A rotary chuck for processing wafer-shaped articles comprises a chuck body having a series of gripping pins that are movable by sliding horizontally and in unison relative to the chuck body from a first position in which the gripping pins are relatively more retracted into the chuck body to a second position in which the gripping pins are relatively more extended from the chuck body and in which the gripping pins are positioned so as to support a wafer-shaped article of a predetermined diameter.

A rotary chuck for processing wafer-shaped articles comprises a chuck body having a series of gripping pins that are movable by sliding horizontally and in unison relative to the chuck body from a first position in which the gripping pins are relatively more retracted into the chuck body to a second position in which the gripping pins are relatively more extended from the chuck body and in which the gripping pins are positioned so as to support a wafer-shaped article of a predetermined diameter.

Some embodiments of the present disclosure relate to a clamping chuck with a chuck body, an axis of rotation, at least two clamps, a spiral ring, which is used as an adjustment stroke mechanism of the adjustment of at least two clamps and which can be actuated via a drive, and at least one clamping stroke mechanism, which can be actuated via a traction mechanism. The clamping stroke mechanism is arranged parallel to the axis of rotation in the chuck body and can be moved parallel to the axis of rotation.

A chuck device in which a rotary sleeve provided to a main body is rotated, and by rotation of an annular rotary body which rotates together with the rotary sleeve, jaws screwed together with the rotary body are expanded, contracted, advanced, and retracted, and a tool is gripped by the jaws; the chuck device comprising a retaining engaging body for engaging with the rotary body and preventing the rotary sleeve from coming out of the rotary body; wherein the retaining engaging body is provided to be fixed to a proximal end side of the rotary sleeve; a rotation transmission part for directly or indirectly transmitting the rotation of the rotary sleeve to the rotary body is provided to the retaining engaging body; and the rotation of the rotary sleeve is transmitted to the rotary body via the retaining engaging body, and the rotary body rotates together with the rotary sleeve.