IPIQ

ELECTRICITY

H01

ELECTRIC ELEMENTS

H01L

SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

21/00

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L21/02

Manufacture or treatment of semiconductor devices or of parts thereof

H01L21/02104

Forming layers

H01L21/02107

Forming insulating materials on a substrate

H01L21/02296

characterised by the treatment performed before or after the formation of the layer

H01L21/02318

post-treatment

H01L21/02321

introduction of substances into an already existing insulating layer

H01L21/02329

introduction of nitrogen

H01L21/02332

into an oxide layer, e.g. changing SiO to SiON