A high electron mobility transistor (HEMT) for high frequency applications comprises: a source and a drain spaced apart on a substrate, each of the source and drain extending vertically away from the substrate; a stack of nanowire or nanosheet heterostructures suspended between the source and the drain and being vertically separated from each other, each of the nanowire or nanosheet heterostructures comprising a channel layer between top and bottom barrier layers; a gate dielectric layer on each nanowire or nanosheet heterostructure; and a gate electrode on each gate dielectric layer. Each of the channel layers comprises a first group III nitride including aluminum, and each of the top and bottom barrier layers comprises a second group III nitride including a higher amount of aluminum than the first group III nitride. The stack includes N of the nanowire or nanosheet heterostructures, where N is an integer from 2 to 50.

An integrated circuit includes a first nanostructure transistor and a second nanostructure transistor on a substrate. The source/drain regions of the first nanostructure are electrically isolated from the semiconductor substrate by bottom dielectric regions. The source/drain regions of the second nanostructure transistor in direct contact with the semiconductor substrate.

Semiconductor devices and methods of fabricating the semiconductor devices are described herein. The method includes steps for patterning fins in a multilayer stack and forming an opening in a fin as an initial step in forming a source/drain region. The opening is formed into a parasitic channel region of the fin. Once the opening has been formed, a first semiconductor material is epitaxially grown at the bottom of the opening to a level over the top of the parasitic channel region. A second semiconductor material is epitaxially grown from the top of the first semiconductor material to fill and/or overfill the opening. The second semiconductor material is differently doped from the first semiconductor material. A stack of nanostructures is formed by removing sacrificial layers of the multilayer stack, the second semiconductor material being electrically coupled to the nanostructures.

A method of manufacturing a semiconductor device includes forming a multi-layer stack of alternating first layers of a first semiconductor material and second layers of a second semiconductor material on a semiconductor substrate, forming a first recess through the multi-layer stack, and laterally recessing sidewalls of the second layers of the multi-layer stack. The sidewalls are adjacent to the first recess. The method further includes forming inner spacers with respective seams adjacent to the recessed second layers of the multi-layer stack and performing an anneal treatment on the inner spacers to close the respective seams.

A semiconductor device includes: a substrate, a first support structure, a first nanowire heterojunction, a source, a drain, and a ring-shaped gate. The substrate includes a first region, and a second region and a third region located on respective sides of the first region; the first support structure is located at least on the second region and the third region; the first nanowire heterojunction includes a first gate section corresponding to the first region, a first source section corresponding to the second region, and a first drain section corresponding to the third region; the first source section and the first drain section are located on the first support structure. The source is located on the first source section, the drain is located on the first drain section, and the ring-shaped gate wraps the first gate section.

A vertical metal oxide semiconductor field effect transistor (MOSFET) and a method for forming a vertical MOSFET is presented. The MOSFET comprises: a top contact; a bottom contact; a nanowire (602) forming a charge transport channel between the top contact and the bottom contact; and a wrap-around gate (650) enclosing the nanowire (602) circumference, the wrap-around gate (650) having an extension spanning over a portion of the nanowire (602) in a longitudinal direction of the nanowire (602), wherein the wrap-around gate (650) comprises a gate portion (614) and a field plate portion (616) for controlling a charge transport in the charge transport channel, and wherein the field plate portion (616) is arranged at a first radial distance (636) from the center of the nanowire (602) and the gate portion (614) is arranged at a second radial distance (634) from the center of the nanowire (602); characterized in that the first radial distance (636) is larger than the second radial distance (634).

A method of manufacturing a semiconductor device includes forming a multi-layer stack of alternating first layers of a first semiconductor material and second layers of a second semiconductor material on a semiconductor substrate, forming a first recess through the multi-layer stack, and laterally recessing sidewalls of the second layers of the multi-layer stack. The sidewalls are adjacent to the first recess. The method further includes forming inner spacers with respective seams adjacent to the recessed second layers of the multi-layer stack and performing an anneal treatment on the inner spacers to close the respective seams.

A semiconductor device structure is provided. The semiconductor device structure includes a substrate. The semiconductor device structure includes a first nanostructure over the substrate. The semiconductor device structure includes a gate stack over the substrate and surrounding the first nanostructure. The gate stack is partially embedded in the first nanostructure. The semiconductor device structure includes a first source/drain layer surrounding the first nanostructure and adjacent to the gate stack. The semiconductor device structure includes a contact structure surrounding the first source/drain layer. A first portion of the contact structure is between the first source/drain layer and the substrate.

An integrated circuit (IC) device includes a functional circuit electrically coupled to a first power supply node and operable by a first power supply voltage on the first power supply node, and a power control circuit including a first transistor and a second transistor of different types. The first transistor includes a gate terminal configured to receive a control signal, a first terminal electrically coupled to the first power supply node, and a second terminal electrically coupled to a second power supply node. The second transistor includes a gate terminal configured to receive the control signal, and first and second terminals configured to receive a predetermined voltage. The first transistor is configured to, in response to the control signal, connect or disconnect the first and second power supply nodes to provide or cutoff power supply to the functional circuit.

An integrated circuit die includes a quad-gate device nanowire of channel material for a transistor (e.g., single material or stack to be a channel of a MOS device) formed by removing a portion of a sub-fin material from below the channel material, where the sub-fin material was grown in an aspect ration trapping (ART) trench. In some cases, in the formation of such nanowires, it is possible to remove the defective fin material or area under the channel. Such removal isolates the fin channel, removes the fin defects and leakage paths, and forms the nanowire of channel material having four exposed surfaces upon which gate material may be formed.