First and second concentration measurement parts (415, 425) are provided in first and second supply liquid lines (412, 422) in which first and second supply liquids flow, respectively. A dissolved concentration of gas in the second supply liquid is lower than that in the first supply liquid. In the first and second supply liquid lines, respective one ends of first and second branch lines (51, 52) are connected to respective positions on the upstream side of the concentration measurement parts. The other ends of the first and second branch lines are connected to a mixing part (57), and by mixing the first and second supply liquids, a processing liquid is generated. Respective flow rate adjustment parts (58) of the first and second branch lines are controlled on the basis of respective measured values of the first and second concentration measurement parts so that the dissolved concentration of the gas in the processing liquid can become a set value. It is thereby possible to prevent the supply liquid containing particles or the like caused by the concentration measurement part from being contained into the processing liquid to be supplied to a substrate and also to adjust the dissolved concentration of the gas in the processing liquid to the set value with high accuracy.

A method and apparatus for compressing gases and supplying fuel to a gaseous fuel consuming device, such as a gaseous fueled vehicle or the like. One embodiment includes a gas compressor for compressing the gaseous fuel to an array of tanks having predetermined initial set points which are increasing for tanks in the array. One embodiment provides a selecting valve having first and second families of ports wherein the valve can be operated to select a plurality of ports from the first family to be fluidly connected with a plurality of ports with the second family, and such fluid connections can be changed by operation of the valve.

The method and system for attenuating or damping the amplitude of vacuum pressure oscillations in a vacuum system uses a flow-modulated damper to disperse and damp high-amplitude vacuum oscillations of a vacuum generator to a degree where fine vacuum control may be achieved for delicate work such as eye surgery.

First and second concentration measurements are provided in lines for first and second supply liquid lines. A dissolved concentration of gas in the second supply liquid is lower than that in the first supply liquid. In the first and second lines, first ends of branch lines are connected upstream of the concentration measurements. The second ends of the branch lines are connected to a mixing part. By mixing the first and second supply liquids, a processing liquid is generated. Respective flow rates in the branch lines are based on the first and second concentration measurements to set the dissolved concentration of the gas in the processing liquid. Thus, particles or the like can be removed from the processing liquid to be supplied to a substrate, and the dissolved concentration of the gas in the processing liquid can be set with high accuracy.

A damping device, in particular for damping or preventing pressure impacts, like pulsations, in hydraulic supply circuits has a damping housing (1) surrounding a damping chamber with a fluid inlet (13) and a fluid outlet (15). A damping tube (21; 51) is located in the flow path between the damping inlet and outlet and has a branch opening (29; 73, 75, 77, 79, 81) passing through the tube wall and leading to a Helmholtz volume (27; 53, 55, 57, 59, 61) inside of the damping housing (1) forming a Helmholtz resonator in a region positioned inside of the length of the damping tube. A fluid filter (35) is arranged inside of the damping housing (1) in the flow path between the fluid inlet (13) and fluid outlet (15).

A method and apparatus for compressing gases and supplying fuel to a gaseous fuel consuming device, such as a gaseous fueled vehicle or the like. One embodiment includes a gas compressor for compressing the gaseous fuel to an array of tanks having predetermined initial set points which are increasing for tanks in the array. One embodiment provides a selecting valve having first and second families of ports wherein the valve can be operated to select a plurality of ports from the first family to be fluidly connected with a plurality of ports with the second family, and such fluid connections can be changed by operation of the valve.

The invention relates to an automatic cylinder changeover device (1), comprising two gas inlets for mounting gas cylinder banks, namely the left gas inlet and the right gas inlet, a gas outlet through which gas may be discharged and a valve suitable for connecting said left gas inlet or said right gas inlet with the gas outlet and configured for automatically reversible switching between these two connections, characterized in that the device (1) comprises an indicator, suitable for being manually set in one of two distinct positions, one of said positions indicating the left gas inlet and the other of said positions indicating the right gas inlet and comprises means for detecting the position of the indicator, including at least one sensor (5), preferably a pair of sensors (5). The invention also covers a method for monitoring a gas installation equipped with such automatic cylinder changeover device.

A pump assembly includes a pump unit having a centrifugal pump and a variable pump supplying pressurized flow. A fuel control assembly receives flow from the pump unit and includes at least one metering valve and at least one throttling valve. A control for the variable pump receives first and second pressure signals indicative of a pressure differential across the throttling valve, or across the metering valve/throttling valve combination, for altering operation of the variable pump in response to the pressure differential.

A rupture disk (20), along with associated methods, is disclosed. More particularly, a miniaturized rupture disk is disclosed, comprising a transition area (23) configured to determine a pressure at which the rupture able portion will rupture. A method for forming a rupture disk is also disclosed, wherein a radius (R) of a transition area is configured to set the burst pressure of the rupture disk. A rupture disk having an indent at its apex (24) and a circular line of weakness configured to improve opening performance is also disclosed. Additionally, a method of relieving pressure in a pressurized system is disclosed, wherein a set of rupture disks is provided, wherein each rupture disk in the set has a different radius of transition area. A rupture disk may be selected from the set and installed based on a burst pressure set by the radius of transition area.

A high integrity protection system includes a flow line including an inlet configured to be connected to a first source of pressure and an outlet configured to be connected to a downstream system. A first subsystem is installed on the flow line between the inlet and the outlet. A second subsystem is installed on the flow line between the inlet and the outlet, and the second subsystem is in a parallel flow configuration in relation to the first subsystem. The system includes a second source of pressure configured to be fluidically connected to the first subsystem and the second subsystem.