A separator device for removing particles from suspension in a fluid includes a housing having first and second apertures for ingress and egress of fluid into and out of the housing. A first separator chamber is disposed at one end of the housing. A second separator chamber is disposed at the other end of the housing. A central chamber is disposed between the first and second separator chambers. The first and second separator chambers are apertured for ingress and egress of fluid from the central chamber, and each contains obstruction means to slow the flow of fluid within the chamber.

A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel, the vessel comprising: an interior volume defined by a top, one or more sidewalls, and a base; and at least one fluid outlet for vaporized precursor, and at least one particle barrier that defines at least one particle restricted space within the interior volume, wherein said particle barrier comprises at least one 3-dimensional filter. A method for using the apparatus is also disclosed.

A control valve according to an embodiment includes a body having a valve hole and a guiding passage formed coaxially with the valve hole, an actuating rod, slidably supported along the guiding passage, which is provided with a valve element, a solenoid for applying the solenoidal force in an opening or closing direction of a valve section to the valve element via the actuating rod, and a seal section, provided between the actuating rod and the guiding passage, which houses a sealing member for restricting the leakage of refrigerant from a high pressure side to a low pressure side. The actuating rod and the guiding passage are configured such that the clearance, between the actuating rod and the guiding passage, which is at a higher-pressure side of the seal section is larger than the clearance which is at a lower-pressure side of the seal section.

A fuel supply for an EUV radiation source is disclosed. The fuel supply comprises a reservoir (40) for retaining a volume of fuel (42), a nozzle (32), in fluid connection with the reservoir, and configured to direct a stream of fuel along a trajectory towards a plasma formation location, and a fuel contamination control arrangement (44) which separates contamination particles from the fuel. The contamination control arrangement comprises at least one acoustic filter. The acoustic filter may apply an acoustic standing wave to the fuel. Also disclosed is a method of controlling contamination in such a fuel supply.

Provided is a fluid control valve assembly including: a main valve body having a first flow passage that is mounted on an inlet of a high-pressure vessel and through which a charging source gas passes, a second flow passage through which a feeding source gas passes, and a third flow passage to which the first flow passage and the second flow passage are connected; a manual valve that is mounted on the main valve body and that opens and closes the third flow passage; a solenoid valve that is mounted on the main valve body and that opens and closes the second flow passage by an electrical signal; a first check valve that is provided on the first flow passage to thus block a reverse flow of the charging source gas; and a second check valve that is provided on the second flow passage to thus block a reverse flow of the feeding source gas, and block the charging source gas from flowing in the second flow passage, to thereby prevent the charging source gas from flowing in the solenoid valve. Accordingly, a charging gas pressure of a high-pressure is prevented from being applied to a solenoid valve, to thereby prevent damage to the solenoid valve and to prevent a malfunction of the solenoid valve.

A flow path insert for a fluid control assembly includes an upstream portion and a downstream portion integral with the upstream portion. The upstream portion includes an upstream peripheral surface and the downstream portion includes a downstream peripheral surface. The upstream portion and the downstream portion cooperate to define an inlet passage and an outlet passage in fluid communication with the inlet passage. The inlet passage defines a first axis and the outlet passage defines a second axis that is transverse to the first axis. When the flow path insert is positioned within a body of a fluid control assembly, the upstream peripheral surface is in contacting engagement with the body and the downstream peripheral surface is spaced from the body. At least the downstream portion of the flow path insert and the body cooperate to define an annular passage in fluid communication with the outlet passage. Fluid control assemblies are also disclosed.

The invention relates to a device for controlling the flow and/or pressure of a pressurized gas, and specifically to a tap for a pressurized-gas cylinder. The tap includes a body having a gas inlet, a gas outlet, and a passage connecting the inlet to the outlet. The tap also includes a valve for closing the passage, as well as a pressure indicator downstream from the closing valve. The pressure indicator is translatably operated and includes just two stable positions, i.e. one that corresponds to the presence of pressure, and the other to the absence of pressure.

An electromagnetic valve for a hydraulic system for an automatic transmission of a vehicle. An armature chamber is filled with hydraulic medium and fluidically connected to hydraulic lines of the hydraulic system. An armature is mounted in the armature chamber such that its stroke is adjustable. The armature includes a shut-off body and divides the armature chamber into an opening-side chamber facing the flow opening and into an inner chamber facing away from the flow opening. During a stroke of the armature, an oil exchange occurs, and a displacement volume of the hydraulic medium overflows from the opening-side chamber into the inner chamber. A hydraulic line leading to the opening-side chamber or to the inner chamber of the armature chamber includes a dirt collecting element that is designed as a permanent magnet and that retains contaminations in the hydraulic medium that flows through the hydraulic line during an oil exchange.

A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel, the vessel comprising: an interior volume defined by a top, one or more sidewalls, and a base; and at least one fluid outlet for vaporized precursor, and at least one particle barrier that defines at least one particle restricted space within the interior volume, wherein said particle barrier comprises at least one 3-dimensional filter. A method for using the apparatus is also disclosed.

A valve (61) for enabling release of pressurized steam from a pressure vessel has a displaceable closure member (67) which is maintained in its closed disposition by exposure to the pressure of the steam within the pressure vessel. The closure member (67) is displaced between its closed disposition and an open disposition by a double-acting actuator (69), suitably an air-driven piston/cylinder device, the closure member (67) being preferably mounted at one axial end of a spindle (68) extending between the closure member (67) and the actuator (69). The closure member (67) is suitably mounted for substantially metal-to-metal contact with a valve seat portion (63), without interposition of any sealing element, preferably for substantially vertical displacement between its closed and dispositions.