One embodiment of the disclosure provides a method of fabricating a chamber component with a coating layer disposed on an interface layer with desired film properties. In one embodiment, a method of fabricating a coating material includes providing a base structure comprising an aluminum or silicon containing material, forming an interface layer on the base structure, wherein the interface layer comprises one or more elements from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and forming a coating layer on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z. In another embodiment, a chamber component includes an interface layer disposed on a base structure, wherein the interface layer is selected from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and a coating layer disposed on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z.

A composite plate having a thickness of no more than 2 mm, and having laminated therein a zirconia sintered body, an adhesive layer, and a base material, the elasticity of the base material being no more than 100 GPa, and the apparent density of the composite plate being no more than 4.3 g/cm.sup.3.

A method for the joining of ceramic pieces into an assembly adapted to be used in semiconductor processing. The joined pieces are adapted to withstand the environments within a process chamber during substrate processing, chamber cleaning processes, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The ceramic pieces may be aluminum nitride and the pieces may be brazed with aluminum. The joint material is adapted to withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The joint is adapted to provide a hermetic seal across the joint. The joined pieces are adapted to be separated at a later time should rework or replacement of one of the pieces be desired.

A method for preparing an anion adsorbent may be provided, which comprises the steps of: mixing at least two metal salts with each other, thereby forming a stack structure in which cationic compound layers and anionic compound layers containing anions and water of crystallization are alternately stacked on one another; performing a first heat treatment on the stack structure to expand between the cationic compound layers, thereby preparing a preliminary anion adsorbent; and performing a second heat treatment on the preliminary anion adsorbent to remove the anions and the water of crystallization from the anionic compound layers while allowing at least one of the anions to remain, thereby preparing the anion adsorbent.

The embodiments described herein relate to chemically and mechanically durable glass compositions and glass articles formed from the same. In another embodiment, a glass composition may include from about 70 mol. % to about 80 mol. % SiO.sub.2; from about 3 mol. % to about 13 mol. % alkaline earth oxide; X mol. % Al.sub.2O.sub.3; and Y mol. % alkali oxide. The alkali oxide may include Na.sub.2O in an amount greater than about 8 mol. %. A ratio of Y:X may be greater than 1 and the glass composition may be free of boron and compounds of boron. In some embodiments, the glass composition may also be free of phosphorous and compounds of phosphorous. Glass articles formed from the glass composition may have at least a class S3 acid resistance according to DIN 12116, at least a class A2 base resistance according to ISO 695, and a type HGA1 hydrolytic resistance according to ISO 720.

A hollow body includes a wall of glass which at least partially surrounds an interior volume of the hollow body. The wall of glass has a wall surface which has a surface region. At least in the surface region the wall surface has a content of N in a range from 0.3 to 10.0 at-%, and at least 5 at-% Si.

A coated glass package comprising a glass body having a Type 1 chemical durability according to USP 660, at least a class A2 base resistance or better according to ISO 695, and at least a type HGB2 hydrolytic resistance or better according to ISO 719. A lubricous coating having a thickness of 100 microns may be positioned on at least a portion of the exterior surface of the glass body. The portion of the coated glass package with the lubricous coating comprises a coefficient of friction that is at least 20% less than an uncoated glass package and the coefficient of friction does not increase by more than 30% after undergoing a depyrogenation cycle. A horizontal compression strength of the coated glass package is at least 10% greater than an uncoated glass package and the horizontal compression strength is not reduced by more than 20% after undergoing the depyrogenation cycle.

Disclosed are methods for coating or decorating a surface of a glass sleeve. The methods include depositing a metal layer onto a surface of the glass sleeve by an electroless plating method. Also disclosed are glass sleeves which are coated or decorated on an internal surface, and electronic devices comprising the coated glass sleeves.

A laminated or single layer glass cylinder and its method of making are disclosed. The laminated cylinder glass is a precursor component to enable making subsequent drawn tubing having high optical quality. The laminated cylinder glass may comprise a first layer of glass as a clad glass and a second layer of glass as a core glass. The second layer of glass may be bound to the first layer of glass. The second layer may have a higher CTE from about 510.sup.7/ C. to about 10010.sup.7/ C. than the first layer of glass. The first layer and second layer of glass may have different softening points within about 200 C. of each other. In some embodiments, the first layer and second layer of glass may have different softening points from about 50 C. to about 200 C. of each other.

A coated glass container having a Type 1 chemical durability according to USP 660 (2011), a class A2 base resistance or better according to ISO 695, and a type HGB2 hydrolytic resistance or better according to ISO 719. The glass body having an interior surface and an exterior surface. A lubricous coating having a thickness of <100 microns positioned on the exterior surface. The portion of the exterior surface with the coating having a coefficient of friction that is at least 20% less than an uncoated glass container formed from the same glass composition and does not increase by more than 30% after undergoing depyrogenation at about 260 C. for 30 minutes. A horizontal compression strength of the coated glass container is at least 10% greater than an uncoated glass container formed from the same glass composition and is not reduced by more than 20% after heat treatment at about 260 C. for 30 minutes.