A semiconductor device having a super junction and a method of manufacturing the semiconductor device capable of obtaining a high breakdown voltage are provided, whereby charge balance of the super junction is further accurately controlled in the semiconductor device that is implemented by an N-type pillar and a P-type pillar. The semiconductor device includes a semiconductor substrate; and a blocking layer including a first conductive type pillar and a second conductive type pillar that extend in a vertical direction on the semiconductor substrate and that are alternately arrayed in a horizontal direction, wherein, in the blocking layer, a density profile of a first conductive type dopant may be uniform in the horizontal direction, and the density profile of the first conductive type dopant may vary in the vertical direction.

Disclosed is a superjunction semiconductor device and a method for manufacturing the same and, more particularly, to a superjunction semiconductor device and a method for manufacturing the same seeking to improve on-resistance characteristics of the device without degrading breakdown voltage characteristics by forming a second conductivity type impurity region on and/or in a surface of a substrate in a cell region C to increase a second conductivity type impurity concentration in the device.

A trench MOSFET and a manufacturing method of the same are provided. The trench MOSFET includes a substrate, an epitaxial layer having a first conductive type, a gate in a trench in the epitaxial layer, a gate oxide layer, a source region having the first conductive type, and a body region and an anti-punch through region having a second conductive type. The anti-punch through region is located at an interface between the source region and the body region, and a doping concentration thereof is higher than that of the body region. The epitaxial layer has a first pn junction near the source region and a second pn junction near the substrate. N regions are divided into N equal portions between the two pn junctions, and N is an integer greater than 1. The closer the N regions are to the first pn junction, the greater the doping concentration thereof is.

A semiconductor device includes a bipolar junction transistor having a collector, a base, and an emitter. The collector includes a current collection region, a constriction region laterally adjacent to the current collection region, and a contact region laterally adjacent to the constriction region, located opposite from the current collection region. The current collection region, the constriction region laterally, and the contact region all have the same conductivity type. The base includes a current transmission region contacting the current collection region and a constricting well laterally adjacent to, and contacting, the current transmission region and contacting the constriction region. The current transmission region and the constricting well have an opposite conductivity type than the current collection region, the constriction region laterally, and the contact region.

Implementations described herein provide a method that includes implanting a dopant and carbon in a portion of a substrate of a semiconductor device. The method also includes depositing a first silicon-based layer on the portion of the substrate, the first silicon-based layer reacting with the carbon to form a diffusion region on the portion of the substrate. The method further includes forming a recessed portion of the semiconductor device, the recessed portion extending through the first silicon-based layer and the diffusion region and partially extending into the portion of the substrate. The method additionally includes depositing a second silicon-based layer within the recessed portion. The method further includes etching one or more portions of the second silicon-based layer and the portion of the substrate to form a set of fin structures that include the second silicon-based layer and the portion of the substrate having the dopant and the carbon implanted.

A semiconductor device includes a semiconductor substrate, a base region, an emitter region, a collector region, and an element isolation insulating film. The semiconductor substrate has a main surface. The base region has a first conductivity type and is disposed in a surface layer of the semiconductor substrate that is close to the main surface. The emitter region has a second conductivity type and is disposed in a surface layer of the base region. The collector region has the second conductivity type and is disposed at a portion in the surface layer of the semiconductor substrate apart from the emitter region. The element isolation insulating film is disposed on the main surface, and has a thermal oxide film being in contact with a junction interface between the base region and the emitter region.

The present disclosure provides a method for forming a semiconductor device containing MOS transistors both with and without source/drain extension regions in a semiconductor substrate having a semiconductor material on either side of a gate structure including a gate electrode on a gate dielectric formed in a semiconductor material. In devices with source/drain extensions, a diffusion suppression species of one or more of indium, carbon and a halogen are used. The diffusion suppression implant can be selectively provided only to the semiconductor devices with drain extensions while devices without drain extensions remain diffusion suppression implant free.

A semiconductor device is provided. A semiconductor device includes: a first semiconductor layer having an N-type conductivity; and a second semiconductor layer that is formed on the first semiconductor layer, wherein an active region is defined in the first semiconductor layer and the second semiconductor layer, the active region includes a plurality of first P pillars and a plurality of first N pillars alternately arranged along a first direction, in the active region, an upper pillar region including an upper region of the plurality of first P pillars and an upper region of the plurality of first N pillars, a lower pillar region including a lower region of the plurality of first P pillars and a lower region of the plurality of first N pillars, and a middle pillar region formed between the upper pillar region and the lower pillar region are defined, the entire charge amount of the upper pillar region is greater than the entire charge amount of the lower pillar region, and a P-type charge amount is greater than an N-type charge amount in the upper pillar region, while the N-type charge amount is greater than the P-charge amount in the lower pillar region.

A method of forming a laterally varying dopant concentration profile of an electrically activated dopant in a power semiconductor device includes: providing a semiconductor body; implanting a dopant to form a doped region in the semiconductor body; providing, above the doped region, a mask layer having a first section and a second section, the first section having has a first thickness along a vertical direction and the second section having a second thickness along the vertical direction, the second thickness being different from the first thickness; and subjecting the doped region and both mask sections to a laser thermal annealing, LTA, processing step.

A multi-fin FINFET device may include a substrate and a plurality of semiconductor fins extending upwardly from the substrate and being spaced apart along the substrate. Each semiconductor fin may have opposing first and second ends and a medial portion therebetween, and outermost fins of the plurality of semiconductor fins may comprise an epitaxial growth barrier on outside surfaces thereof. The FINFET may further include at least one gate overlying the medial portions of the semiconductor fins, a plurality of raised epitaxial semiconductor source regions between the semiconductor fins adjacent the first ends thereof, and a plurality of raised epitaxial semiconductor drain regions between the semiconductor fins adjacent the second ends thereof.