A gas delivery system for a substrate processing system includes first and second valves, a first gas channel, and a cylinder. The first valve includes a first inlet and a first outlet. The first outlet is in fluid communication with a processing chamber of the substrate processing system. The second valve includes a second inlet and a second outlet. The cylinder defines a second gas channel having a first end and a second end. The cylinder is at least partially disposed within the first gas channel such that the cylinder and the first gas channel collectively define a flow channel. The flow channel is in fluid communication with the first end of the second gas channel and with the first inlet. A third gas channel is in fluid communication with the second end of the second gas channel and with the second inlet.

Gas flow control valves comprising a valve housing including a cylindrical interior passage, and a housing opening extending from the interior passage through the housing. The gas flow control valve further comprises a cylindrical rotary valve element including a sidewall, and a rotary valve element opening extending through the sidewall. The valve element is rotatably received within the interior passage of the valve housing, such that the housing opening may be selectively aligned with the rotary valve element opening, and an area of overlap of the housing opening and the valve element opening may be varied by rotating the valve element within the interior passage of the valve housing.

A sanitary fitting having an outlet contains an outlet end which is formed in a substantially tubular manner. In this tubular end there is arranged a shut-off valve having a cartridge, water flowing through the center of said shut-off valve. A rotary shaft serves to rotate and thus actuate the valve cartridge. The rotary shaft is arranged and mounted inside a mounting sleeve which contains an outlet element at its outlet-side end. An external sleeve, which forms a flush continuation of the fitting housing, serves to rotate the rotary shaft. The sleeve is connected to the rotary shaft by a radial pin which engages through an arcuate slot that extends in the circumferential direction. When the sleeve is rotated, the position and setting of the outlet element remains the same.

A valve with a shuttle for use in a flow management system includes a spill port and bypasses a backflow.

A sampling device including a closed sample container with a flexible wall and with an interior, a coupling member for releasable coupling to a sample outlet connector, a communicating passage between the coupling member and the interior of the sample container, at least the interior of the sample container being sterile, and a sterility protection device for ensuring the sterility of the interior of the sample container in the form of a three-way valve between the coupling member and the sample container, the three-way valve having a connection to the coupling member, a connection to the sample container and an outlet, and the three-way valve being, before use, in a closed position in which it bars access to the interior of the sample container.

A valve with a shuttle for use in a flow management system includes a spill port and bypasses a backflow.

A standpipe assembly including a pair of elongated, side-by-side chambers each including a first end and a second end, a Y-valve including an inlet and two outlets, each outlet in fluid communication with a respective one of the first ends of the pair of chambers, a hose connection snoot in fluid communication with the second ends of the pair of chambers, and a valve handle operatively connected to the Y-valve, wherein the valve handle is positionable between a first position and a second position, in the first position, the valve handle is spaced apart from the pair of chambers by at least two inches, in the second position, the valve handle is spaced apart from the pair of chambers by less than two inches.

A valve with a bushing is disclosed. The bushing is configured to provide axial pressure towards one or more seals to allow easier assembly and disassembly. The configuration provided allows for easier maintenance and prevent damage to the one or more seals.