A workpiece replacing apparatus delivers a pre-machined workpiece into an intra-machine space inside a machine tool from an extra-machine space outside the machine tool, and delivers a workpiece machined by the machine tool to the extra-machine space from the intra-machine space. The workpiece replacing apparatus includes a secured cover, an arm device, and a movable cover. The secured cover is secured to a securing member of the machine tool. The secured cover defines a partition between the intra-machine space and the extra-machine space. The secured cover is provided with an opening. The arm device delivers the workpieces between the intra-machine space and the extra-machine space through the opening. The movable cover is integral with the arm device or in engagement with the arm device such that the movable cover is operable in conjunction with operation of the arm device. The movable cover closes the opening, with the arm device located in the extra-machine space.

The system includes a cell framework for defining a manufacturing area. The system includes at least one workplace within the manufacturing area. The system includes at least one manufacturing component within the manufacturing area and configured to be movable along three axes in relation to the at least one workplace. The system includes a conveying mechanism configured to move a part into the at least one workplace to be worked on by the at least one manufacturing component.

Provided is an automated pallet changer in machine tool which enable miniaturization and cost reduction. A drive unit in the automatic pallet changer includes a planetary reduction gear. The planetary reduction gear has a first output shaft and a second output shaft in which, by fixing one of the first and second output shaft, the other functions as an output shaft for driving. The first output shaft is used to pivot the pivoting frame, and the second output shaft is used to move the carry-in/out arm back and forth.

A machine tool includes a base, a table, a main spindle, and a trunnion unit. The table is installed on the base. A tool is mounted to the main spindle. The main spindle is caused to approach a workpiece on the table along an up-down direction. The trunnion unit is configured to rotatably hold the table on which the workpiece is placed using a rotation axis along a front-rear direction as a center. The trunnion unit is disposed movable in a right-left direction.

A wafer producing apparatus includes: an ingot grinding unit configured to grind and planarize an upper surface of an ingot held by a first holding table; a laser applying unit configured to apply a laser beam of such a wavelength as to be transmitted through the ingot to the ingot, with a focal point of the laser beam positioned at a depth corresponding to the thickness of a wafer to be produced from an upper surface of the ingot held by a second holding table, to form a peel-off layer; a wafer peeling unit configured to hold the upper surface of the ingot held by a third holding table and peel off the wafer from the peel-off layer; and a carrying tray having an ingot support section configured to support the ingot and a wafer support section configured to support the wafer.

An automatic pallet changer 2 includes: a pallet housing unit 11 having a plurality of pallet placement portions; and a pallet transfer unit 12 configured to transfer a pallet P that is at a required pallet placement portion and has an un-machined workpiece W attached thereto to a standby station S2 and configured to transfer a pallet P that is at the standby station S2 and has a machined workpiece W attached thereto to a required pallet placement portion. The pallet housing unit 11 includes: main housing portions 13a to 13f that have a plurality of rows of pallet placement portions, each having a plurality of stages, and are disposed to face the machine tool body 1; and three rows of secondary housing portions 14 that have one stage of pallet placement portions and are disposed above the machine tool body 1.

A pallet changing apparatus adopting a table 4 capable of moving back from and forth for a side of a turning shaft 1 and having a oscillating portion 41 for placing workpieces W, W by means of pallets P, P so as to oscillate freely by an upright portion 42 at the leading end of the table 4, wherein the turning shaft 1 covers a turning supporting portion 11 at its lower end side and turns together with a pallet changing arm 3 and moves freely in a vertical direction, and an insertion and removal hollow space 20 is provided, at the covering region, and allows the upright portion 42 to be inserted into the insertion and removal hollow space 20 and removed from the insertion and removal hollow space 20.

A wafer producing apparatus includes an ingot grinding unit that grinds the upper surface of an ingot to planarize the upper surface, a laser irradiation unit that positions the focal point of a laser beam with such a wavelength as to be transmitted through the ingot to a depth corresponding to the thickness of a wafer to be produced from the upper surface of the ingot and irradiates the ingot with the laser beam to form a separation layer, a wafer separating unit that separates the wafer from the ingot, and a tray having a support part that supports the separated wafer.

This machine tool is provided with: a bridge which is provided on a base in such a way as to straddle a moving body in a direction (X) perpendicular to a direction of movement (Z) of the moving body at a stroke end (E2) of the moving body; a pallet exchanging arm which is provided above the bridge and which engages with a pallet (P) supported on the moving body and a pallet (P) on a pallet loading station, lifts both pallets (P), and pivots about a vertical axis (Ov) to exchange the two pallets (P); and an arm drive device which is provided projecting upward on the bridge, and which moves the pallet exchanging arm along the vertical axis (Ov) and causes the pallet exchanging arm to pivot about the vertical axis (Ov).

An automatic pallet changer 2 includes: a pallet housing unit 11 having a plurality of pallet placement portions; and a pallet transfer unit 12 configured to transfer a pallet P that is at a required pallet placement portion and has an un-machined workpiece W attached thereto to a standby station S2 and configured to transfer a pallet P that is at the standby station S2 and has a machined workpiece W attached thereto to a required pallet placement portion. The pallet housing unit 11 includes: main housing portions 13a to 13f that have a plurality of rows of pallet placement portions, each having a plurality of stages, and are disposed to face the machine tool body 1; and three rows of secondary housing portions 14 that have one stage of pallet placement portions and are disposed above the machine tool body 1.