Disclosed herein are integrated circuit (IC) structures, packages, and devices that include thin-film transistors (TFTs) integrated on the same substrate/die/chip as III-N transistors. One example IC structure includes an III-N transistor in a first layer over a support structure (e.g., a substrate) and a TFT in a second layer over the support structure, where the first layer is between the support structure and the second layer. Another example IC structure includes a III-N semiconductor material and a TFT, where at least a portion of a channel material of the TFT is over at least a portion of the III-N semiconductor material.

A semiconductor device with different gate structures and a method of fabricating the same are disclosed. The a method includes forming a fin structure on a substrate, forming a thermal oxide layer on top and side surfaces of the fin structure, forming a polysilicon structure on the thermal oxide layer, doping portions of the fin structure uncovered by the polysilicon structure to form doped fin portions, forming a nitride layer on the polysilicon structure and the thermal oxide layer, forming an oxide layer on the nitride layer, doping the nitride layer with halogen ions, forming a source/drain region in the fin structure and adjacent to the polysilicon structure, and replacing the polysilicon structure with a gate structure.

Embodiments herein describe techniques for a thin-film transistor (TFT), which may include a substrate oriented in a horizontal direction and a transistor above the substrate. The transistor includes a gate electrode above the substrate, a gate dielectric layer around the gate electrode, and a channel layer around the gate dielectric layer, all oriented in a vertical direction substantially orthogonal to the horizontal direction. Furthermore, a source electrode or a drain electrode is above or below the channel layer, separated from the gate electrode, and in contact with a portion of the channel layer. Other embodiments may be described and/or claimed.

An array substrate, a manufacturing method thereof, and a display panel are provided. By disposing first electrodes and second electrodes on top and bottom sides of an active layer, respectively, and disposing a part of each gate electrode among sub-active patterns, the array substrate is formed with vertical-structured thin film transistors. Therefore, a channel resistance can be reduced, and a channel width of the thin film transistors can be reduced, thereby reducing an area of the thin film transistors, reducing impedance of the thin film transistors, and reducing power consumption of the display panel.

The object of the present invention is to make it possible to form an LTPS TFT and an oxide semiconductor TFT on the same substrate. A display device includes a substrate having a display region in which pixels are formed. The pixel includes a first TFT using an oxide semiconductor 109. An oxide film 110 as an insulating material is formed on the oxide semiconductor 109. A gate electrode 111 is formed on the oxide film 110. A first electrode 115 is connected to a drain of the first. TFT via a first through hole formed in the oxide film 110. A second electrode 116 is connected to a source of the first TFT via a second through hole formed in the oxide film 110.

Disclosed herein are transistor electrode-channel arrangements, and related methods and devices. For example, in some embodiments, a transistor electrode-channel arrangement may include a channel material, source/drain electrodes provided over the channel material, and a sealant at least partially enclosing one or more of the source/drain electrodes, wherein the sealant includes one or more metallic conductive materials.

A semiconductor device includes: a conductive line that extends in a first direction on a substrate; an insulating pattern layer on the substrate and having a trench that extends in a second direction, the trench having an extension portion that extends into the conductive line; a channel layer on opposite sidewalls of the trench and connected to a region, exposed by the trench, of the conductive line; first and second gate electrodes on the channel layer, and respectively along the opposite sidewalls of the trench; a gate insulating layer between the channel layer and the first and second gate electrodes; a buried insulating layer between the first and second gate electrodes within the trench; and a first contact and a second contact, respectively buried in the insulating pattern layer, and respectively connected to upper regions of the channel layer.

A semiconductor device includes a substrate having a recess therein that is partially filled with at least two semiconductor active regions. The recess has sidewalls and a bottom that are sufficiently lined with corresponding substrate insulating layers that the at least two semiconductor active regions are electrically isolated from the substrate, which surrounds the sidewalls and bottom of the recess. A sidewall insulating layer is provided, which extends as a partition between first and second ones of the at least two semiconductor active regions, such that the first and second ones of the at least two semiconductor active regions are electrically isolated from each other. First and second gate electrodes are provided in the first and second active regions, respectively.

Provided are an inverter circuit structure, a gate driving circuit and a display panel. The inverter circuit structure includes a PMOS transistor and an NMOS transistor, and further includes a first active layer, a gate layer, a second active layer, a first insulating layer between the gate layer and the first active layer, and a second insulating layer between the gate layer and the second active layer. An orthographic projection of the gate on the first active layer is a first region, and a portion of the first active layer in the first region has substantially a same thickness. An orthographic projection of the gate on the second active layer is a second region, and a portion of the second active layer in the second region has substantially a same thickness.

An object is to provide a display device that performs accurate display. A circuit is formed using a transistor that includes an oxide semiconductor and has a low off-state current. A precharge circuit or an inspection circuit is formed in addition to a pixel circuit. The off-state current is low because the oxide semiconductor is used. Thus, it is not likely that a signal or voltage is leaked in the precharge circuit or the inspection circuit to cause defective display. As a result, a display device that performs accurate display can be provided.