Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
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H01L21/02107
Forming insulating materials on a substrate
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H01L21/02109
characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
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H01L21/02112
characterised by the material of the layer
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H01L21/02123
the material containing silicon
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H01L21/02126
the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
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H01L21/02131
the material being halogen doped silicon oxides, e.g. FSG
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