Embodiments of the present disclosure provide a liner assembly including a plurality of individually separated gas passages. The liner assembly enables tenability of flow parameters, such as velocity, density, direction and spatial location, across a substrate being processed. The processing gas across the substrate being processed may be specially tailored for individual processes with a liner assembly according to embodiment of the present disclosure.

A valve comprising a valve body with a fluid inlet, a fluid outlet, an inner cavity and an outer cavity at least partly surrounding the inner cavity. The outer cavity is in fluid communication with the fluid inlet and with the inner cavity and the inner cavity is in fluid communication with the fluid outlet. A flow splitter is provided, forming at least two flow passages in the outer cavity.

A coolant supply unit includes a plurality of pumps, a casing that includes a coolant inlet port, a plurality of branch ports that respectively convey coolant to the plurality of pumps, a plurality of flow merging ports through which the coolant from the plurality of pumps merges, and a coolant outlet port; and a separating wall that is provided inside the casing and that separates the inside of the casing into a distribution chamber that is in communication with the inlet port and the branch ports, and a flow merging chamber that is in communication with the flow merging ports and the outlet port.

A system, apparatus, and method for attenuating pulsations in a pumping system.

Embodiments of the present disclosure provide a liner assembly including a plurality of individually separated gas passages. The liner assembly enables tenability of flow parameters, such as velocity, density, direction and spatial location, across a substrate being processed. The processing gas across the substrate being processed may be specially tailored for individual processes with a liner assembly according to embodiment of the present disclosure.

A hydraulic control valve, a dual-cylinder extension system and an aerial work engineering machine. The control valve comprises a flow distributing and collecting valve, and control valve body is provided with a first oil opening, a second oil opening and a third oil opening. A first oil opening, a second oil opening and a third oil opening of said flow distributing and collecting valve are respectively communicated with the first oil opening, the second oil opening and the third oil opening of the valve body. The control valve has two working states, wherein, in the first working state, the oil path between the second oil opening and the third oil opening of the valve body is blocked; and in the second working state, the oil path between the second oil opening and the third oil opening of the valve body is opened.