Hydraulic systems and associated methods configured to reduce leakage past a spool valve when the system is in a neutral state. Leakage reduction is achieved by shifting the spool valve within the spool bore. The shifting direction can depend on whether the system has a relatively high load or a relatively low load in the neutral state. The amount of shifting can depend on the pressure differential between the supply line and the work port, and/or the pressure differential between the work port and the tank line.

Hydraulic systems and associated methods configured to reduce leakage past a spool valve when the system is in a neutral state. Leakage reduction is achieved by shifting the spool valve within the spool bore. The amount of shifting can be controlled by a pressure controller that sets one or pressures in the system and actively/dynamically adjusts the system to achieve a desired pressure or set of pressures by shifting the spool valve.

A drain-back check valve assembly includes a body having a passageway with an inlet and an outlet. A bypass port extends from the passageway to an outer surface of the valve body. A main poppet valve assembly is disposed in the passageway and moveable between a closed position which prevents fluid flow from the outlet to the inlet and an open position which allows fluid flow from the inlet to the outlet. The main poppet valve assembly includes a poppet and a spool guide fixed to the poppet. The guide has a sidewall which includes a drain-back port. When the main poppet valve assembly is in the closed position, the drain-back port is aligned with the bypass port. When the main poppet valve assembly is in the opened position, the drain-back port is not aligned with the bypass port.

A valve with a shuttle for use in a flow management system is capable of bypassing a backflow.

In one embodiment, a gas supply line is connected to a chamber of a substrate processing apparatus. A vaporizer is connected to the gas supply line. A flow rate controller is connected to the gas supply line in parallel with the vaporizer through a secondary valve. A primary valve is provided on a primary side of the flow rate controller. A method of the embodiment includes supplying a processing gas to the chamber from the vaporizer through the gas supply line in a state in which the primary valve is closed, the secondary valve is opened, and an exhaust device is operated to set a pressure of the chamber to a predetermined pressure and determining a time-average value of a measurement value obtained by a pressure sensor of the flow rate controller while the supplying the processing gas is performed.

In one embodiment, a vaporizer is connected to a chamber of a substrate processing apparatus through a gas supply line and a gas introduction port. An exhaust device is connected to the gas supply line. The substrate processing apparatus includes a pressure sensor that obtains a measurement value of a pressure of the gas supply line. A method according to the embodiment includes supplying a processing gas to the chamber from the vaporizer through the gas supply line, and monitoring a change of the measurement value obtained by the pressure sensor in a state in which supply of the processing gas to the gas supply line is stopped.

An exhaust stem for use with a valve assembly is provided. The exhaust stem is a hollow body which comprises an inner surface, a distal end, and an outer surface. The inner surface forms a portion of a fluid conduit through the exhaust stem. The distal end is shaped to sealingly engage a valve of the valve assembly. The outer surface defines a plurality of turbulence reducing protuberances. The plurality of turbulence reducing protuberances distributes a fluid within a valve housing of the valve assembly to facilitate operation of the valve assembly. The valve assembly decreases an amount of fluid turbulence in a tire inflation system, provides greater flexibility in configuring the tire inflation system, and facilitates accurate control of a pressure within individual tires of a vehicle.

A flow passage unit of a switching valve includes an energy-saving valve mechanism provided in a second flow passage of a flow passage body. The energy-saving valve mechanism has a movable body including a piston section and a valve member, and an elastic member that biases the movable body elastically. At a time that compressed air is supplied to the second flow passage, when a force that acts on the piston section based on the pressure of a first flow passage becomes smaller than a biasing force of the elastic member, due to the biasing force of the elastic member, the movable body is moved to a valve-closed position for blocking the second flow passage.

A method of decreasing tire pressure includes opening a wheel valve (22) to allow pressurized air from a tire (10) to be directed to a first valve assembly (14) and to atmosphere. A target pressure is selected for a fluid control conduit (28). The fluid conduit (28) is in fluid communication with the first valve assembly (14) and a second or control valve assembly (30). The pressure in the fluid conduit (28) is measured. If the measured pressure is greater than the target pressure, then the second valve assembly (30) is de-energized. If the measured pressure is less than the target pressure, then the second valve assembly (30) is energized. A valve (42) prone to leak under very low temperatures may be subjected to repeated cycles of pressure application and pressure release in order to form a fluid-tight seal.

A valve block includes a plurality of control valve disks that form a first block part and a second block part. A supply pressure for the control valve disks of the first block part is limited by a common pressure-limiting valve. The common pressure-limiting valve is arranged such that a prevailing load pressure registered by the control valve disks does not exceed a specific value. The supply pressure for the control valve disks of the second block part is not limited.