A substrate block for a fluid delivery system is provided, the substrate block having an upper surface. The upper surface has an inlet substrate port and an outlet substrate port formed into the upper surface. A substrate fluid passageway extends from the inlet substrate port and the outlet substrate port. The substrate fluid passageway extends in a smooth arc which is free of corners or angular walls.

A circulation pump assembly for a heating and/or cooling system includes an electric drive motor (108) and a connected pump housing (106) in which at least one impeller (118) is situated and which comprises a first inlet (112) and a first outlet (114). The pump housing (106) includes a second inlet (122) which is connected in an inside of the pump housing (106) at a mixing point (130) to the first inlet (112). A regulating valve (134), which is designed for regulating the mixing ratio of two flows mixing at the mixing point (130), as well as a control device, which controls the regulating valve (134) for regulating the mixing ration, are arranged in the pump housing (106). A hydraulic manifold is provided with such a circulation pump assembly.

An adjustable differential pressure control valve has a first housing part with one or more fluid entry openings and one or more fluid exit openings. The valve is provided with a movable throttle member configured for regulating the through flow area of the exit openings in response to a difference in pressure across the throttle member, and a spring arrangement configured for providing a spring force acting on the throttle member in a direction that increases the through flow area of the exit openings. The spring arrangement comprises at least a first and a second spring, and the spring arrangement is adjustable to operate in a low pressure mode with the spring force acting on the throttle member being provided by the first spring only, and to operate in a high pressure mode with the spring force acting on the throttle member being provided by at least both the first and second springs.

A valve plug adapted for sealing engagement with a seat ring. The valve plug includes a cylindrical body with an annular flange having a groove. A pair of bores is disposed in the body, each bore having a first diameter, a first end, and a second end disposed within the body. Each bore is also adapted to receive a fastener to couple the valve plug to a mounting portion, and a recess is disposed at the second end of the bore, forming a stepped portion. The recess is adapted to receive at least one of a portion of a retainer or a portion of the fastener. A sealing disk is disposed within the groove of the annular flange and is one of a machined sealing disk or a molded sealing disk.

A circulation pump assembly for a heating and/or cooling system includes an electric drive motor (108) and a connected pump housing (106) in which at least one impeller (118) is situated and which comprises a first inlet (112) and a first outlet (114). The pump housing (106) includes a second inlet (122) which is connected in an inside of the pump housing (106) at a mixing point (130) to the first inlet (112). A regulating valve (134), which is designed for regulating the mixing ratio of two flows mixing at the mixing point (130), as well as a control device, which controls the regulating valve (134) for regulating the mixing ration, are arranged in the pump housing (106). A hydraulic manifold is provided with such a circulation pump assembly.

A method of manufacturing a substrate block for a fluid delivery system is disclosed. First, a mold is provided, the mold having a cavity. The cavity of the mold is filled with a fluoropolymer to form a substrate block having an upper surface. A curved insert is withdrawn from the cavity to form a substrate fluid passageway extending from an inlet substrate port to an outlet substrate port. The substrate fluid passageway extends between the inlet substrate port and the outlet substrate port in a smooth arc free of corners or angular walls.

A method of processing semiconductors using a fluid delivery system is disclosed in which seal inserts are utilized to fluidly connect an active component that bridges two substrate blocks.

A valve body (4) for a valve assembly (2) is proposed. The valve body (4) comprises a valve seat (96) which can be accessed by means of an opening (86). A plurality of threaded holes is provided around the opening (86). A plurality of first studs (22a-c) is arranged, in portions, in the threaded holes in order to arrange a valve drive. At least one second stud (24) comprises an electronic data carrier (26) for contactless identification of the valve seat (96). A portion of the second stud (24) is arranged in one of the threaded holes.

A valve plug adapted for sealing engagement with a seat ring. The valve plug includes a cylindrical body with an annular flange having a groove. A pair of bores is disposed in the body, each bore having a first diameter, a first end, and a second end disposed within the body. Each bore is also adapted to receive a fastener to couple the valve plug to a mounting portion, and a recess is disposed at the second end of the bore, forming a stepped portion. The recess is adapted to receive at least one of a portion of a retainer or a portion of the fastener. A sealing disk is disposed within the groove of the annular flange and is one of a machined sealing disk or a molded sealing disk.

A Control Valve Compensation System for producing both a pre-compensated and a post-compensated load sensing hydraulic directional control valve module, wherein both configurations use the same components except for a sliding compensating component. The Control Valve Compensation System generally includes a hydraulic directional control valve housing which is adapted to be easily-interchangeable between a load sensing pre-compensated pressure configuration and a load sensing post-compensated pressure configuration by simply removing and replacing a different compensator assembly within the housing. The compensator assembly is adapted to direct oil flow through the housing while simultaneously providing compensation for the valve function. Directional valve assemblies may be provided, with the valve assemblies functioning to provide post-compensated functions, pre-compensated functions, and mixed pre- and post-compensated functions. These directional valve functions can be re-configured in the field by simply swapping the compensator assemblies to produce the desired functionality of the end-user at that particular time.