A robot wrist structure includes a first wrist element, a second wrist element, and a third wrist element which are respectively rotatable about a first axis to a third axis; drive motors for the second and third wrist elements; and gear sets that reduce speeds of rotation of the drive motors. The gear sets respectively include a driven-side large-diameter gear that rotates the second wrist element and a driven-side small-diameter gear that rotates the third wrist element, where the driven-side large-diameter gear and the driven-side small-diameter gear are coaxially arranged so as to be rotatable about the second axis. The small-diameter gear is fixed to a drive-side bevel gear that meshes with a driven-side bevel gear fixed to the third wrist element. The second wrist element includes a first housing that is fixed to the large-diameter gear; and a second housing rotatably supports the third wrist element.

Embodiments provided herein generally relate to robotic limbs and uses thereof. In some embodiments, the motor for driving movement of the limb can itself be repositioned, thereby altering the forces and/or torque involved in moving and/or operating the limb.

Motor modules for multi-arm robot apparatus are described. The motor modules can be used individually or stacked and assembled to make up one-axis, 2-axis, 3-axis, 4-axis, 5-axis, 6-axis motor assemblies, or more. One or more of the motor modules have a stator assembly including a stator received in the stator housing, and a rotor assembly abutting the stator assembly, the rotor assembly including a rotor housing, a drive shaft, a bearing assembly supporting the drive shaft, and a rotor coupled to the drive shaft. A vacuum barrier member is positioned between the rotor and the stator. Multi-axis motor drive assemblies, multi-axis robot apparatus, electronic device manufacturing systems, and methods of assembling drive assemblies are described, as are numerous other aspects.

A first driving signal is supplied to a first electrode of a vibrating body. A second driving signal is supplied to a second electrode of the vibrating body. A common driving signal is supplied to a common electrode of the vibrating body. A phase of the first driving signal is set changeable with respect to a phase of the common driving signal. A phase of the second driving signal is set changeable with respect to the phase of the common driving signal. Then, it is possible to switch a driving direction of a piezoelectric motor according to which phase of the first driving signal or the second driving signal is varied from the phase of the common driving signal. If the phase is simply changed, a switch is unnecessary. It is possible to reduce a driving circuit in size.

A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

The present invention is to provide an industrial robot, which is placed in vacuum for use, capable of efficiently cooling down hand- or arm-driving motors which are arranged inside the arm in air. The industrial robot is provided with a motor for rotating a second arm unit with respect to a first arm unit, a motor for rotating a hand with respect to the second arm unit, a reduction gear for reducing the rotation of the motor and transmitting it to the second arm unit, and a reduction gear for reducing the rotation of the motor and transmitting it to the hand; the hand and the arm are placed in vacuum. The reduction gears and are coaxially arranged so that the center of rotation of the second arm unit with respect to the first arm unit coincides with the axial centers of the reduction gears. The interior space of the hollow first arm unit is kept at atmospheric pressure in which the motors and the reduction gears are arranged.

A piezoelectric driving device includes: a piezoelectric vibrating body which includes a plurality of piezoelectric elements each formed of a first electrode, a second electrode, and a piezoelectric body positioned between the first electrode and the second electrode, and is disposed at least one surface of the first surface and the second surface of the vibrating plate, wherein the plurality of piezoelectric elements are connected in series.

A robot arm includes a first holder and a second holder. The first holder includes a first base portion and a first distal portion. The first distal portion has a first distal thickness smaller than a thickness of the first base portion. The second holder includes a second base and a second distal portion. The second distal portion has a second distal thickness smaller than a thickness of the second base portion. A first rotator is supported by the first distal portion and the second distal portion. A second rotator is supported by the first rotator. A first bevel gear is provided in the first distal portion. Another first bevel gear is provided in the second distal portion. A second bevel gear engages with the first bevel gear and the another first bevel gear.

A force transmission system as part of a surgical system which may be configured to be a minimally invasive and/or computer assisted surgical system. Operation of the system may be controlled by transmission of a force from a first section to a second section of the system. The first section and the second section may be separated by a partition or a barrier. The first section may be a non-sterile section and the second section may be a sterile section of the surgical system.

A robot arm and method for using the robot arm. Embodiments may be directed to an apparatus comprising: a robot arm; an end effector coupled at a distal end of the robot arm and configured to hold a surgical tool; a plurality of motors operable to move the robot arm; and an activation assembly operable to send a move signal allowing an operator to move the robot arm.