Patent classifications
Y10T137/87153
Multi-gas straight channel showerhead
A method and apparatus that may be utilized for chemical vapor deposition and/or hydride vapor phase epitaxial (HVPE) deposition are provided. In one embodiment, a metal organic chemical vapor deposition (MOCVD) process is used to deposit a Group III-nitride film on a plurality of substrates. A Group III precursor, such as trimethyl gallium, trimethyl aluminum or trimethyl indium and a nitrogen-containing precursor, such as ammonia, are delivered to a plurality of straight channels which isolate the precursor gases. The precursor gases are injected into mixing channels where the gases are mixed before entering a processing volume containing the substrates. Heat exchanging channels are provided for temperature control of the mixing channels to prevent undesirable condensation and reaction of the precursors.
Connector element
A connector element for connecting a pump assembly for use in a selective catalytic reduction system to a reagent supply of reagent fluid, the connector element comprising: a reagent flow passage arranged to receive reagent fluid at a first end from the reagent supply and to supply the reagent fluid via a second end to a reagent inlet port for reagent fluid on the pump assembly; a coolant passage for cooling fluid, the coolant passage arranged to be in communication with a coolant port on the pump assembly.
Encapsulated valve system and method of use
An encapsulated valve system includes a first housing portion having a first facing surface, the first facing surface comprising a plurality of branch pathways formed as a recess within the first facing surface. The valve system further includes a second housing portion having a second facing surface, the second facing surface comprising a plurality of branch pathways formed as a recess within the second facing surface. A disposable conduit is configured to be interposed between the first and second housing portions and disposed within the recess of the first facing surface and the recess of the second facing surface. The disposable conduit is thus sandwiched between the first and second facing surfaces. A plurality of pinch valve actuators are mounted on one or both of the first housing portion and the second housing portion, the plurality of pinch valve actuators configured to pinch the disposable conduit at selective branch pathways.
Manifolds for Use in Conducting Dialysis
The present application discloses novel systems for conducting the filtration of blood using manifolds. The manifolds integrate various sensors and have fluid pathways formed therein to direct fluids from various sources through the requisite blood filtration or ultrafiltration system steps.
Chemical Dispense System with Reduced Contamination
An apparatus includes a production tool and a pipe connected to the production tool. The pipe includes an inner pipe formed of a metal-free material, an outer pipe encircling the inner pipe, and an inlet connected to a channel between the inner pipe and the outer pipe. The apparatus further includes a chemical supply system connected to the pipe. The chemical supply system is configured to supply a chemical through a channel encircled by the inner pipe to the production tool.
Filling connector with integrated ventilation duct
A filling connector (10) for filling a liquid container comprises a liquid pipeline (12), for conveying liquid from a liquid inlet end (16) portion having a liquid inlet opening (14) to a liquid outlet end portion (20) having a liquid outlet opening (18), and further comprises a gas pipeline (22), for conveying gas in the opposite flow direction while liquid is conveyed through the liquid pipeline (12), from a gas inlet end portion (26) having a gas inlet opening (24) to a gas outlet end portion (30) having a gas outlet opening (28), the liquid pipeline (12) and the gas pipeline (22) being formed integrally with one another and the filling connector (10) being formed as an injection-molded part, the gas pipeline (22) being manufactured using injection technology, such as fluid injection technology, in particular water injection technology, particularly preferably gas injection technology or projectile injection technology.