The present invention provides novel microfluidic substrates and methods that are useful for performing biological, chemical and diagnostic assays. The substrates can include a plurality of electrically addressable, channel bearing fluidic modules integrally arranged such that a continuous channel is provided for flow of immiscible fluids.

The present invention provides novel microfluidic substrates and methods that are useful for performing biological, chemical and diagnostic assays. The substrates can include a plurality of electrically addressable, channel bearing fluidic modules integrally arranged such that a continuous channel is provided for flow of immiscible fluids.

A connector for transferring fluid and method therefor. The connector may have a first port and a second port which may be coupled together at a main channel with a valve element therein controlling fluid flow through the first port. The first port joins the main channel to provide a fluid path around the valve element and through the second port.

A slurry and/or chemical blend supply apparatus suitable for providing slurry and/or chemical blend to chemical mechanical planarization (CMP) tools or other tools in a semiconductor fabrication facility, related processes, methods of use and methods of manufacture. The slurry and/or chemical blend supply apparatus includes one or more of the following: feed module, blend module, analytical module and distribution module.

An exhaust treatment device is disclosed. The exhaust treatment device has a compact configuration that includes integrated reactant dosing, reactant mixing and contaminant removal/treatment. The mixing can be achieved at least in part by a swirl structure and contaminant removal can include NO.sub.x reduction.

A mixing valve (10) includes a valve body (12) having a hot fluid inlet (14), a cold fluid inlet (16), a mixed fluid outlet (18), and a cavity (20) in the valve body (12) between the inlets (14, 16) and the outlet (18). Mixing valve (10) includes a liner (30, 130, 230, 430, 530, 630, 730, 830) positioned in valve body (12) and a valve member (40, 140, 240, 340, 440, 540, 640, 740, 840) movable therein between a first position restricting the flow of hot fluid and a second position. Liner (30, 130, 230, 430, 530, 630, 730, 830) includes a downstream valve seat (74, 174, 274, 474, 574, 674, 774) that, when engaged by valve member (40, 140, 240, 340, 440, 540, 640, 740, 840), restricts flow of hot fluid past valve member (40, 140, 240, 340, 440, 540, 640, 740, 840).

A device or system includes a mixer comprising a three-dimensional lattice defining a plurality of tortuous, interconnecting passages therethrough. The mixer is in communication with sources or streams of at least two separate components which, when mixed, form a combined fluid stream. The sources or streams may be, at least initially, on opposite sides of the mixer, or the sources or streams may be on the upstream side of the mixer with an outlet disposed downstream of the mixer. A related method may include providing a mixer comprising a three-dimensional lattice defining a plurality of tortuous, interconnecting passages therethrough, and selecting a material for the mixer based on physical characteristics of said material, said characteristics including a selected one or more of mean flow pore size, thickness and porosity volume.

A connector for transferring fluid and method therefor. The connector may have a first port and a second port which may be coupled together at a main channel with a valve element therein controlling fluid flow through the first port. The first port joins the main channel to provide a fluid path around the valve element and through the second port.

The specification generally discloses systems and methods for mixing and delivering fluids in microfluidic systems. The fluids can contain, in some embodiments reagents that can participate in one or more chemical or biological reactions.

A pressure compensation and mixing device includes: a mixing unit configured to mix a fluid guided in the mixing unit; and a pressure compensation unit configured to restrict pressure rising in the fluid. The mixing and pressure compensation units are integrated in a container unit. The mixing unit has a mixing volume. The pressure compensation unit has a pressure compensation volume. The mixing and pressure compensation volumes adjoin each other and are separated from each other at least partially by a common separating wall. The pressure compensation unit is arranged inside the mixing unit. The mixing unit includes: an inlet tangentially arranged on the mixing volume such that a fluid let in through the inlet flows in tangentially into the mixing volume; and an outlet axially arranged on the mixing volume such that a fluid let out through the outlet flows out of the mixing volume axially.