Patent classifications
H01L29/7395
Semiconductor device with a dopant source
A semiconductor device includes a semiconductor body having a first surface. A first trench extends in a vertical direction into the semiconductor body. The semiconductor device also includes a first interlayer in the first trench and a first dopant source in the first trench. The first interlayer is arranged between the first dopant source and the semiconductor body, and the first dopant source includes a first dopant species. The semiconductor device also includes a semiconductor area doped with the first dopant species and which completely surrounds the first trench at least at a depth in the semiconductor body and adjoins the first trench.
Semiconductor devices for improved measurements and related methods
Semiconductor devices, and in particular semiconductor devices for improved resistance measurements and related methods are disclosed. Contact structures for semiconductor devices are disclosed that provide access to resistance measurements with reduced influence of testing-related resistances, thereby improving testing accuracy, particularly for semiconductor devices with low on-resistance ratings. A semiconductor device may include an active region and an inactive region that is arranged along a perimeter of the active region. The semiconductor device may be arranged with a topside contact to provide access for resistance measurements, for example Kelvin-sensing resistance measurements. Related methods include performing resistance measurements from a topside of the semiconductor device, even when the active region of the semiconductor device forms a vertical contact structure.
Shielding Structure for Silicon Carbide Devices
A silicon carbide device includes: a planar gate structure on a first surface of a silicon carbide substrate, the planar gate structure having a gate length along a lateral first direction; a source region of a first conductivity type extending under the planar gate structure over at least part of the gate length; a body region of a second conductivity type, the body region including a channel zone that adjoins the source region under the planar gate structure; and a shielding region of the second conductivity type covering the channel zone over at least 20% but less than 100% of the gate length, wherein a maximum dopant concentration in the shielding region is higher than a maximum dopant concentration in the body region.
Semiconductor device and fabrication method of the semiconductor device
A semiconductor device includes: a semiconductor chip; and an Ag fired cap formed so as to cover a source pad electrode formed on the semiconductor chip. The semiconductor chip is disposed on a first substrate electrode, and one end of a Cu wire is bonded onto the Ag fired cap by means of an ultrasonic wave. There is provided a semiconductor device capable of improving a power cycle capability, and a fabrication method of such a semiconductor device.
SILICON CARBIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
A silicon carbide (carborundum) semiconductor device and a manufacturing method thereof. The manufacturing method of the silicon carbide semiconductor device comprises the following steps of: providing a semiconductor component structure on a silicon carbide substrate, the semiconductor component structure being formed on a front side of the silicon carbide substrate; and forming a multi-layer structure on a back side of the silicon carbide substrate, the multi-layer structure comprising a plurality of ohmic contact layers and a plurality of gettering material layers. By dispersing the gettering material into multiple layers, and by adjusting a thickness combination of the ohmic contact layer and the gettering material layer, even if the gettering material layer is relatively thin (thickness sufficient for balling), a content is still sufficient for gettering carbon and reducing carbon aggregation and accumulation.
Semiconductor Device and Method of Forming Sacrificial Heteroepitaxy Interface to Provide Substantially Defect-Free Silicon Carbide Substrate
A semiconductor device has a first substrate made of a first semiconductor material, such as silicon. A sacrificial layer is formed over a first surface of the first substrate. A seed layer is formed over the sacrificial layer. A compliant layer is formed over a second surface of the first substrate opposite the first surface of the first substrate. A first semiconductor layer made of a second semiconductor material, such as silicon carbide, dissimilar from the first semiconductor material is formed over the sacrificial layer. The first substrate and sacrificial layer are removed leaving the first semiconductor layer substantially defect-free. The first semiconductor layer containing the second semiconductor material is formed at a temperature greater than a melting point of the first semiconductor material. A second semiconductor layer is formed over the first semiconductor layer with an electrical component formed in the second semiconductor layer.
Semiconductor device and method for producing semiconductor device
A semiconductor device including: a semiconductor substrate having a first and a second side, and including a donor layer with a doping concentration profile in a depth direction from the first to the second side. The donor layer includes: a first peak, situated at a first distance from the first side of said substrate; a first region adjacent to the first peak and extending in the depth direction from the first peak toward the first side, a second peak in said doping concentration profile, situated at a second distance from the first side of said substrate. Said second distance is less than said first distance and greater than zero; and a second region adjacent to the second peak and extending in the depth direction from the second peak toward the first side of the substrate, which has a doping concentration which is substantially uniform.
SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
A semiconductor device is formed using a semiconductor substrate having a first main surface and a second main surface. A first semiconductor region of a first conductivity type is formed between the first main surface and the second main surface of the semiconductor substrate. A second semiconductor region is formed between the first semiconductor region and the first main surface. The first semiconductor region includes a hydrogen-related donor, and a concentration of the hydrogen-related donor of the first semiconductor region is equal to or larger than an impurity concentration of the first semiconductor region.
Power device with graded channel
A power device includes a silicon carbide substrate. A gate is provided on a first side of the silicon carbide substrate. A graded channel includes a first region having a first dopant concentration and a second region having a second dopant concentration, the second dopant concentration being greater than the first dopant concentration.
SEMICONDUCTOR MODULE
A semiconductor module includes a laminated substrate including an insulating board and a plurality of circuit boards that are arranged on an upper face of the insulating board, the plurality of circuit boards including first and second circuit boards, a semiconductor element disposed on the first circuit board and including, on an upper face of the semiconductor element, a main electrode, a gate pad, and a gate runner electrically connected to the gate pad, and a first wiring member electrically connecting the main electrode to the second circuit board. The gate runner extends so as to divide the main electrode into a plurality of electrodes including a first main electrode at a first side and a second main electrode at a second side, and the first wiring member is arranged to cross over the gate runner.