A random number generator device has at least at least a memory unit, a voltage generator, and a control circuit. Each memory unit has two memory cells, one of the two memory cells is coupled to a bias line and a first bit line, and another of the two memory cells is coupled to the bias line and a second bit line. The voltage generator provides the two memory cells a bias voltage, a first bit line voltage and a second bit line voltage via the bias line, the first bit line and the second bit line respectively. The control circuit shorts the first bit line and the second bit line to program the two memory cells simultaneously during a programming period and generates a random number bit according the statuses of the two memory cells during a reading period.

A semiconductor device of the present invention has a first insulating film formed between a control gate electrode and a semiconductor substrate and a second insulating film formed between a memory gate electrode and the semiconductor substrate and between the control gate electrode and the memory gate electrode, the second insulating film having a charge accumulating part therein. The second insulating film has a first film, a second film serving as a charge accumulating part disposed on the first film, and a third film disposed on the second film. The third film has a sidewall film positioned between the control gate electrode and the memory gate electrode and a deposited film positioned between the memory gate electrode and the semiconductor substrate. In this structure, the distance at a corner part of the second insulating film can be increased, and electric-field concentration can be reduced.

To enhance the performance of a semiconductor device. In a method for manufacturing a semiconductor device, a metal film is formed over a semiconductor substrate having an insulating film formed on a surface thereof, and then the metal film is removed in a memory cell region, whereas, in a part of a peripheral circuit region, the metal film is left. Next, a silicon film is formed over the semiconductor substrate, then the silicon film is patterned in the memory cell region, and, in the peripheral circuit region, the silicon film is left so that an outer peripheral portion of the remaining metal film is covered with the silicon film. Subsequently, in the peripheral circuit region, the silicon film, the metal film, and the insulating film are patterned for forming an insulating film portion formed of the insulating film, a metal film portion formed of the metal film, and a conductive film portion formed of the silicon film.

A semiconductor substrate (1) includes a region (AR3) between a region (AR1) and a region (AR2), a control gate electrode (CG) is formed on an upper surface (TS1) of the region (AR1), and a memory gate electrode (MG) is formed on an upper surface (TS2) of the region (AR2). The upper surface (TS2) is lower than the upper surface (TS1), and the region (AR3) has a connection surface (TS3) connecting the upper surface (TS1) and the upper surface (TS2). An end (EP1) of the connection surface (TS3) which is on the upper surface (TS2) side is arranged closer to the memory gate electrode (MG) than an end (EP2) of the connection surface (TS3) which is on the upper surface (TS1) side, and is arranged lower than the end (EP2).

A semiconductor device and a fabrication method thereof are provided. The semiconductor device includes a semiconductor structure, a dielectric layer, a metal-semiconductor compound film and a cover layer. The semiconductor structure has an upper surface and a lateral surface. The dielectric layer encloses the lateral surface of the semiconductor structure and exposes the upper surface of the semiconductor structure. The metal-semiconductor compound film is on the semiconductor structure, wherein the dielectric layer exposes a portion of a surface of the metal-semiconductor compound film. The cover layer encloses the portion of the surface of the metal-semiconductor compound film exposed by the dielectric layer, and exposes the dielectric layer.

A semiconductor manufacturing method includes forming a first film on an upper surface of a substrate. The semiconductor manufacturing method includes forming concave portions extending from an upper surface of the first film to below the upper surface of the substrate. The method includes forming a second film from bottom surfaces of the concave portions to a first position in the concave portions between the upper surface of the first film and the upper surface of the substrate. The method includes forming a third film in the concave portions to cover side walls of the concave portions and an upper surface of the second film. The method includes grinding the third film to expose the second film. The method includes removing the second film. The method includes forming a fourth film from the bottom surfaces of the concave portions to at least a lower surface of the third film.

The present invention makes it possible to improve the reliability of a semiconductor device. In a manufacturing method of a semiconductor device according to an embodiment, when a resist pattern is formed over a cap insulating film comprising a silicon nitride film, the resist pattern is formed through the processes of coating, exposure, and development treatment of a chemical amplification type resist. Then the chemical amplification type resist is applied so as to directly touch the surface of the cap insulating film comprising the silicon nitride film and organic acid pretreatment is applied to the surface of the cap insulating film comprising the silicon nitride film before the coating of the chemical amplification type resist.

An object is to provide a reliability-improved semiconductor device having a MONOS memory that rewrites data by injecting carriers into a charge storage portion. When a memory gate electrode having a small gate length is formed in order to overlap a carrier injection position in write operation with that in erase operation, each into an ONO film including a charge storage portion, the ONO film is formed in a recess of a main surface of a semiconductor substrate for securing a large channel length. In a step of manufacturing this structure, control gate electrodes are formed by stepwise processing of a polysilicon film by first and second etching and then, the recess is formed in the main surface of the semiconductor substrate on one side of the control gate electrode by second etching.

The present disclosure relates to a self-aligned split gate memory cell, and an associated method. The self-aligned split gate memory cell has a memory gate with a flat top surface. A memory gate spacer is arranged directly above the memory gate having a lateral dimension smaller than that of the memory gate. The memory gate spacer has an inner sidewall disposed along an upper portion of a charge trapping layer and an outer sidewall recessed back laterally relative to an outer sidewall of the memory gate. In some embodiments, a dielectric liner is continuously lined the outer sidewall of the memory gate, extending on a portion of the top surface of the memory gate not covered by the memory gate spacer, and extending upwardly along the outer sidewall of the memory gate spacer.

Three-dimensional (3D) semiconductor memory devices are provided. A 3D semiconductor memory device includes an electrode structure on a substrate. The electrode structure includes gate electrodes stacked on the substrate. The gate electrodes include electrode pad regions. The 3D semiconductor memory device includes a dummy vertical structure penetrating one of the electrode pad regions. The dummy vertical structure includes a dummy vertical semiconductor pattern and a contact pattern extending from a portion of the dummy vertical semiconductor pattern toward the substrate.