A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

A bottom bracket made with a box at its center and a flange on opposing sides. Over each flange, on the side of the box, are two equal, opposing through-holes. Each flange is drilled with holes to allow the bracket to be bolted to a roof rack rail. A top bracket made in a box shape with an open bottom to fit over the box-shaped bottom bracket and with the top of the top bracket fabricated to accept two bolts that will screw into an adapter fitted into a rail slot on the underside of a roof-top tent. The top bracket also has two opposing through-holes matching the through-holes on the sides of the bottom bracket. The top and bottom brackets held together by a locking quick-release pin inserted through the through-hole on the sides of the top and bottom brackets.

A bottom bracket made with a box at its center and a flange on opposing sides. Over each flange, on the side of the box, are two equal, opposing through-holes. Each flange is drilled with holes to allow the bracket to be bolted to a roof rack rail. A top bracket made in a box shape with an open bottom to fit over the box-shaped bottom bracket and with the top of the top bracket fabricated to accept two bolts that will screw into an adapter fitted into a rail slot on the underside of a roof-top tent. The top bracket also has two opposing through-holes matching the through-holes on the sides of the bottom bracket. The top and bottom brackets held together by a locking quick-release pin inserted through the through-hole on the sides of the top and bottom brackets.

An electrostatic chuck includes a ceramic top plate layer made of a beryllium oxide material, a ceramic bottom plate layer made of a beryllium oxide material, a ceramic middle plate layer disposed between the ceramic top plate layer and the ceramic bottom plate layer, an electrode layer disposed between the ceramic top plate layer and the ceramic middle plate layer, and a heater layer disposed between the ceramic middle plate layer and the ceramic bottom plate layer. The electrode layer joins and hermetically seals the ceramic top plate layer to the ceramic middle plate layer, and the heater layer joins and hermetically seals the ceramic middle plate layer to the ceramic bottom plate layer.