Processes and systems for cleaned storage of high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber cleans the stored workpieces. A purge gas system prevents contamination of the articles stored within the workpieces. A robot detects the condition of the storage compartment before delivering the workpiece. A monitor device monitors the conditions of the stocker.

The invention relates to an industrial robot (1) having a robot arm (2) with a plurality of axes (9, 10) designed for a high payload and having a weight equalization system (12) based on gas for at least one of the axes (9), whose pressurized components (13-15) each have a volume of less than 1 liter and a maximum pressure of less than 1000 bar.

A sterile drape comprises a plurality of sleeves and a plurality of sterile adapters each at a distal end of a corresponding drape sleeve. Each sterile adapter includes a housing configured to receive a distal face of an instrument manipulator having a plurality of manipulator actuator outputs, a membrane interface at a distal end of the housing that includes a plurality of actuator interfaces, and a pair of supports coupled to the housing to retain a surgical instrument having a plurality of instrument actuator inputs so that the plurality of instrument actuator inputs are opposite to corresponding manipulator actuator outputs with a corresponding actuator interface between each corresponding instrument actuator input and manipulator actuator output. Each sterile adapter also comprises a rotatable seal adapted to couple a proximal opening of each drape sleeve to a rotatable element at a distal end of the manipulator arm.

An end effector for a computer-assisted surgical system includes a mount configured to be coupled to an arm and a housing coupled to the mount and configured to interchangeably support a first operating, member and a second operating member. When the housing supports the first operating member, the housing is configured to prevent translation of the first operating member relative to the mount. When the housing supports the second operating member, the housing is configured to allow translation of the second operating member relative to the mount along a first axis.

An instrument manipulator and a robotic surgical system including an instrument manipulator are provided. In one embodiment, an instrument manipulator includes a plurality of independent actuator drive modules, each of the plurality of actuator drive modules including an actuator output, wherein each of the actuator outputs are configured to independently actuate a corresponding actuator input of a surgical instrument without force input from another actuator output. The instrument manipulator further includes a frame housing the plurality of independent actuator drive modules, the frame including a distal end from which each of the actuator outputs distally protrude for engaging the corresponding actuator inputs of the surgical instrument.

A touch screen testing platform may be used to engage a dynamically positioned target feature being displayed on a touch screen enabled device during a testing protocol. The platform may record imagery displayed by the touch screen device and then analyze the imagery to locate the target feature within a reference coordinate system. The platform may recognize that the target feature is missing from the imagery and respond by causing the touch screen device to scroll through a command menu and/or toggle through virtual screens. Once located, the platform may instruct a robotic device tester to select the target feature by contacting the touch screen at the identified location using a conductive tip designed to simulate a user's fingertip. Prior to running a test, the camera may be focused to a point that is offset from the display screen of the touch screen device.

A surgical instrument is provided, including: at least one articulatable arm having a distal end, a proximal end, and at least one joint region disposed between the distal and proximal ends; an optical fiber bend sensor provided in the at least one joint region of the at least one articulatable arm; a detection system coupled to the optical fiber bend sensor, said detection system comprising a light source and a light detector for detecting light reflected by or transmitted through the optical fiber bend sensor to determine a position of at least one joint region of the at least one articulatable arm based on the detected light reflected by or transmitted through the optical fiber bend sensor; and a control system comprising a servo controller for effectuating movement of the arm.

A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

A drape includes a first drape portion configured to receive a manipulator arm of a surgical system and a pocket coupled to a distal portion of the first drape portion. The pocket is configured to receive a manipulator of the surgical system. The pocket includes a flexible membrane positionable between an output of the manipulator and an input of a surgical instrument mountable to the manipulator. In some embodiments, the flexible membrane is located at a distal end of the pocket. In some embodiments, the flexible membrane is configured to allow an actuating force to be transmitted from the output of the manipulator to the input of the surgical instrument. In some embodiments, the pocket provides a sterile barrier between the manipulator and the surgical instrument. In some embodiments, the drape further includes a rotatable seal configured to couple a proximal opening of the pocket to the first drape portion.

In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.