A method of selectively removing NiPt material from a microelectronic substrate, the method comprising contacting the NiPt material with an aqueous etching composition comprising: an oxidising agent; a strong acid; and a source of chloride.

Processing methods may be performed to form a filled contact hole in a mirror layer of a semiconductor substrate. The method may include forming a contact hole through a mirror layer of the semiconductor substrate by an etch process. The method may include filling the contact hole with a fill material. A portion of the fill material may overlie the mirror layer. The method may also include removing a portion of the fill material external to the contact hole by chemical mechanical polishing landing on the mirror layer.

A device includes a phosphide-containing structure, a dopant source layer and a conductive contact. The phosphide-containing structure has a first chemical element in a compound with phosphorus. The dopant source layer is over the phosphide-containing structure and has a second chemical element the same as the first chemical element. The conductive contact is over the dopant source layer.

Semiconductor devices and methods of forming the same are provided. In one embodiments, a semiconductor device includes an n-type transistor region and a p-type transistor region. The n-type transistor region includes a first gate stack, a first gate spacer over sidewalls of the first gate stack, an n-type epitaxial feature in a source/drain (S/D) region of the n-type transistor region, and a first metal silicide layer over the n-type epitaxial feature. The p-type transistor region includes a second gate stack, a second gate spacer over sidewalls of the second gate stack, a p-type epitaxial feature in an S/D region of the p-type transistor region, a dopant-containing implant layer over the p-type epitaxial feature, and a second metal silicide layer over the dopant-containing implant layer. The dopant-containing implant layer includes a metallic dopant.

An etching composition contains phosphoric acid, phosphoric anhydride, a compound represented by the following Formula 1, and a silane compound comprising at least one silicon (Si) atom, excluding the compound represented by Formula 1:

##STR00001## wherein, in Formula 1, A is an n-valent radical, where n is an integer of 1 to 6, L is a direct bond or hydrocarbylene, Y is selected from NR.sup.1, O, PR.sup.2 and S, where R.sup.1 to R.sup.2 are independently hydrogen, halogen, a substituted unsubstituted hydrocarbyl group, or non-hydrocarbyl group, X and Z are independently selected from N, O, P and S, and R.sup.a to R.sup.c are independently an unshared electron pair, hydrogen, or a substituted or unsubstituted hydrocarbyl group.

A manufacturing method of TFT substrate and a TFT substrate are provided. The method provides a dual-gate structure symmetrically disposed on both sides of active layer, which prevents TFT threshold voltage from changing and improve TFT conduction state switching; by first manufacturing the active layer before the gate insulating layer to make the insulating layer directly grow on active layer, the contact interface between the gate insulating layer and active layer is improved, leading to further improving TFT conduction state switching. The TFT substrate makes the gate located between the source and the pixel electrode in vertical direction, and the dual-gate is symmetrically disposed on both sides of active layer to prevent TFT threshold voltage from changing and improve TFT conduction state switching, as well as improve the contact interface between the gate insulating layer and active layer, leading to further improving TFT conduction state switching.

A thin film transistor is disclosed. The thin-film transistor includes an active layer (3); a source electrode (1); and a drain electrode (2). The active layer includes an active pattern region (4), the active pattern region including a main body portion (5) and a plurality of protrusion portions (6) on both sides of the main body portion. The protrusion portions are connected to the main body portion.

The invention provides a manufacturing method of the TFT array substrate. Compared to existing 4M process, the invention changes the structural design of the semi-transmissive mask for the photoresist layer for patterning the source/drain metal layer and the semiconductor layer. The edge forms a reduced thickness edge portion, so that the edge of the photoresist layer is thinned, and thereby the width of the photoresist layer is easily reduced in subsequent processes, and the semiconductor layer at the edge of the metal wire structure is easily etched during dry etching, reducing the tailing problem of the active layer at edges of source/drain to achieve finer metal wire structure, and improve optical stability, electrical performance, aperture ratio, reliability, power consumption, and the overall performance of the TFT array substrate. The residual problem of amorphous and heavily doped silicon on source/drain edge in original process is solved or reduced.

An active matrix substrate includes a TFT. The TFT includes a gate electrode, a semiconductor layer overlapping the gate electrode with a gate insulating film interposed therebetween, and a source electrode and a drain electrode disposed on the semiconductor layer. The source electrode, the drain electrode, and the semiconductor layer are covered with a first insulating film. The gate insulating film includes a first stepped portion in a portion covering a peripheral portion of the gate electrode. The first insulating film includes a first opening at a position overlapping a portion of the first stepped portion that is not covered with the source electrode and the drain electrode in a plan view.

The invention provides a manufacturing method of the TFT array substrate. Compared to existing 4M process, the invention changes the structural design of the semi-transmissive mask for the photoresist layer for patterning the source/drain metal layer and the semiconductor layer. The edge forms a reduced thickness edge portion, so that the edge of the photoresist layer is thinned, and thereby the width of the photoresist layer is easily reduced in subsequent processes, and the semiconductor layer at the edge of the metal wire structure is easily etched during dry etching, reducing the tailing problem of the active layer at edges of source/drain to achieve finer metal wire structure, and improve optical stability, electrical performance, aperture ratio, reliability, power consumption, and the overall performance of the TFT array substrate. The residual problem of amorphous and heavily doped silicon on source/drain edge in original process is solved or reduced.