing chipping and cracking from occurring. This substrate dividing method comprises the steps of irradiating a semiconductor substrate 1 having a front face 3 formed with functional devices 19 with laser light while positioning a light-converging point within the substrate, so as to form a modified region including a molten processed region due to multiphoton absorption within the semiconductor substrate 1, and causing the modified region including the molten processed region to form a starting point region for cutting; and grinding a rear face 21 of the semiconductor substrate 1 after the step of forming the starting point region for cutting such that the semiconductor substrate 1 attains a predetermined thickness.
DISPLAY PANEL AND MANUFACTURING METHOD
The present application relates to a display panel and a manufacturing method. The display panel includes: a substrate; the substrate includes a display area inside and a wiring area outside; the wiring area includes external connection wires; the external connection wires are coupled with metal wires; and conductive glass tracks are correspondingly arranged at side edges of the external connection wires and the metal wires.
ARRAY SUBSTRATE, DISPLAY PANEL AND DISPLAY DEVICE
An array substrate, a display panel, and a display device. The array substrate includes a substrate having a display region and a non-display region surrounding the display region. The display region includes a plurality of signal lines extending along a first direction. The non-display region includes at least three repair lead wires, and welding terminals connected to the repair lead wires in a one-to-one corresponding manner. The signal lines form overlapping regions together with an orthographic projection of at least one repair lead wire on the substrate.
Semiconductor device with backside inductor using through silicon vias
An approach to creating a semiconductor chip including a semiconductor substrate with one or more topside metal layers and one or more backside metal layers. The approach creates the semiconductor chip with one or more semiconductor devices with wiring interconnects in the one or more topside metal layers on the semiconductor substrate and one or more inductors in the one or more backside metal layer. Furthermore, the approach creates the semiconductor chip with one or more through silicon vias extending through the semiconductor substrate connecting the one or more inductors in the one or more backside metal layers and the one or more semiconductor devices with wiring interconnects in the one or more topside metal layers on the semiconductor substrate.
Method for manufacturing perovskite solar cell module and perovskite solar cell module
Disclosures of the present invention mainly describe a method for manufacturing perovskite solar cell module. At first, a laser scribing is adopted for forming multi transparent conductive films (TCFs) on a transparent substrate. Subsequently, by using a first mask, multi HTLs, active layers, and ETLs are sequentially formed on the TCFs. Consequently, by the use of a second make, each of the ETLs is formed with an electrically connecting layer thereon, such that a perovskite solar cell module comprising a plurality of solar cell units is hence completed on the transparent substrate. It is worth explaining that, during the whole manufacturing process, each of the solar cell units is prevented from receiving bad influences that are provided by laser scribing or manufacture environment, such that each of the solar cell units is able to exhibit outstanding photoelectric conversion efficiency.
Manufacturing method of chip package and chip package
A manufacturing method of a chip package includes patterning a wafer to form a scribe trench, in which a light-transmissive function layer below the wafer is in the scribe trench, the light-transmissive function layer is between the wafer and a carrier, and a first included angle is formed between an outer wall surface and a surface of the wafer facing the light-transmissive function layer; cutting the light-transmissive function layer and the carrier along the scribe trench to form a chip package that includes a chip, the light-transmissive function layer, and the carrier; and patterning the chip to form an opening, in which the light-transmissive function layer is in the opening, a second included angle is formed between an inner wall surface of the chip and a surface of the chip facing the light-transmissive function layer, and is different from the first included angle.