A mechanism for coupling motion of a piezoelectric actuator in axisymmetric devices like modulating proportional valves uses actuator extension motion to cause translation away from a mechanism mounting plane and thereby enables lifting open of a valve element instead of the usual pushing closed of the valve element. The mechanism does not contain any gears nor leadscrew threads, and in usual practice is constantly loaded, so apparent change of direction is achieved without mechanical backlash introducing hysteresis. The mechanism surrounds a piezoelectric stack actuator by contacting opposite ends of the piezoelectric stack, whereby extension motion lengthening the actuator causes a lifting portion of the mechanism to translate toward the bulk of the actuator while the proximally adjacent mounting portion of the mechanism remains at a fixed. location.

The invention relates to a residual pressure valve device comprising a shut-off member (1) that is able to move in the body (9) relative to a seat (2), a return member (5) that urges the shut-off member (1) by default towards the seat (2), the shut-off member (1) comprising an internal duct (6) having a first end in communication with the gas inlet (3) and a second end that leads, via a calibrated orifice (8), into a control chamber (7) that is closed by the shut-off member (1) such that, when the gas pressure in the control chamber (7) reaches a predetermined threshold, this pressure causes the shut-off member (1) to move away from the seat (2), the body of the shut-off member (1) comprising a first portion (11) that forms a male element which is able to move in translation in a female passage of the body (9) with a predetermined fit forming a restriction ensuring partial and progressive opening of the passage for the gas between the inlet (3) and the outlet (4).

A pilot-operated proportional cartridge valve that has low internal leakage and long life, without requiring close ID/OD spool clearances that add cost to comparable prior art valves. The flow control valve is uniquely characterized by the use of two axially spaced-apart spring energized wiper seals that floatingly support a flow control piston within a cylindrical chamber to allow transaxial shifting movement of the piston for proper alignment with mating components, such as a valve seat. The spring energized wiper seals are preferably oriented in opposite directions for sealing against pressure differentials at opposite ends of the valve piston. In a preferred embodiment, the seals are spring energized cup seals.

A mechanism for coupling motion of a piezoelectric actuator in axisymmetric devices like modulating proportional valves uses actuator extension motion to cause translation away from a mechanism mounting plane and thereby enables lifting open of a valve element instead of the usual pushing closed of the valve element. The mechanism does not contain any gears nor leadscrew threads, and in usual practice is constantly loaded, so apparent change of direction is achieved without mechanical backlash introducing hysteresis. The mechanism surrounds a piezoelectric stack actuator by contacting opposite ends of the piezoelectric stack, whereby extension motion lengthening the actuator causes a lifting portion of the mechanism to translate toward the bulk of the actuator while the proximally adjacent mounting portion of the mechanism remains at a fixed location.

The fluid delivery system includes a pressurizing device for delivering a pressurized injection fluid, a low pressure fluid delivery system, and a pressure isolation mechanism adapted for fluid communication with the pressurizing device and low pressure fluid delivery system. The pressure isolation mechanism includes a housing defining an inlet port, an isolation port, and an internal cavity. The housing defines a seal seat in the internal cavity between the inlet port and isolation port. A valve member is disposed in the internal cavity. The valve member is free floating in the internal cavity and is adapted to engage the seal seat. The valve member has an open position permitting fluid communication between the inlet port and isolation port, and is fluid flow responsive to fluid flow in the inlet port to engage the seal seat and attain a closed position preventing fluid flow between the inlet port and isolation port.

A raw material gas supply method for use in a film forming apparatus which forms a film on a substrate, includes supplying a carrier gas to a gas phase zone defined inside a raw material container accommodating a liquid or solid raw material, vaporizing the raw material, supplying a raw material gas containing the vaporized raw material from the raw material container to the film forming apparatus via a raw material gas supply path, measuring a flow rate of the vaporized raw material flowing through the raw material gas supply path, comparing the flow rate of the vaporized raw material obtained by the flow rate measurement unit with a predetermined target value, and controlling an internal pressure of the raw material container to be increased when the flow rate is higher than the predetermined target value, and to be decreased when the is lower than the predetermined target value.

A liquid distribution system having at least one liquid conduit extending from a liquid source to a liquid tap and a method for substantially retaining the temperature of a liquid in the liquid distribution system. When a tapping operation is finished, the liquid is evacuated from the liquid conduit, and a gas is brought into the liquid conduit in order to replace the liquid therein and cause the liquid to flow backwards to the liquid source. When liquid is to be tapped from the liquid tap, the gas is evacuated from the liquid conduit.

A pilot valve that includes a pilot valve body including a chamber, a first fluid inlet and a second fluid inlet for providing fluid to the chamber, and a fluid outlet for receiving fluid from the chamber. The pilot valve further includes a separating element and a valve rod, the valve rod is arranged to control fluid flow from the first or second fluid inlet to the fluid outlet via the chamber. The separating element is connected to, and movable with the valve rod, and has a first fluid contacting area configured to be in fluid communication with the first fluid inlet, and a second fluid contacting area configured to be in fluid communication with the second fluid inlet and arranged on an opposite side to the first fluid contacting area. The pilot valve is at least partly controlled by a difference between a first force and a second forces acting on the first and second fluid contacting areas of the separating element.

A pilot valve arrangement including a first and second pilot valve parts. The second pilot valve part including a second pilot valve body including a compartment, a low pressure fluid inlet for receiving fluid from the first pilot valve part, and a high pressure fluid inlet, and a fluid outlet for receiving fluid from the low pressure and high pressure inlets via said compartment and providing fluid to a piloted valve. In a first state, the second pilot valve of the pilot valve arrangement provides for a first fluid flow path within the compartment to enable the low pressure fluid inlet to be in fluid communication with the fluid outlet via the first fluid flow path. In a second state, a second fluid flow path within the compartment to enable the high pressure fluid inlet to be in fluid communication with the fluid outlet via the second fluid flow path.

In a hydraulic drive of a tool, a piston is adapted to be acted upon by a pump via a pressure limiting seat valve and a parallel switching seat valve of a valve arrangement. A restriction is provided in a pressure line upstream of the pressure limiting seat valve which is connected to a tank on the flow-off side. A drain line leads from a working chamber of the piston via the switching seat valve to the tank. A closing side is adapted to be acted upon by pressure and an opening side is adapted to be acted upon by a force generated when the pressure limiting seat valve responds. The pump is adapted to be switched off when the maximum operating pressure has been reached, so that the piston will execute a return stroke. A pressure-increasing restriction is provided on the flow-off side of the pressure limiting seat valve.