A variable flow orifice for a hydraulic control system in a transmission includes a shape memory alloy that selectively increases and decreases the size of an orifice. The deformation of the shape memory alloy, and therefore the size of the orifice, is a function of the temperature of the transmission. During cold conditions the orifice size is increased and during normal operating conditions the size of the orifice is decreased.

The present invention is intended to set the temperature of a predetermined location inside a processing space in which a polishing pad is disposed to within a predetermined temperature range. A substrate processing apparatus includes a CMP apparatus and an exhaust flow rate control apparatus configured to exhaust a polishing space in which the CMP apparatus is disposed. The exhaust flow rate control apparatus is provided with a first exhaust line, a first exhaust flow rate-variable device and an exhaust control unit. The exhaust control unit includes a storage device storing control data on previously-calculated exhaust flow rates necessary to set the temperature of a predetermined location of the CMP apparatus.

A multifunctional restrictive valve for controlling the flow of water therethrough. The valve has a main body with a flow channel through the main body. The main body receives water upstream thereof through an inlet port and passes it out through an outlet port at the downstream end of the body. A flow control assembly is located in the flow channel and includes a temperature sensor/actuator acting on a piston to move, when the temperature sensor heats up the piston, to block water flow control ports. The flow control assembly also includes an override feature wherein the piston is located within a slide and the flow control ports are located in the slide. By moving the slide away from the piston when the piston is blocking the flow control ports, the temperature sensor and piston may be overridden and flow may resume through the main body.

An improved seal assembly for use with a combustion liner assembly is employed with a gas turbine engine so as to control fluid flow. The seal assembly has a bi-metal sealing member that is affixed to a first surface that is proximal to a second perpendicular surface that is not in contact with the first surface, thus providing a potential fluid flow path. Upon heating, the bi-metal sealing member uncoils contacting the second perpendicular surface, thus blocking the flowpath between the two surfaces. Various metals may be provided to provide predetermined sealing characteristics.

A valve directs fluid flow received from a device to one of a heater and a cooler. The valve includes a spool movably disposed in the housing between a first, second, and third position. An actuator is in fluid communication with the fluid. The actuator includes a smart material that deactivates when the fluid temperature is no greater than a first temperature, partially activated when the fluid temperature is greater than the first temperature, and fully activated when the fluid temperature is at least equal to a second temperature. The spool moves to the first position when deactivated and fluid flows from the cavity, to the heater. The spool moves to the second position when partially activated to prevent fluid from flowing to each of the heater and the cooler. The spool moves to the third position when fully activated and fluid flows from the cavity, to the cooler.

A method and apparatus for self-calibrating control of gas flow. The gas flow rate is initially set by controlling, to a high degree of precision, the amount of opening of a flow restriction, where the design of the apparatus containing the flow restriction lends itself to achieving high precision. The gas flow rate is then measured by a pressure rate-of-drop upstream of the flow restriction, and the amount of flow restriction opening is adjusted, if need be, to obtain exactly the desired flow.

A pressure type flow rate control device provides flow rate control for gas at 100-500 C. with an error not more than 1.0% F.S. The pressure type flow rate control device includes a valve body with a fluid passage, a valve portion interposed in the passage, a valve drive unit driving the valve portion to open/close the passage, a restriction mechanism on the downstream side of the valve portion in the passage, a temperature detector detecting gas temperature between the valve portion and restriction mechanism, a pressure detector detecting gas pressure between the valve portion and restriction mechanism, and an arithmetic control device controlling flow rate of gas in the restriction mechanism based on values detected by the temperature detector and the pressure detector, wherein the temperature detector is inserted in an attachment hole of the valve body at a position just above an outlet side fluid passage.

A heat exchanger apparatus containing a heat exchanger and a thermally actuated bypass valve is described. The heat exchanger has a plurality of plates defining a first, a second and a bypass channels. A first fluid inlet manifold is in fluid communication with the first and the bypass channels. The bypass valve is positioned in the first fluid inlet manifold, and contains a sleeve having a first slot and a second slot, that permit fluid flow from a first fluid inlet to the bypass channel and to the first fluid inlet manifold, respectively. A drum is positioned within the sleeve and is movable from a first position to a second position. The drum has an aperture permitting first fluid flow to the first slot in the first position and to the second slot in the second position. An actuator engages the drum and actuates it to move from the first position to the second position.

An apparatus and method are disclosed for controlling fluid flow in a motor vehicle transmission. At least one friction engagement device is fluidly coupled to a first pump, and a lubrication and cooling sub-system is normally fluidly coupled to a second pump. Illustratively, when a flow rate of the fluid in the first fluid passageway is less than a threshold fluid flow rate, a temperature of the fluid is greater than a temperature threshold and a fluid flow demand is greater than a fluid flow demand threshold, fluid flow from the second pump to the lubrication and cooling sub-system is blocked and fluid supplied by the second pump is instead directed to the at least one friction engagement device such that fluid is supplied by both the first and second pumps only to the at least one friction engagement device.

The subject matter of this specification can be embodied in, among other things, a check valve that includes a valve body having a bore and a seat along the bore, a fluid inlet at a first end of the bore, and a fluid outlet a second end of the bore, a stopper selectively movable along the bore to contact the seat, the bore being occluded when the stopper is in contact with the seat, a first bias member on a first side of the stopper within the bore, the first bias member providing a first bias force upon the stopper in a first direction, and a second bias member on a second side of the stopper within the bore, the second side being opposite the first side, the second bias member providing a second bias force upon the stopper in a second direction opposite the first direction.