A protective cover for an electrostatic chuck may include a conductive wafer and a plasma resistant ceramic layer on at least one surface of the conductive wafer. The plasma resistant ceramic layer covers a top surface of the conductive wafer, side walls of the conductive wafer and an outer perimeter of a bottom surface of the conductive wafer. Alternatively, a protective cover for an electrostatic chuck may include a plasma resistant bulk sintered ceramic wafer and a conductive layer on a portion of a bottom surface of the plasma resistant bulk sintered ceramic wafer, wherein a perimeter of the bottom surface is not covered.

A shrink-fit chuck having a receiving body, a receiving opening for a tool shank, arranged in the receiving body, an accumulation and collection chamber arranged in the front region of the receiving opening and at least one coolant supply channel leading to the accumulation and collection chamber. The accumulation and collection chamber is delimited to the front by a ring bar arranged at the front end of the receiving opening. The internal diameter of the ring bar is adjusted to the internal diameter of the receiving opening in such a manner that as small an annular gap as possible exists between the ring bar and the tool shank. A plurality of outlet openings are provided in the ring bar for discharging to the outside a coolant routed via the coolant supply channel into the accumulation and collection chamber.

The invention relates to a tool holding device comprising a tool holding body for securing, in a fixed manner, a rotary tool comprising a shaft, provided with a clamping section and a receiving opening for the shall of the tool, a coolant feeding device for pressurized fluid, at least one coolant guiding device for guiding the coolant into a clamped tool shaft. The coolant guiding device is designed as at least one flat groove on an inner side of the receiving opening, joining to the front side on a free end of the tool holding body and directly adjacent to the tool shaft in the surroundings of the tool holding device or a coolant storing chamber and or collecting chamber is provided in the region of the free end of the tool holding body, to which the at least one coolant guiding device joins. The coolant storing chamber and or collecting chamber is connected by means of an annular gap to the surroundings of the tool holder device. The coolant storing chamber and/or collecting chamber and the annular gap are defined at least partially by the work shaft.

The invention relates to a clamping fixture comprising a chuck (1) and for locking thereto a workpiece pallet (2). The chuck (1) comprises first centering members in the form of centering spigots (5) whilst said workpiece pallet (2) is provided with a main body (20) and secured thereto a centering disk (23). The centering disk (23) is provided with second centering members in the form of centering openings (24). The centering spigots (5) of the workpiece pallet (2) are adapted to the centering openings (24) of the workpiece pallet (2) that the latter is alignable in the X-direction and Y-direction on clamping to the chuck (1). Provided topping the chuck (1) is a sealing member assembly (7). Disposed between the centering disk (23) and the main body (20) of the workpiece pallet (2) is a sealing disk (21) which overhangs the centering disk (23) radially. The portion of the sealing disk (21) overhanging the centering disk (23) radially is configured such that said portion sealingly comes into contact with a sealing member of the sealing member assembly (7) when clamping the workpiece pallet (2).

A bit holder for holding a bit for coupling the bit with a drive tool, wherein the bit holder comprises a receiving unit which is configured for receiving the bit, a tool coupling which is configured for coupling with the drive tool, and an impact load protection unit which is configured for protecting from an impact load which is acting on the bit holder, in particular on a fixing sleeve of the bit holder, when impinging the bit holder on an anchoring base, when an attachment element which is to be driven by the bit, the drive tool and the bit holder, is inserted into the anchoring base.

A chuck apparatus grips a workpiece by a gripping section having a pair of chuck members. The chuck apparatus is equipped with a cover member and pressing members. The cover member includes insertion holes through which fingers of the chuck members are inserted, and seal members that surround the insertion holes and abut against the fingers. The cover member is attached to a body so as to cover base portions of the chuck members, and is elastically deformable so as to follow displacement of the chuck members. The pressing members press the seal members against the fingers.

Tool fitting device for a power tool, in particular a chipping hammer, includinga holding device for receiving and holding a tool shank, a retention element extending at least around a section or sections of the holding device, and a dust protection device for preventing the penetration of dust into the tool fitting device. The dust protection device includes at least one first dust stripping element, at least one fixing bead, and at least one sealing lip element, wherein the sealing lip element is positioned in front of the retention element in the axial direction. Dust protection device for use in a tool fitting device.