Methods of depositing a silicon oxide film are disclosed. One embodiment is a plasma enhanced atomic layer deposition (PEALD) process that includes supplying a vapor phase silicon precursor, such as a diaminosilane compound, to a substrate, and supplying oxygen plasma to the substrate. Another embodiment is a pulsed hybrid method between atomic layer deposition (ALD) and chemical vapor deposition (CVD). In the other embodiment, a vapor phase silicon precursor, such as a diaminosilane compound, is supplied to a substrate while ozone gas is continuously or discontinuously supplied to the substrate.

The present invention provides a functional sheet including a functional layer provided between protective layers. The functional layer is a polarizing film layer, a photochromic layer, or a combination of the polarizing film layer and the photochromic layer. At least one of the protective layers includes a layer formed of a resin (C) containing a polyester resin (A) obtained as a result of polycondensation of 1,4-cyclohexanedimethanol and 1,4-cyclohexanedicarboxylic acid and an aromatic polycarbonate resin (B), the polyester resin (A) being contained at a content of 10 to 100 parts by mass and the aromatic polycarbonate resin (B) being contained at a content of 0 to 90 parts by mass with respect to 100 parts by mass as a total of the polyester resin (A) and the aromatic polycarbonate resin (B). A lens is provided with such a functional sheet.

One embodiment of the disclosure provides a method of fabricating a chamber component with a coating layer disposed on an interface layer with desired film properties. In one embodiment, a method of fabricating a coating material includes providing a base structure comprising an aluminum or silicon containing material, forming an interface layer on the base structure, wherein the interface layer comprises one or more elements from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and forming a coating layer on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z. In another embodiment, a chamber component includes an interface layer disposed on a base structure, wherein the interface layer is selected from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and a coating layer disposed on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z.

A composite material for passive radiative cooling is provided. In some embodiments, the composite material includes a base layer, and at least one emissive layer located adjacent to a surface of the base layer. In some embodiments, the at least one emissive layer is affixed to the surface of the base layer via a binding agent. In some embodiments, the surface of the base layer comprises a reflective substrate comprising an adhesive layer. In some embodiments, the at least one emissive layer is affixed to the base layer via the adhesive layer of the base layer.

Light-emitting quantum dot films, quantum dot lighting devices, and quantum dot-based backlight units are provided. Related compositions, components, and methods are also described. Improved quantum dot encapsulation and matrix materials are provided. Quantum dot films with protective barriers are described. High-efficiency, high brightness, and high-color purity quantum dot-based lighting devices are also included, as well as methods for improving efficiency and optical characteristics in quantum dot-based lighting devices.

In one embodiment, a drug delivery system and method provide a member including a combination of a drug substance and a polymer or other material, and an encapsulating layer formed in an outer surface of the member by gas cluster ion beam irradiation of the outer surface of the member, which encapsulating layer is adapted to determine one or more characteristics of the drug delivery system.

The present invention relates to a multilayer barrier film capable of encapsulating a moisture and/or oxygen sensitive electronic or optoelectronic device, the barrier film including at least one nanostructured layer including reactive nanoparticles capable of interacting with moisture and/or oxygen, the reactive nanoparticles being distributed within a polymeric binder, and at least one ultraviolet light neutralizing layer comprising a material capable of absorbing ultraviolet light, thereby limiting the transmission of ultraviolet light through the barrier film.

Protective coatings, including moisture-resistant coatings, that include two or more different types of moisture-resistant materials are disclosed, as are moisture-sensitive substrates that include such protective coatings. Moisture-sensitive substrates that include different types of moisture-resistant coatings on different elements are also disclosed.

Provided are a filling film and a method of manufacturing an organic light-emitting display apparatus by using the filling film. The filling film includes a filling material, a first releasing film attached to a surface of the filling film, a second releasing film attached to another surface of the filling film, and a supporting layer attached to the second releasing film. The bonding force between the second releasing film and the supporting layer is greater than the bonding force between the filling material and the second releasing film.

Methods, systems and compositions for recovery of regenerant ions from spent regenerant solution by utilization of electrodialysis are provided. For example, in certain aspects methods for separating spent regenerant using an electrodialysis system comprising selective membranes are described. Furthermore, the invention provides methods for treating a friable solid ion-removal material to prevent fragmentation during regeneration.