IPIQ

ELECTRICITY

H01

ELECTRIC ELEMENTS

H01L

SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

21/00

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L21/02

Manufacture or treatment of semiconductor devices or of parts thereof

H01L21/02104

Forming layers

H01L21/02107

Forming insulating materials on a substrate

H01L21/02225

characterised by the process for the formation of the insulating layer

H01L21/0226

formation by a deposition process

H01L21/02263

deposition from the gas or vapour phase

H01L21/02271

deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition

H01L21/0228

deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD